Digital Flow Switch (Manifold type)

Stop valve Nil 95 S 95 Nil P 139 1/2 Remote sensor/ W 139 (symbol 04) 5 to 40 L/min Integrated display type 3/4 (symbol 40) Nil 106 (symbol 06) S 106 Yes P 150 W 150 B: Total length of the supply unit (mm) Unit construction Flow range Port size B Symbol Flow adjustment valve Stop valve Nil 51 1/2 S 51 (symbol 04) 5 to 40 L/min 3/4 (symbol 40) P 95 (symbol 06) W 95 -69No.PF-OMW0004

HRX-OM-S004

PV SV 51. Set the monitoring time before the "Dust-proof filter maintenance" alarm is generated with [] key or [] key, and press [SEL] key to enter.

HRX-OM-W032

PV SV 51. Set the monitoring time before the "Dust-proof filter maintenance" alarm is generated with [] key or [] key, and press [SEL] key to enter.

LEH_C

/77 246/53 243/48 242/39 254/43 614 1640 52130 84210 (N) 40100 1) 3) 26 38 1128 /(mm/s) 2)3) 580 /550 5100 /550 5120 /550 + () (mm) 4) 0.02 (mm)5) 0.05 /(mm) 6) 0.5 1.0 / (m/sec 2) 7) 150 / 30 (c.p.m) 60 () 540 (%RH) 90 () 165 220 430 585 1120 1760 (g) 135 190 365 520 20 28 42 (DC24V) () A/B (800 /) (V) DC2410% 11/7 28/15 34/13 36/13 / (W) 8) 8/7 22/12 (W) 9) 14 42 19 51

Air Combination

27.8 61.5 42.5 82.5 42.5 82.5 42.5 82.5 259.9 228.6 226.9 222.5 227 242.5 247 AC60-D 28 51 27.8 61.5 42.5 82.5 42.5 82.5 42.5 82.5 273.9 242.6 240.9 236.5 241 256.5 261 -25- 10-2.

SYJ300/500/700

Base mounted (with sub-plate) 65 (51) 1/8 61 (47) 60 (46) 82 (68) V100 Note) Value for DC. Add 1 g for AC. ( ): Without sub-plate.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

VVQD1000-10A-51 set Blanking plate part no. (1st station) VQD1151-5L4 sets Valve part no. (2 to 5th station) LO: Plug lead type L plug connector, Without lead wire With light/surge voltage suppressor M: Plug lead type M plug connector, With lead wire With light/surge voltage suppressor Prefix the asterisk to the part nos. of the solenoid valve, etc.

Vacuum Pad

D 31 41 51 E 51 F 132 168 178 30 40 50 77 23 Symbol/Type Pad with Ball Spline Buffer U: Flat 2, 4, 6, 8 Pad diameter Ball spline guide is used to the buffer.

Vacuum Pad

D 31 41 51 E 51 F 132 168 178 30 40 50 77 23 Symbol/Type Pad with Ball Spline Buffer U: Flat 2, 4, 6, 8 Pad diameter Ball spline guide is used to the buffer.

Air Pilot Operated

o1 (51) l2B 1.06 1 7 Hold Down 8olls {8.32 x 1 9'61(2) NXT 333,17.5 Mi(tne ln Parenlhess NVSA45l4 DETAIL REF. 0EscRrPTtol{ MATERIAL PAB' NO. 1 Body Alum. O.C. 2 Spring Rturn AXT 3339-3 3 Spring . Seat AXT 333 PILOI COVEF "8" END Typ "N & O" w/(4) scrws PC 010S1 4B Type "A & B" w/{41 Screws P C 0 1 1 1 1 Screw Pllot Cover (41 6 Spool & Sleeve Ass'y. 440F. S.S. 7 O R i m .

Process Pump

-1S19 1S25 10 204 255 120 4 x 9 AIR SUP (P1) Rc, NPT, G 1/4" FLUID OUT With nut 249 A 8 8 195 157 118 91 51 18 FLUID IN With nut AIR SUP (P2) Rc, NPT, G 1/4" Tube Size Applicable for Nut Size (Tube size can be altered, using a reducer even within the same nut size.)

REA/REB

Model selected 10-2-51 51 Series REAH Model Selection 2 Caution on Design 1 The load mass allowable moment differs depending on the workpiece mounting method, cylinder mounting orientation and piston speed. In making a determination of usability, do not allow the sum (n) of the load factors (n) for each mass and moment to exceed 1.

MXQ

With end lock (12): MXQ12-R Operating port 2-M5 x 0.8 5 22 22 51 3 Other dimensions are the same as basic style.

1.1

536) (426) 4 x 37 4 x 13 Caster with adjuster (Plugged) Tank drain port Rc 1/2 (69) (For anchor bolt) With casters (-A) (Option) 18 Series HRG Thermo-cooler Dimensions: Air-Cooled Refrigeration HRG010-A (-A) (991) (595) HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products Refrigerant high pressure gauge Ventilation air outlet Circulating fluid pressure gauge Eye bolt M12 (1300) (51

H/DL/L/LL

DL08-01 18 32 19 8 14 DL08-02 16 21 38 14 12 24.5 DL08-03 22 54 26.5 31 10 17 DL10-02 23 51 Connection thread 26.5 14 DL10-03 17 22 57 DL10-04 27 28.5 100 DL12-02 25 76 17 43 12 19 28.5 DL12-03 17 26 85 DL12-04 27 17 Union Tee: DT H1 (width across flats) H2 (width across flats) Applicable tubing O.D.

3 Port Solenoid Valve

52.8 61.2 63 71.4 73.2 81.6 83.4 91.8 93.6 102 103.8 112.2 114 122.4 124.2 132.6 134.4 L1 L2 SUP/EXH block fitting entry direction: Side Panel fitting dimensions/Mounting hole dimensions M3 thread through hole No. 10-32UNF (Inch size) 27.5 31.1 L1 L2 Station n 1 2 3 4 5 6 7 8 9 10 11 12 20.4 10.2 30.6 20.4 40.8 30.6 51 40.8 61.2 51 71.4 61.2 81.6 71.4 91.8 81.6 102 91.8 112.2 102.0 122.4

Base Mounted Metal Seal/Rubber Seal Series VQ

type) D side U side Stations 1 2 3 4 5 6 n 3(R) EXH port DIN rail clamp screw Number of stations Lead wire AWG24 P = 16 2n-C4, C6, C8 C4: One-touch fitting for 4 C6: One-touch fitting for 6 C8: One-touch fitting for 8 1(P) SUP port Dusttight/Low jetproof type Lead wire kit < >: AC Dimensions Formula L1 = 16n + 35, L2 = 16n + 47 n: Station (Maximum 8 stations) 2 1 3 4 5 6 7 8 L n 51

Compressed Air Cleaning Filter Series

Refer to dimensions on pages 49 through to 51 for details. 2 3 Sight glass Tempered glass The AME850 is aluminum casted. Replacement Parts AME450C Model Applicable model No.

Vacuum Pad

D 31 41 51 E 51 F 132 168 178 30 40 50 77 23 Symbol/Type Pad with Ball Spline Buffer U: Flat 2, 4, 6, 8 Pad diameter Ball spline guide is used to the buffer.

Vacuum Pad

D 31 41 51 E 51 F 132 168 178 30 40 50 77 23 Symbol/Type Pad with Ball Spline Buffer U: Flat 2, 4, 6, 8 Pad diameter Ball spline guide is used to the buffer.