Digital Flow Switch ( compatible)

Setting of switch operation 1_P/1_n (page 47) (Selection of display colour) Setting of Add dEC1 dEC2 (page 51) 3. Input of set values Setting of Setting of P1L/n1L Setting of P_1/n_1 P1H/n1H P1/n1 H_1 WH1 (page 50) (page 47) (page 49) 4. Delay time Setting of dtH1(ON) dtL1(OFF) (page 48) 5. Selection of display colour rED/Grn/1SoG/1Sor/2SoG/2Sor (page 51) 6.

HRX-OM-M090

5.17.1 Data reset function . 5-51 5.17.2 Method of resetting data reset function . 5-51 5.18 Accumulated time reset function . 5-52 5.18.1 Accumulated time reset function . 5-52 5.18.2 Method of resetting accumulated time reset function . 5-52 5.19 Communication function . 5-54 5.19.1 Communication function . 5-54 5.19.2 Communication function setting and checking . 5-54 Chapter 6 OptionOptional

HRX-OM-R016

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M

HRX-OM-W038

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M

HRX-OM-O021

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M

HRX-OM-R005

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M

AC Servo Motor Driver (Pulse input type/Positioning type)

Overload alarm margin The margin until the load reaches the overload (AL.50, AL.51) alarm level is displayed in %. An overload alarm will occur when margin is 0%. 0.1% 19 Excessive error alarm margin The margin until the error reaches the excessive error (AL.52) alarm level is displayed in encoder pulses.

High performance type Step Motor Controller (Servo/24 VDC)

Operation instruction 49 (1) Power on Return to origin 49 (2) Positioning operation 49 (3) Pushing operation 50 (4) HOLD 51 (5) Reset 51 (6) Stop 52 (7) Area output 53 11. Alarm Detection 54 11.1 Parallel output for the alarm group 54 11.2 Alarm details 55 12. Wiring of cables/Common precautions 62 13.

HRX-OM-M005

Item Descriptions 1 AUTO TUNING Used to display the Auto tuning screen on page 5-50. 2 EV ADJUST Used to display the EV opening adjustment screen on page 5-51. 3 [Return] key Used to display the Detail setting screen 1 on page 5-22.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Start up procedure for battery-less absolute encoder . 51 10.1 Procedure for start up . 51 10.2 When supplying power for the first time . 52 10.3 Supply of power . 53 10.4 Alarm (group E) is cleared by a cut to the power supply . 54 11.

CXS

Standard Strokes (mm) Manufacturable stroke range Model Standard strokes 60 to 100 10, 20, 30, 40, 50 CXSJ6 80 to 150 10, 20, 30, 40, 50, 75 CXSJ10 Refer to "Made to Order" on page 51 for long strokes (i.e., strokes beyond the standard stroke range). Non-standard strokes for a size 6 cylinder are available as a special order.

Table of Contents

52.4 5.2 6.2 7.1 6.2 7.1 8.1 7.4 8.2 9.5 10.3 11.6 11.8 14.8 14.8 19.8 19.8 26.5 82 11.3 26.5 15-9-51 10 Dual Speed Controller with One-touch Fitting Stainless Series Series ASD-FG Model Two flow control valves and check valves have been integrated.

KA

51 22 1 4 3 8 KAU12-U02 KAU12-U03 53 52 61 55 20.9 12 20.9 22 22 45.4 45.4 1 2 KAU12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

SYJ3000/5000/7000

[0.44] 0.44 0.41 [0.41] 0.41 0.34 0.12 0.37 0.54 0.19 0.19 M5 x 0.8 SYJ520--C6 fitting for 6) 0.38 [0.38] 0.36 0.11 [0.11] 0.11 84 126 92 82 3 position 0.41 [0.39] 0.23 [0.12] SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 81 (47) 100 (66) 102 (68) 142 (108) 51

VQ4000

VQ 4 1 0 0 5 Series Enclosure Terminal block box kit 4 VQ4000 Nil Dust tight VV5Q41-07C8T01 set VQ4100-52 sets VQ4200-52 sets VQ4300-51 set Manifold base part no. Valve part no. (Stations 1 and 2) Valve part no. (Stations 3 and 4) Valve part no.

VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 Q L1 L2 M1 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6

Compact Guide Cylinder Series MGQ

20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Operating direction Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 MGC Made to Order Specifications (For details, refer to pages 1829 to 2021.) 0UT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51

1

This means that the output can become energized anywhere between 49 to 51 [kPa]. (Refer to the chart below.) Note: If the pressure switch allows an error of 1 [% F.S.], the output turns ON at 51 [kPa]. Taking the repeatability into account, the output turns ON at 50 to 52 [kPa] and, in the same way, the pressure display turns 50 [kPa] at 49 to 51 [kPa]. (Refer to the chart below.)

VHK

18 41 6 60.4 62.4 36.1 38.1 31 54 56 17 14 41 1 8 1 4 3 8 8 18 41 62.2 26.2 36 16.5 3.5 18.7 11 9.7 1.2 31 58 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-08F-01S VHKl-08F-02S VHKl-08F-03S 65.2 66.2 39 40 32 59 60 19 22 40 1 4 3 8 1 2 10 22 46 73.8 30.5 43.3 21.5 4 20.8 14 16.1 3.2 49 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-10F-02S VHKl-10F-03S VHKl-10F-04S 74.8 78.2 44.3 47.7 51 68 17 19 72 70

XL

) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi