3

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + T When P2 + 0.1 > b, subsonic flow P1 + 0.1 VXH VXF VX3 VXA 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + T 227 VXS Series Q : Air flow rate [L/min (ANR)] C : Sonic conductance [dm3/(sbar)], dm3 (Cubic decimeter) of SI = L (liter). b : Critical pressure ratio [] P1 : Upstream pressure [MPa

Booster Regulator/Air Tank

Model VBAT05A-SV-Q VBAT10A-SV-Q VBAT20A-RV-Q VBAT38A-RV-Q Accessory kit Safety valve Drain valve VBAT5A-Y-2 VBAT-S (Set pressure: 2 MPa) VBAT-V1 VBAT10A-Y-2 VBAT20A-Y-2 VBAT-R (Set pressure: 1 MPa) The Accessory Kit is a Set of Nos. q to t. VBAT20A-Y-2 VBAT10A-Y-2 Model Description No.

Modular Type Air Filter Series AF

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Bracket mounting size Accessory specification With auto drain Standard specification Port size Model B 85 115 170 204 208 284 297 P 28 57 73 73 D 25 40 53 70 70 90 95 C 7 10 14

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

ZZQ1 07 B C S ZQ1053M-K1Y5L-EAG (-Q) 4 pcs. (Stations 1 to 4) ZQ1103M-K1Y5L-EAG (-Q) 4 pcs. (Stations 5 to 8) Manifold Note) By viewing the front side of vacuum port (V), stations are counted starting from station 1 on the left side.

Guide Cylinder Series MGG

D-C7 D-C80 D-H7 D-H7W D-H7NF D-H7BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-H7C D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-C7 D-C80 D-C73C D-C80C D-A9 D-M9 D-M9W D-M9 D-M9W D-B5 D-B64 D-B59W D-C73C D-C80C D-A9 Bore size (mm) Bore size (mm) A B A B A B A B A B 16 (24) A B Hs Hs Hs Hs B 20 (28) Hs A A B 24 (32) 21.5 (29.5) 20.5 (28.5) 15.5 (22.5) 17.5 (25.5) 19.5

&snac

R e m o v e a n Y b t o c k o n b e n d o n t n e p u r q i n s a l r P i P i n s ' b . P l p i n s f o r p u r g i n g a i r i s r e d u c e o r t o n q e r t h a n s P e c i f i e d l e n q t n ' r e f e r t o P . 2 , 7 f o r c o r r e c t i o n ' c .

Vacuum Pad: Ball Joint Type

: 20 to 50 mm Stroke: 20 to 50 mm ZPT ZPR ZPT ZPR Dimensions: 10 mm Strokes Dimensions: 10 mm Strokes (mm) (mm) Q: 6 Q: 8 Q: 6 Q: 8 A B C D F H I J K P A B C D F H I J K P K P Y XT661 Model Model K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 1 18 136.5 13 1 40 5 1 2.5 20 22 40 43 13 15.5 36 48.5 50 1 15 13 1 33.5 13 1 37 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 19.5 40 1 19 137.5 141 6

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

One-touch Fittings Series KQ2

O e b u t ) m m ( e l b a c i l p p A e z i s g n i t t i f d . o N t r a P D L1 L2 P Q A M n o l y N e n a h t e r U 2 . 3 2 . 3 9 9 3 2 U 2 Q K 6 . 9 0 5 5 . 7 1 6 . 9 9 5 3 5 . 5 1 4 . 3 9 . 2 6 4 4 9 9 4 0 U 2 Q K 4 . 0 1 5 . 1 5 8 1 4 . 0 1 7 . 9 5 . 5 3 6 1 2 . 4 2 . 4 2 1 6 6 9 9 6 0 U 2 Q K 8 . 2 1 5 . 5 5 0 2 8 . 2 1 7 . 1 1 5 . 8 3 7 1 4 . 3 1 4 . 3 1 9 1 8 8 9 9 8 0 U 2 Q K 2

MG

Slide Bearing Felt Holder Ball bushing Spacer Aluminum alloy Replacement Parts: Seal Kit Bore size (mm) Contents Kit no. 20 25 32 40 50 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Set of nos. above @1, @2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

7.5

0 y t r q e u q !2 i !1 (A) 4 (B) 2 (A) 4 (B) 2 4(A) SOL.a SOL.b SOL.a SOL.b 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 2(B) o 5(EA)/3(EB) 1(P) SJ2B60 [N.O. valve x 2] SJ2B60 [N.O. valve x 2] SJ2B60K with back pressure check valve !0 y t r w e u w !2 i !

Metal Seal/Rubber Seal Series VQ Body Ported

SOL. location A B A B A B A B () A B () () 0 1 2 3 4 5 6 Double Double Single SI unit A side B side 3 position A B A B B A B A B A VQC Double Double Single SI unit A side B side 3 position Stations 1 2 3 4 5 SQ The places of asterisk are not used. 3 position uses two stations for wiring.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 58.2 5.5 35 18 28.8 70.7 B COM A B COM A B COM A B COM A B COM A DIN rail holding screw Manual override DIN

KJ

w No. q w e r t y u i o !

CE

2 w @5 q y !3 @3 r t @5 e RE A B REC CX CY MQQ M RHC !0 @1 @1 @4 @6 !4 @6 !4 u @4 !5 @0 !8 !9 i MK(2) RS Q G RS H A Component Parts RZQ Description Material Note Note No. No. Description Material MI W S Rare earth Magnet Aluminum alloy Cylinder tube Hard anodized q !

CE

2 w @5 q y !3 @3 r t @5 e RE A B REC CX CY MQQ M RHC !0 @1 @1 @4 @6 !4 @6 !4 u @4 !5 @0 !8 !9 i MK(2) RS Q G RS H A Component Parts RZQ Description Material Note Note No. No. Description Material MI W S Rare earth Magnet Aluminum alloy Cylinder tube Hard anodized q !

CE

phase J B C D A A COM COM COM B 12 VDC GND F.G.

Modular F.R.L. Unit

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.C.: Gray N.O.: Black B B O S O S M5 x 0.8 Width across flats 17 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 Standard specification Bracket mounting size Accessory specification With pressure gauge With auto drain Model Port size B C D A K J H G F E Q T N P K L M B AC10B AC20B AC25B AC30B