VCA

D U 25 Approx. 44 R C C R G1/2 E E G1/2 B B 2-P Port size A A D 2-P Port size (S) Port size G1/2 Compatible heavy duty cord Cable O.D. 6.8 to 10 L L K 2-M Thread depth 6 K 2-M Thread depth 6 (mm) Electrical entry P Port size B C Model A D E F K L M Grommet: G Conduit: C DIN connector: D Conduit terminal: T U 81 91.5 101 103.5 Q 98 101 104 104 R 36 44 53 55.5 S 68 71 74 74 Q 46 50 52 52 R

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

H T E (Note)L d W D T Max.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

For details, please contact SMC. 3-11-17 18 Manifold Specifications Standard Specifications ISO Size 1 ISO Size 2 ISO Size 1 Maniflod block size VSR/S8-6 VSR/S8-8 VSR/S8-6 Applicable solenoid valve 1 to 10 Number of stations 1/4, 3/8, 1/2, 3/4, 1 A, B port Port size 1/4, 3/8, 1/2, 3/4, 1 P , EA, PB port VV82-P-03/04/06 VV81-P-02/03/04 Individual SUP spacer VV82-R-03/04/06 VV81-R-02/03/04

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Control type 04 06 4 6 Port size 0 1 Meter-out Meter-in M3 M5 01 02 M3 x 0.5 M5 x 0.8 R 1/8 R 1/4 With One-touch fitting Fixed orifice Applicable model AS121F-M3-04 AS121F-M5-04 AS121F-M5-06 AS221F-01-04 AS221F-01-06 AS221F-02-06 Symbol Fixed orifice 1 2 3 4 5 6 7 8 9 10 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 The graph below shows the relationship between orifices for each cylinder bore

Clean Room Rodless Cylinder Series CYP ø15, ø32

MY CY Proper Auto Switch Mounting Position MG A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 24.5 93.5 -X CYP32 33 122 20Data Mounting of Auto Switch When mounting auto switches, they should be inserted into the cylinder's switch groove from the direction shown in the drawing on the right.

HRX-OM-R026

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRSH Series 3.3Installation 3-25 HRX-OM-R026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

MY CY Proper Auto Switch Mounting Position MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 93.5 24.5 -X CYP32 122 33 20Data

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Construction w e r !2 !4 L-Bracket !5 !5 w e r !2 !4 q !3 !3 !6 !6 t t !1 Component Parts !1 No. Description Material 1 Bracket Steel strip DIN Rail Mounting Bracket q w e q o !0 i y u q o !0 i y Component Parts No.

AN

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

CYP

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

Modular Type Air Filter Series AF

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

3

D-DN

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

Port size ASV Model M3 x 0.5 ASV120F-M3 0.3 0.3 AK M5 x 0.8 ASV220F-M5 1.3 1.3 R 1/8 ASV310F-01 8 7 ASS R 1/4 ASV310F-02 8 7 R 1/8 ASV410F-01 14 13.5 ASR R 1/4 ASV410F-02 14 13.5 R 3/8 ASV410F-03 14 13.5 ASF R 1/4 ASV510F-02 27 23 R 3/8 ASV510F-03 29 27 R 1/2 ASV510F-04 29 27 10-32 UNF ASV220F-U10/32 1.3 1.3 NPT 1/8 ASV310F-N01 8 7 NPT 1/4 ASV310F-N02 8 7 NPT 1/8 ASV410F-N01 14 13.5 NPT 1

SYJ300/500/700

N.O. 1 (P) 3 (R) 1 (P) 3 (R) e r t q e r t q V100 (A) (A) SY 2 2 SYJ u u VK VZ 3 (R) 1 (P) 3 (R) 1 (P) w w VT VP y y VG Component Parts Replacement Parts VP Note Zinc die-casted Part no.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

D-G

SV

B (S, R, RS) (-D) Stations When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

45

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

Guide Cylinder/Compact Type Series MGC

-020 BMA2-025 BMA2-032 BMA2-040 9 8 10 10 9 8 10 10 14 13 13 14 D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G5BAL D-G59F D-G5NTL D-G5NBL 9 8 10 10 4.5 4 4 5 BA-01 BA-02 BA-32 BA-04 D-H7C 9 7 8.5 10 D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL 4.5 4 4 5 D-B7/B80 D-B73C/B80C D-G79/K79 D-K79C D-G59F D-G5NBL BM1-01 BM1-02 BM1-32 BM1-04 5.5 5 5 6 40 40 35 45 Since this is a guideline including hysteresis, not