Manifold Specifications

lead wire VZS350-FZ 18 14 , (Example) Plug-in type (At 6 stations) (Manifold base) VV5ZS3-51FD-061-011 (2 position single) VZS3150-5FZ3 (2 position double) VZS3250-5FZ2 (Blanking plate) VVZS3000-10A-11 Non plug-in type (At 6 stations) (Manifold base) VV5ZS3-51-061-011 (2 position single) VZS3150-5G5 (3 position exhaust center) VZS3450-5G1 (Individual EXH spacer) VVZS3000-R-02-21 G L M KZ

Fieldbus system Ethernet POWERLINK compatible SI unit

BS Displays the Communication status. BE Displays the Communication error L/A1 Displays the communication status of the BUS IN side. L/A2 Displays the communication status of the BUS OUT side. ST(M)-LED LED display Content OFF The power supply for control and input is OFF. Green ON Normal operation. Diagnostic error of I/O unit is detected.

XSA Series

Exterior dimensions Grommet: G Face seal fitting / compression fitting Terminal part Flat terminal connector 250 Series Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Fast on: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5 52.5 99.5 47.5 68.5 -2V 50 1/4 XSA2-2S 63 31.5 73.5 63 32.5

Secondary Batteries

Nil S n 90 91 Material restriction With lub-retainer Port thread type Auto switch Nil Without auto switch (Built-in magnet) 16 M thread Rc NPT G Nii *For the applicable auto switch models, refer to the table below. 20, 25 TN TF Adjuster option Symmetric type Nil AS AT A BS Without adjuster Adjuster on extension end Adjuster on retraction end Adjuster on both ends Absorber on extension end

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

NCX2 seies

B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix | -2 pcs. ] s-t nc' .Auto

Air Pilot Operated

Op onal pitot connction In junctlon box and laroe lapped junction box cover allow looic control tubes to bs run Into the,unction box through electricat conduiir alJ hose usd as conduit, lhus avoidlng exposd control tubes. Junclion box i9 splash-proof and o -tight.

OMS0020

(a) Alphabet (upper/lower case) (b) Special characters (BS, space, TAB, comma, full stop, hyphen) (c) Line-break code (CR+LF) (3) ID When communication is established between the Card Motor controller and upper level device such as a PLC, a request will be received and a response will be sent only when the pre-set Card Motor controller ID matches with the controller ID in the requested message

OMU0023

(a) Alphanumeric characters (capital / small letters) (b) Special characters (BS, space, TAB, comma, full stop, hyphen) (c) Line-break code (CR + LF) (3) ID When communication is established between the Card Motor controller and upper level device such as a PLC, a request will be received and a response will be sent only when the pre-set Card Motor controller ID matches with the controller

Plate Cylinder with Lock Series MLU

+ Stroke BA 2-BT (mm) Stroke range Model BY C D GW GY H H1 B AL BA BB BP BS BT ET GA GA1 GB GC GC1 EY A B1 22 26 30 35 19.5 23.5 27 32 24 28 32 39 8 6.5 9 12 9 6.5 8 10 17 19 22 27 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8

Dedicated Controller Series LC1 Uniaxial Type

Interactive input display Programming with the same language as PC software ACTUATOR & CONSTRUCTION SYSTEM L c /BS HOLD STOP CONTROLLER POWER ALARM L R UP ENT DOWN /ESC MODE Able to execute operations such as programming, test runs and parameter changes, which up until now have been performed from a PC.

Air Pilot Operated Series NVSA

Op onal pitot connction In junctlon box and laroe lapped junction box cover allow looic control tubes to bs run Into the,unction box through electricat conduiir alJ hose usd as conduit, lhus avoidlng exposd control tubes. Junclion box i9 splash-proof and o -tight.

Air Cylinder NCX2 Series Slide Unit

B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix | -2 pcs. ] s-t nc' .Auto

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

mlu

D)LUB25,32 (Extension locking) K H2 P ZZ1 + Stroke GB GA Unlocks when pressurized BP unlocking port Front cylinder port GC D GW GY NH (manual unlocking unit) Dust cover P Rear cylinder port NS + Stroke NG NF NJ NJ NI Width across flats KA MM Width across flats B1 EY EY NY C H1 AL 4-ND through 4-ET B A NB NA K 2 x 4-NC counter bore Prepared hole diameter NE H S + Stroke ZZ + Stroke BY BB BS

1

) 2 x 5.5 Without spacer With spacer 2 x M5 thread depth M 15 15 Spacer Grommet: GS Flat terminal: F Conduit: C 280 G F F G 11 300 G F Terminal part Flat terminal connector 11 23 9 H C 15 6.5 H C H C G1/2 Terminal: T DIN terminal: D F G Applicable cable O.D.: 6 to 12 F G Width across flats 22 G1/2 32 (44) H 31.5 25 C H C G1/2 J J Dimensions [mm] Model A B Bs C D E F L M P [inch] Grommet:

MLU

+ Stroke BA 2-BT (mm) Stroke range Model A BY D GW GY H H1 B1 C B AL BA BB BP BS BT ET GA GA1 GB GC GC1 EY 22 26 30 35 19.5 23.5 27 32 24 28 32 39 8 6.5 9 12 9 6.5 8 10 17 19 22 27 MLUB25 MLUB32 MLUB40 MLUB50 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Pressure relief, 3 port valve, Accessory for AC series, Body sizes: 1/8

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Pressure relief, 3 port valve, Accessory for AC series, Body sizes: 1/8

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Pressure relief, 3 port valve, Accessory for AC series, Body sizes: 1/8