SZ3000 SD RD 24 V OV VCAM FG CAM Vt BS+ BDH BDL BSFG 24 V 0 V 24 V 0 V +24V 24G DA DB DG FG Description Description Description LED LED LED PWR. Light ON with transmission power input, light Off without it Green light ON with circuit power input PWR.
SD RD 24V OV VCAM FG CAM Vt BS+ BDH BDL BSFG 24V 0V 24V 0V +24V 24G DA DB DG FG LED name LED name LED name PWR Content Content Content Green light turns on when line power is input Turns on during supply of communication power, turns off when there is no input Turns on during supply of communication power, turns off when there is no input PWR PWR Light off: When unit is off-line or power
SMU50, #1 (#1+#11) MUB63 SMU63, #1 (#1+#11) (mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8Depth11 M6 X 1Depth11 AL 19.5 23.5 27 32 32 BS
35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q Note Hard anodized No. !
SD RD 24 V OV VCAM FG CAM Vt BS+ BDH BDL BSFG 24 V 0 V 24 V 0 V +24V 24G DA DB DG FG Description Description Description LED LED LED PWR. Light ON with transmission power input, light Off without it Green light ON with circuit power input PWR.
Option Combinations Functional option Nil F R P FR FP Adjuster option Adjuster option Nil Without adjuster Extension end adjuster Retraction end adjuster Double end adjuster Extension end absorber Retraction end absorber Double absorber Extension end metal stopper Retraction end metal stopper Double metal stopper Nil (3) (3) (3) AS AT A BS BT B CS CT C ASBT ASCT BSAT BSCT CSAT CSBT AS AT
+ BDL BS24V 0V BDH BS+ BDL BS24V 0V 24V Master unit SI unit SI unit DG DB DA DG DB DA DG DB DA Master Connector with terminating resistance VSLD FG FG FG BDH CANL BDL FG CANH Class 3 ground Class 3 ground Class 3 ground Crimped connectors for junction Twisted pair with shielding V+ Terminating resistor 30 Cassette Type Manifold Series SZ3000 SI unit part numbers Symbol Specifications Part
Pedestal KZZ KL2 KY KS 95 80 15 50 30 KQ 35 45 KC 50 5 25 KX KL1 57 34 16 15 KZ KZZ KL1 KL2 KX KZ KY KS KQ KC Type Applicable cylinder Bore size 50 63 40 CKA40-40-209A CLK1A40-75Y, CLK1A50-75Y, CLK1A63-75Y 402.5 406 398 167 75 132 222 35 69 59 0 70 CKA40-40-210A CLK1A40-100Y, CLKA50-100Y, CLK1A63-100Y 437.5 441 433 177 75 142 232 45 83 58 0 90 CKA40-40-211A CLK1A40-150Y, CLK1A50-150Y, CLK1A63
Pedestal KZZ KL2 KY KS Pedestal 15 80 K 35 45 50 30 95 KL1 5 16 50 KC 15 KX 25 34 KZ 57 Material: Rolled steel Unit: mm K 40 50 KZZ 63 Option symbol Applicable clamp cylinder KC KL1 KL2 KS KX KY KZ Part no.
Pedestal KZZ KL2 KS KY 80 15 KQ 35 45 50 30 95 KL1 5 KX 15 25 50 KC KZ 57 16 34 KZZ KL1 KL2 KX KZ KY KS KQ KC Type Applicable cylinder Bore size 50 63 40 CKA-K075 CLK2lA40-75Y, CLK2lA50-75Y, CLK2lA63-75Y 69 59' 400.5 404 396 (406) 0 167 75 132 222 35 70 CKA-K100 CLK2lA40-100Y, CLK2lA50-100Y, CLK2lA63-100Y 83 58' 435.5 439 431 (441) 0 177 75 142 232 45 90 CKA-K150 CLK2lA40-150Y, CLK2lA50-150Y
Pedestal KZZ KL2 KY KS 95 80 15 50 30 KQ 35 45 KC 50 5 25 KX KL1 57 34 16 15 KZ KZZ KL1 KL2 KX KZ KY KS KQ KC Type Applicable cylinder Bore size 50 63 40 CKA40-40-209A CLK1A40-75Y, CLK1A50-75Y, CLK1A63-75Y 402.5 406 398 167 75 132 222 35 69 59 0 70 CKA40-40-210A CLK1A40-100Y, CLKA50-100Y, CLK1A63-100Y 437.5 441 433 177 75 142 232 45 83 58 0 90 CKA40-40-211A CLK1A40-150Y, CLK1A50-150Y, CLK1A63
CK1 CK1 45 CLK2 Clevis pin 6 60 9 CLKG 12 60 48 CKQ CLKQ Pedestal CK CLK KZZ KL2 KY KS CKQ Pedestal 15 80 K 35 45 50 30 95 KL1 16 5 50 KC 15 KX 25 34 KZ 57 Material: Rolled steel Unit: mm KZZ CKG50 CKP50 CKG63 CKP63 Option symbol Applicable clamp cylinder K CKG40 CKP40 KL1 KL2 KS KX KY KZ KC Part no.
Applicable solenoid valve Base model Wiring Plug-in type VV5ZS2-51F VV5ZS2-51G 2 to 16 stations With D-sub connector With attachment plug lead wire VZS250-FZ (Example) Plug-in type (At 6 stations) (Manifold base) VV5ZS2-51FD-061-011 (2 position single) VZS2150-5FZ3 (2 position double) VZS2250-5FZ 2 (Blanking plate) VVZS2000-10A-1 1 1 8 G L M KZ D With attachment plug lead wire: 15 stations
lead wire VZS350-FZ 18 14 , (Example) Plug-in type (At 6 stations) (Manifold base) VV5ZS3-51FD-061-011 (2 position single) VZS3150-5FZ3 (2 position double) VZS3250-5FZ2 (Blanking plate) VVZS3000-10A-11 Non plug-in type (At 6 stations) (Manifold base) VV5ZS3-51-061-011 (2 position single) VZS3150-5G5 (3 position exhaust center) VZS3450-5G1 (Individual EXH spacer) VVZS3000-R-02-21 G L M KZ
BS Displays the Communication status. BE Displays the Communication error L/A1 Displays the communication status of the BUS IN side. L/A2 Displays the communication status of the BUS OUT side. ST(M)-LED LED display Content OFF The power supply for control and input is OFF. Green ON Normal operation. Diagnostic error of I/O unit is detected.
Exterior dimensions Grommet: G Face seal fitting / compression fitting Terminal part Flat terminal connector 250 Series Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Fast on: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5 52.5 99.5 47.5 68.5 -2V 50 1/4 XSA2-2S 63 31.5 73.5 63 32.5
Nil S n 90 91 Material restriction With lub-retainer Port thread type Auto switch Nil Without auto switch (Built-in magnet) 16 M thread Rc NPT G Nii *For the applicable auto switch models, refer to the table below. 20, 25 TN TF Adjuster option Symmetric type Nil AS AT A BS Without adjuster Adjuster on extension end Adjuster on retraction end Adjuster on both ends Absorber on extension end
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
B -With shock absorbers BC -With Cap type shock absorbers BS With one shock absorber BCS -With one Cap type shock absorber Type N-Non-lube type H Air-hyd ro type (except sl0) Special order only clffi3xr -tI I ytinaerl Switch/Housing r Switch/End plate With Auto Switch Capability ffiK] "*t* --T"* Nc lw t f l l n ' l x2 | *o"o twltch sufiix
Op onal pitot connction In junctlon box and laroe lapped junction box cover allow looic control tubes to bs run Into the,unction box through electricat conduiir alJ hose usd as conduit, lhus avoidlng exposd control tubes. Junclion box i9 splash-proof and o -tight.