[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Hexagon socket head screw DXT083-19-1 2 pcs.

Free Mount Cylinder for Vacuum Series ZCUK

N S U F GN GS NBR Silicon rubber Urethane rubber Fluororubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Material N S U F NBR Silicon rubber Urethane rubber Fluororubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Pad type Table (1) Pad Dia./Pad Type Pad type Application: Refer to Table (1). Dia.

CLA

DIHerMI 15 90 ,00 11 0 With 2 surface D-85 sWitches Same 75 90 '00 surface 110 D-B6 DiHerem jS+5~ go+l ~ D-GS l DO+'~r" 110... 10~ D-KS With n surface .1'1::1 .2,3,4 ... nz4.8.12. n= ...,e.l :t: n=o4,a .I 2..18. swifches Same 75..SO(~) 90+50/11-2) HlOo..so;.21 110+50 (n-2) I surface n",2,3,4, .. ~, "' .S.8 1"O:2.4,6.L n--2,4 ,6.8 ...

Coolant Valve

. 20 (14) 3 25 (16) 4 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F Nil: Non-locking push type 40A 1 1 2 Valve size 2 to 9 40 (28) 6 1 B 1 2 Flange 40F 2 50A 50 (33) 7 50F 2B Flange Semi-standard 2 B 1 2 Flange 65F 65 (45) 8 Electrical entry/With light/surge voltage suppressor 3B Valve size 1 Valve size 2 to 9 80F 80 (56) 9 Symbol Electrical entry Flange Values in parentheses are N.C. at 1 MPa.

5-Port Solenoid Valve

SY5000: SY5000-221-6A (2 pcs.) SY7000: SY7000-221-6A (3 pcs.)

•

bAs B6.type B (n ~ 2.4 _ l) 0.5 50.5 :"'Hs 43.5 15 +50( 0" ) 75 +55(n2) 15 75 ~ ' B6lype I><>S'KSlype 3.5 3.5 A 2 ( n ~ 2 . 4.~--' ) 10 26.5 25 26.5 D-G5 K5 type G 35+30(n-2) 35 100 100+ loo(n2) i D-A31ype 1><>3 ' K3 type 50.5 ~Hs 38 43.5 1.5 1.5 A 0 DA3 type 24.5 24.5 23 B 35+3O (n2) 5O+5O(n 2) 35 55 D-A4 type D-G3K3 type !

ZCUK

Material NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) N S U F GN GS Material N S U F GN NBR Silicon rubber Urethane rubber Fluoro rubber Conductive NBR (2 to 16 only) Conductive silicon rubber (2 to 16 only) Pad type Flat Flat with ribs Deep Bellows (Except -X11) U C D B Table (1) Pad Dia./Pad Type Dia.

SY

40 Port size Series Port size Without sub-plate Symbol Applicable series Nil 3 SY3000 5 SY5000 7 SY7000 9 SY9000 Rc 1/8 With sub-plate 01 SY3000 02 SY5000 SY7000 Rc 1/4 With sub-plate Type of actuation Rc 3/8 With sub-plate SY7000 SY9000 03 2 position single Rc 1/2 With sub-plate 04 SY9000 1 Manual override 2 position double Nil: Non-locking push type D: Push-turn locking slotted type 2 3

V

02 PT 1/4 SY7000 C10 One Touch Fitting 10 SY7000 Imperial (Inch) M5 10-32Nom SY3000 N3 One Touch Fitting 5/32SY3000 N7 One Touch Fitting 1/4 SY3000 N7T One Touch Fitting 1/4 SY5000 01T NPTF 1/8 SY5000 N9T One Touch Fitting 5/16SY5000, SY7000 02T NPTF 1/4 SY7000 N11T..One Touch Fitting 3/8 SY7000 S E R I E S 3 SY3000 5 SY5000 7 SY7000 C O N F I G U R AT I O N 1 2 Position Single 2 2 Position

Booster Regulator VBA Series

: Twice Z Note) Note) Thread type: NPT, NPTF Under the new measurement law, the pressure unit of psi on the pressure gauges cannot be used in Japan. 11A Note) Pressure increase ratio: 2 to 4 times 1/4", Knob-operated type Option Option Symbol Nil G N S GN GS LN LS GLN GLS Note) Set the pressure increase ratio to 2 or more.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

fitting Applicable series Type of actuation SY3000 2 position single (A) 4 (B) 2 1 SY5000 5 (EA) 3 (EB) 1 (P) 2 position double (A) 4 (B) 2 2 SY7000 5 (EA) 3 (EB) 1 (P) 3 position closed center (A) 4 (B) 2 3 Manual override 5 (EA) 3 (EB) 1 (P) 3 position exhaust center Nil: Non-locking push type E: Knob locking type D: Slotted locking type (A) 4 (B) 2 4 5 (EA) 3 (EB) 1 (P) 3 position pressure

Digital Pressure Sensor

GS 5 9 8 5 PS 36 3 22 22 ISA 3.2 ZSE1 ISE1 ZSE2 ISE2 1 M5 PT 40 ZSP ISl SET ALM. 20 kgf K P M b ZSM + _ PFl UNIT P.SET IFl 3.6-4

Fieldbus System

SI Unit Note) End plate Note) 2-position double SY3230-5U1-C6 (2 sets) EX600-SDN1A EX600-ED2 1 0 PE PE X X A B A B A B A B A B 3/5E 4 A 3/5E 3 2 4 A 4 A 4 A 4 A U side D side PWR OUT 0 1 5 4 1P 1P 2 3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT u P, E port size (One-touch fittings) 7 8 1 2 3 4 5 Valve stations Symbol SY3000 SY5000 SY7000 I/O Unit stations 1 2 Nil 8 10 12 SS5Y3-12S6Q42-05B 1

5 Port Solenoid Valve SY Series

R, U Type S, Z 35 or less 41 or less 2 position single 35 or less 35 or less 41 or less 2 position double 62 or less 62 or less 64 or less 3 position 2 Body Ported Flow Characteristics/Weight Series SY3000 Series SY7000 Port size Flow characteristics Weight (g) Port size Flow characteristics Weight (g) Valve model Type of actuation Valve model Type of actuation 14/2 (PA/B) 4/25/3 (A/BEA

, 200, 220VAC , Response time (0.5MPa) w/o indicator light andamp; surge voltage suppressor: 32ms or less , Ambient andamp; fluid temperature: 50 C, GASKET ASSY, VALVE, SY7000 SOL/VALVE, RUBBER SEAL, 21, SY7000 NO SIZE RATING

Type 20 and 23 body ported manifold gasket part number: SY□000-GS-1 (10 pcs./set: mounting screws and gasket)
Valve part numbers: SY3120, SY5120, SY7120, SY9120, etc.
Type 41, 42, and 43 base mounted manifold gasket part number.: SY□000-GS-2(-Q) (10 pcs./set: mounting screws and gasket)
Valve part numbers: SY3140, SY5140, SY7140, SY9140, etc.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

SX

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted 32 Series SX3000/5000/7000 Dimensions: Series SX3000 2 position

Valve Single Unit

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted Series SX3000/5000/7000 Dimensions: Series SX5000 2 position single

Valve Single Unit

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted Series SX3000/5000/7000 Dimensions: Series SX3000 2 position single