Base Mounted Metal Seal/Rubber Seal Series VQ

L dimension 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L dimension No.

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

5 Port Solenoid Valve, Series VQC

B 8B () (+) Station 8 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A 10B 10A COM 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B SOL. A 9A () (+) SOL. B 9B () (+) Station 9 SOL. A 10A () (+) Note) There is no polarity. This device can also be used as a negative common. SOL.

ZR

Output Specifications 25 (L) 1 output NPN open collector 30 V, 80 mA or less Analog output (1 to 5 V) ZSE4 ZSE4B 26 (L) 67 (L) 1 output PNP open collector 80 mA or less 26 (L) Analog output (1 to 5 V) ZSE4E 27 (L) 2 outputs NPN open collector 30 V, 80 mA or less 67 (L) 2 outputs PNP open collector 80 mA or less 13-3-16 16 Series ZR Large Size Vacuum Module: Ejector System ZX ZR ZM ZH ZU Courtesy

0.4

With lead wire Nil 30 50 0.6 3 5 Flow/Exhaust Characteristics of Ejector Unit (The flow characteristics are for the supply pressure of 0.5 MPa.)

0.4

Applicable fitting size Noise reduction (dB) Effective area (mm2) (Cv factor) Series Model A L D d D VQ2000 10 AN20-C10 36.5 57.5 30 16.5 30 Elbow fitting assembly VVQ2000-F-L(C4/C6/C8/N3/N7/N9) It is used for piping that extends upward or downward from the manifold.

VQ5000

Polarity SOL.A 1A ( ) ( + ) SOL.B 1B ( ) ( + ) 1 station 1A COM 2A 3A 4A 5A 6A 7A 8A 9A 10A 1B 2B 3B 4B 5B 6B 7B 8B 9B 10B 1B 1A 2B 2A 3B 3A 4B 4A 5B 5A 6B 6A 7B 7A 8B 8A 9B 9A SOL.A 2A ( ) ( + ) SOL.B 2B ( ) ( + ) 2 stations SOL.A 3A ( ) ( + ) SOL.B 3B ( ) ( + ) 3 stations SOL.A 4A ( ) ( + ) SOL.B 4B ( ) ( + ) 4 stations SOL.A 5A ( ) ( + ) 10A COM SOL.B 5B ( ) ( + ) 5 stations

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A

FMW-4300-2 .2 2 30 .1 .2 4A FMW-4300-5 .5 5 30 .2 .35 4A FMW-4300-15 .5 15 45 .4 .6 4A FMW-4300-30 .5 30 60 .6 1.0 4A FMW-4300-60 .5 60 120 1.5 2.5 4A FMW-4300-100 1 100 120 2.0 3.5 4A