Low Profile Guide Type

/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Nm Moment Nm Moment Nm 4 4 4 CX CY1F15 3 3 3 DCY1F10 2 2 2 -X CY1F15 CY1F15 20CY1F10 CY1F10 1 1 1 Data 0.5 0.5 0.5 500 100 300 50 500 100 300 50 500 100 300 50 Piston speed mm/s Piston speed mm/s Piston speed mm/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY1F25 CY1F25 CY1F25 CY1F25 10 10 10 10 CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass

CV/MVGQ

x 1.5 22.5 26 Polished round 20 100 Y-10C 4 x 30l MVGQ 30 + 0.3 + 0.1 37 40 83 M26 x 1.5 21 83 38 20 61 + 0.084 0 20 0.1 0.3 30 105 37 40 83 M26 x 1.5 24.5 28 Knuckle pin, cotter pin, and plain washer are shipped together.

CV/MVGQ

x 1.5 22.5 26 Polished round 20 100 Y-10C 4 x 30l MVGQ 30 + 0.3 + 0.1 37 40 83 M26 x 1.5 21 83 38 20 61 + 0.084 0 20 0.1 0.3 30 105 37 40 83 M26 x 1.5 24.5 28 Knuckle pin, cotter pin, and plain washer are shipped together.

45

pins flat cable) Connector block assembly (For 10 pins flat cable) Connector block assembly (For 2 to 8 stations (T, T1) terminal block) -1A: +COM -1NA: COM SX3000-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A

45

pins flat cable) Connector block assembly (For 10 pins flat cable) Connector block assembly (For 2 to 8 stations (T, T1) terminal block) -1A: +COM -1NA: COM SX3000-64-1A 1NA SX5000-64-1A 1NA t-1 SX3000-64-26 2A 2NA SX5000-64-26 2A 2NA t-2 Note) 24 VDC -2A: +COM. -2NA: COM. 2A 2NA SX3000-64-20 2A 2NA SX5000-64-20 t-3 2A 2NA SX3000-64-10 2A 2NA SX5000-64-10 t-4 t-5 SX5000-64-3A SX3000-64-3A

LEC-OM071xx

CPRM_SEL_ MON1 14 15 16 17 CPRM_SEL_ MON2 18 19 20 21 Reserved MONITOR1 22 23 24 25 MONITOR2 26 27 28 29 MONITOR3 30 31 8-71 8 MECHATROLINK-III Commands Related Parameters Parameter No.

Step Motor Controller

Refer to the dimensions on page 20 for the mounting dimensions. (35) (25) 5.5 1.25 L Dimensions No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 23 35.5 48 60.5 73 85.5 98 123 148 173 198 223 248 L dimension 110.5 135.5 160.5 185.5 210.5 235.5 260.5 40 No. 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 273 298 323 348 373 398 423 448 473 498 L dimension 285.5 310.5 335.5 360.5

Rotary Table: High Precision Type

Allowable load Size Allowable radial load(N) Allowable thrust load(N) Allowable moment (Nm) 1 20 15 0.3 3 40 30 0.7 7 50 60 0.9 20 60 80 2.9 Table rotation range Angle adjustment is possible as shown in the Fig. 2 below using adjustment bolts (A) and (B).

LEC-OM02904

(L) W E L d 11 30 11 11.8 (1) ACPWM 30cm 10{IglIgnIgaK(Ig2Igm)}[mA](11.1) K NV M NV-SP NV-SW NV-CP NV-CW NV-HW 1 Ig1 Iga Ig2 Igm Ign BV-C1 NFB 3 NV-L Igl (11.3) Ig2 (11.3) Ign (FR-BIF-(H) ()4.4mA) Iga(11.6) Igm (11.5) 120 120 100 100 80 80 60 60 40 40 [mA] [mA] [mA] [mA] 20 20 0 2 0 2 100 5.5 14 38 14 100 5.5 38 8 3.5 22 60 150 8 3.5 22 60 150 30 80 30 80 2] [mm 2] [mm [mm2] [mm2]

VZ3000

VV5Z3-21 Round head combination screw Round head combination screw M2.5 x 7 (With spring washer) Blanking plate (With spring washer) Individual SUP Spacer Assembly Gasket DXT192-40-2A Round head combination screw Gasket Applicable base VV5Z3-20 VV5Z3-21 Applicable base VV5Z3-20 VV5Z3-20P VV5Z3-21 M2.5 x 40.5 (With spring washer) DXT192-13-3A Round head combination screw Individual EXH Spacer

VCA

32 32 R 40 48 56 58.5 41 50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

(up to 24 solenoids possible) D side 20 20 20 stations 20 stations Connector entry direction PG: Flat cable connector (20 pins) PH: Flat cable connector (10 pins) 1: Perpendicular connector 2: Lateral connector Note Symbol 02 Note Symbol 02 Stations Stations 2 stations 2 stations Double wiring specification Double wiring specification ... ... ... ... 09 10 04 05 9 stations 4 stations 10 stations

Soft Start-up Valve

Caution Without light SY100-61-1 SY100-61-1-C With light Rated voltage Voltage symbol Part number Part number (For AV) (For AVL) DC24V 24V SY100-61-3-05 SY100-61-3-05-C DC12V 12V SY100-61-3-06 SY100-61-3-06-C AC100V 100V SY100-61-2-01 SY100-61-2-01-C AC200V 200V SY100-61-2-02 SY100-61-2-02-C AC110V 110V SY100-61-2-03 SY100-61-2-03-C AC220V 220V SY100-61-2-04 SY100-61-2-04-C

JXCx-OMT0062

When there are alarms, this is OFF. 0F ALARM 10 to CC-Link 1A system area Only at Single numerical data instructions (No used) (No used) Remote During the normal status, this terminal is OFF, during the abnormal status (The WDT time-out of CPU is generated) this is ON. 1B station READY 44 - 1C to CC-Link (No used) 1F system area 20 to 2F 30 to CC-Link system area 3A Only at Half numerical

VCA

32 32 VCA21 VCA31 41 50 60 68 18 24 30 35 64 76 86 91 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 17-2-13 8 Series VCA How to Order Manifold (VCA20) How to Order Manifold Assembly VV2C A 2 02 02 Enter the mounting valve and option part numbers under the manifold base part number.

HEC-OM-S008

30 31 30 33 42 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 34 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 41 34 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 39 34 4D HECR 5-6 MODBUS communication function 5.6 Function codes The table berow function codes to read or write register.

SZ3000

Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications (1) Double wiring specifications 10 02 11 02 10 stations 11 stations Mounting position Symbol D 2 stations 2 stations Specified layout (2) (Up to 21 solenoids possible) D side Specified layout (Up to 22 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable

-fl Seies

Closed cenler NVFR2300 NVFR2310 VB 0.7 1 8 0 30 or less 0.95 (0,43) V4 Exhausl center NVFR2400 NVFR24 t0 lb 0.7 180 30 or less 0.95 {0.43) th Pressure center NVFR2500 NVFF25t0 !

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Closed cenler NVFR2300 NVFR2310 VB 0.7 1 8 0 30 or less 0.95 (0,43) V4 Exhausl center NVFR2400 NVFR24 t0 lb 0.7 180 30 or less 0.95 {0.43) th Pressure center NVFR2500 NVFF25t0 !