Digital Flow Switches

g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.

C92

17 22 19,5 25 30 M10 X 1.25 M12 X 1.25 M16 X 1.5 M16 X 1.5 M20 X 1.5 M20 X 1.5 M27 X 2 M36 X 2 58 64,5 77 80,5 92 97 119 152 M6 M6 M8 M8 M10 M10 M12 M16 6 6 7 7 11 11 15 17 10 14 18 18 22 26 27 36 5 7 8 8 10 10 13 16 23 27 30 31 37 40 45 55 11 11 14 14 19 19 42 52 74 84 90 98 116 126 160 180 17 19 24 24 30 30 41 55 136 153,5 173 184,5 215 231 287 340 36 40,5 45 48,5 52 57 65 80 6 6 10 10

Metal Seal/Rubber Seal Series VQ Body Ported

Y 7 1 1 0 5 MO C6 VQ Series VQ1000 Cylinder port Connector kit 1 set Manifold base part no. 4 sets Valve part no. (Stations 1 to 4) 4 sets Valve part no.

High Purity Fluoropolymer

Model K J E L M H t W1 W2 LQ1P1A LQ1P2A LQ1P2B LQ1P2C LQ1P3A LQ1P3B LQ1P4A LQ1P4B LQ1P5A LQ1P5B LQ1P6A LQ1P6B 11.5 10 13 10.5 6 44 8 11 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" 1" 3/4" M 25 1 16.5 15 14 6 17 14.5 55.5 8 15 Class 6 23 20 17 7 24 20.5 69 8 21 28 24 21 7 28 24.5 78.5 8 26 39 29 26 9 43 36.5 100 13 39 49 36 10 39.5 55 48.5 133 20 51 15 High Purity Fluoropolymer Fittings

Compact Rotary Actuator Series CRQ2

Description Qty. 4 4 4 4 1 1 1 1 Seal Seal Seal Seal 11 11 11 11 1 1 1 1 Gasket Gasket Gasket Gasket Parts included in seal kit 12 12 12 12 1 1 1 1 Gasket Gasket Gasket Gasket 16 16 16 16 Wear ring Wear ring Wear ring Wear ring 4 4 4 4 17 17 17 17 Piston seal Piston seal Piston seal Piston seal 4 4 4 4 26 26 26 26 Seal washer Seal washer Seal washer Seal washer 2 2 2 2 A set includes all

HRX-OM-S004

HRX-OM-S004 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety Instructions for Use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

High Power Cylinder:

A 1-B 1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

68 58 67 73 21 26 32 23.5 28 34.5 46 55 66 59 71 82 34.5 40 46.5 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 Up to 1000 Up to 1000 Up to 1000 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 16 16 16 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 10 14 14 208 228 254 39 42 52 8-25-17 17 Series MGZ With Mounting Bracket Transaxial

JXCx-OMT0061CN

]() [] PLC RWw RWw bit ( )ON, 0 OFF 1 () 2 OFFONRWr0bit5: ALARM 3 OFF ON 4 5 *2 6 *1 ON 11 7 *2 0 8 *2 9 *2 A *2 RWw0,bit5F: 17.CC-Link B *2 C (P.77) D 1 *1 E 2 *1 F *1 0 OFF ON 1 17 () 8F 1:ABS() 2:INC() *1 RWw0,bit4F: 2 2 F0 L 11.1 (P.47) )RWw0,bit6:ON655.37 [mm](65537d =00010001h) RWw2=0001h (2 ) RWw3=0001h (2 ) (2 ) 3 F0 H *2 RWw0,bit4F: 70 L 11.1 (P.47) )RWw0

•

Deep type (mm) G I H 533 71.1 25 197 G I H 15187 17 1:!

CJ2

1 !

ZP

1 A14 M14 x 1 Type Symbol Size Pad diameter [mm] 10 to 16 20 to 32 40, 50 i Lock ring Lock ring unit A5 M5 x 0.8 1 A6 M6 x 1 1 1 1 A8 M8 x 1 1 1 Part no.

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 No. No.

LEC-OM02904

A 1 () () [] A 2 LECSSSeries/ / *3) 1 1.5 *3)1 1 A 3 1. 15P()-N() 2. L1L2L3 (MC) 3. () () A 4 4. (1) 0+55() 0+40() -20+65() -15+70() 90%RH() 80%RH() 90%RH() () 1000m LECS-S5 LECS-S7 LECS-S8 () 5.9m/s2 XY49m/s2 .

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

B 15 1 A A 5 B B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3[65.5] 15.3 32 17 7.5 (4.4) 111.5[115.9] 12.4 1 98.6[103] A A A A A A 16 R P R P 31.2 31.5 64.1[66.3] 36.4 B B B B B B 65.3 17 50.4 70.2 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5 1/8 (P, R port) (Station n) (Station 1) (Light/surge voltage suppressor) Applicable connector:

SQ1000/2000

COM COM 25 26 COM COM 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM 1 2 1 2 1 2 COM COM P kit Flat ribbon cable connector (for 26P) J kit Flat ribbon cable connector (20P) PC Wiring System compatible P kit Flat ribbon

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

0.16 [0.11] 0.11 82 (56) 92 (66) 3 position 0.42 [0.33] 0.16 [0.080] 36 53 41 63 37 55 2 position 5 port Body ported 0.9 M3 x 0.5 M3 x 0.5 3 position 56 66 58 36 53 41 63 37 55 Note 1) 4 port Base mounted 2 position M5 x 0.8 1/8 (For manifold 56 66 3 position 58 base only) Note 1) Dedicated for manifold base.

C95Series

lJlO 11 4 120 90 15 158 132 1 84 26 13.5 24 17 75 100 129 2S +

CQM

6.5 7.5 7 4 0.5 14.9 6 14 9.9 3.5 20 3.5 6.5 7.5 7 4 0.5 20 6 17 12 4.5 25.5 5.4 9 9 10 7 1 26 8 22 15.6 5 28 5.4 9 11 10 7 1 30 8 Note) For the following bore/stroke sizes, the through-hole is threaded.