Stability of suction position,

Rc1/8 Width across flats 19 M14 x 1 Rc1/8 Width across flats 19 M14 x 1 Rc1/8 Width across flats 19 Width across flats 19 Width across flats 19 Width across flats 19 5 5 5 5 5 5 15 25.6 25 50.6 14.5 25.1 25 50.1 14.5 25.1 25 50.1 M10 x 1 M10 x 1 M10 x 1 Seal washer 22 40 Seal washer 22 31 Seal washer 22 31 2.5 3 2 Width across flats 6 35 32 6 Width across flats 6 53 50 6 Width across flats

VM

(mm) Port size R 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) 1(P) M5 4 6 8 10 12 1(P) 1(P) M5 Applicable tubing O.D. (mm) Applicable tube O.D. (mm) Applicable tubing O.D.

LEC-OM02904

m i m 4 8 1 . 5 1 6 1 ( 1 8 . 5 5 ) m a x .

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

B port Rc(PT) , C6 A, B port side P port Rc(PT) 1 8 1 8 Rc(PT) 01 1 4 6 One-touch fitting C6 43 Type (5 Port/Base mounted) How to Order SS5YJ5-43-05 -C4 Stations 2 stations 02 R port Rc(PT) : : 1 8 20 stations 20 A, B port C4 P port Rc(PT) C4 4 One-touch fitting A, B port side 1 8 1.2-42 Series SYJ5000 Flat Cable Manifold Common SUP/Common EXH Note) For more than 8 stations, supply air to

CJ2

1 !2 !3 !4 !5 !6 !7 !8 !

ARM10/11

8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.

ARM10/11

8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.

Applicable Auto Switch Model

CDJ2 CDVJ CDLJ2 CDM2, CDBM2, CDVM3, CDVM5, CDLM2 CDG1, MGG CDLG1 RSDG MGC MLGC, RHC, REC 7 8 8 8 10 10 8 9 9 8 10 10 10 10 10 10 11 10 10 8 8 10 10 9 9 Note) Average value at normal temperature including hysteresis.

Modular Type Regulator Series AR

Modular Type Regulator Series AR Regulator Series AR Port size Model Accessory AR10 M5 x 0.8 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 1/4, 3/8, 1/2 AR40-06 Bracket 3/4 Square embedded type pressure gauge (except for AR10) AR50 3/4, 1 AR60 Pages 36 through 40 1 Round pressure gauge Regulator with back flow mechanism Series ARK AR20K 1/8, 1/4 Panel mount AR25K 1/4, 3/8 AR30K 1/4, 3/8

MHZ

3 Needle roller Replacement Parts Description MHZA2-6 Main parts @1@2@3@4 Seal kit MHZA6-PS Finger assembly Please contact SMC to replace finger assembly MHZA-A0603 MHZA2-6D wio!1!3@1@2@3 Piston assembly MHZA2-6S wo!1!3!8!

MHZ

3 Needle roller Replacement Parts Description MHZA2-6 Main parts @1@2@3@4 Seal kit MHZA6-PS Finger assembly Please contact SMC to replace finger assembly MHZA-A0603 MHZA2-6D wio!1!3@1@2@3 Piston assembly MHZA2-6S wo!1!3!8!

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

REC

5.5 6.8 28 186 40 55 20 34.5 32 M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 40 M14 x 1.5 Up to 1000 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 NN P S X Y Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 146 20 8 21 215 25 M26 x 1.5 Up to 700 1/8 146 20 8 25 219 32 M26 x 1.5 Up to 1000 1/8 159 20 8 25 232 40

MXW Series Long Stroke Slide Table

141 166 8 2 612 151 MXW Series Long Stroke Slide Table Dimensions MXW 25 Stroke: 100, 125, 150 Operating port 2-Rc (PT) 1/8 (mm) J 20 Width across hexagon socket hole 5 Scale:15% 11 Width across flats 17 8H9 +0.036depth 9 0 Operating port Rc (PT) 1/8 9 8-M6 x 1 thread depth 18.5 (Helisert) 8H9 +0.036depth 9 0 Operation direction A Taper thread plug with hexagonal hole 98.6 126 66 55 8 50

rep-modular-e

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 32 BQ-2 BMU1-025 80 BQ-2 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

Auto Switch Guide

+) Terminal no. 1 20Hexagon socket head cap bolt Data G 1/2 (Applicable cable O.D. 6.8 to 9.6) OUT () Terminal no. 2 Indicator light Most sensitive position Dimensions Applicable bore size (mm) 40 50 63 80 100 Z H H HW C T T Auto switch model D-G39C-4, D-K39C-4 D-G39C-5, D-K39C-5 D-G39C-6, D-K39C-6 D-G39C-8, D-K39C-8 D-G39C-10, D-K39C-10 6.5 6.5 7.5 9.5 9.5 49.5 50.5 52 53.5 56.5 57 58 60.5

1

XSA1 XSA1R-8-1 XSA2 XSA2R-8-1 XSA3 *1 Not CE-compliant For the special option below, refer to page 7.