LEC-OM02904 A 1 () () [] A 2 LECSSSeries/ / *3) 1 1.5 *3)1 1 A 3 1. 15P()-N() 2. L1L2L3 (MC) 3. () () A 4 4. (1) 0+55() 0+40() -20+65() -15+70() 90%RH() 80%RH() 90%RH() () 1000m LECS-S5 LECS-S7 LECS-S8 () 5.9m/s2 XY49m/s2 .
700 22 19.5 47 17 32 45.5 10 13 10 45 6 8 37.5 5.5 6.8 28 186 40 55 20 34.5 32 M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 40 M14 x 1.5 Up to 1000 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 NN P S X Y Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 146 20 8 21 215 25 M26 x 1.5 Up to 700 1/8 146 20 8 25 219
Width across flats 55 M36 x 1.5 21 47 50 64 200 30 30 2-Rc 1/2 (port size) 2 x 4-31.5 depth of counter bore 26 40 62 62 4-19 through 182 226 3 5.5 Flat washer 4 pcs. Note 1) 36 2 x 4-M22 x 2.5 thread depth 38 109 + Stroke 17 M24 x 3 effective thread depth 33 126 + Stroke 182 226 Width across flats 55 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less.
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 32 BQ-2 BMU1-025 80 BQ-2 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
Model K J E L M H t W1 W2 LQ1P1A LQ1P2A LQ1P2B LQ1P2C LQ1P3A LQ1P3B LQ1P4A LQ1P4B LQ1P5A LQ1P5B LQ1P6A LQ1P6B 11.5 10 13 10.5 6 44 8 11 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" 1" 3/4" M 25 1 16.5 15 14 6 17 14.5 55.5 8 15 Class 6 23 20 17 7 24 20.5 69 8 21 28 24 21 7 28 24.5 78.5 8 26 39 29 26 9 43 36.5 100 13 39 49 36 10 39.5 55 48.5 133 20 51 15 High Purity Fluoropolymer Fittings
(1.25 10-3) = 16000 [pulses/s] Acceleration time: 20 80 = 250 [ms] Deceleration time: 20 80 = 250 [ms] Flow chart (Reference) Controller (1) Turn "TL" signal OFF.
1 o !1 i Component Parts r r No.
L1 L2 H M E A 11.5 LQ1L1A-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 18 15 1/8" 10 11.5 LQ1L4C-M LQ1L4B-M LQ1L4A-M LQ1L3D-M LQ1L3C-M LQ1L3B-M LQ1L3A-M LQ1L2F-M LQ1L2E-M LQ1L2D-M LQ1L2C-M LQ1L2B-M LQ1L2A-M 1/8" 16.5 27 20.5 14 15 14.5 1/4" 1/4" 23 20 35 17 26.5 20 3/8" 3/8" 28 21 24 45 33 25 1/2" LQ1L4D-M LQ1L5D-M LQ1L5C-M
Table MXW Series Dimensions MXW 20 Stoke: 150, 175, 200, 225, 250 (mm) Operating port 2-Rc (PT) 1/8 Width across hexagon socket hole 4 J 20 Scale: 20% 10 Width across flats 13 8-M5 x 0.8 thread depth 13 (Helisert) 6H9 +0.03 depth 5.5 6H9 +0.03 depth 5.5 0 0 7 72 98 48 Y Y 25 160 40 40 40 L 11 24 24 K A 60 50 32.5 Z A N-M6 x 1 thread depth 12 (N-1) x H G Bottom through hole 5.1 GG HH H 7
0.8 8 OUT1 80 mA 65 180 45 104 79 65 Rc11/2, NPT11/2, G11/2 Rc2, NPT2, G2 46 M6 x 1 9 Load Black 0 V or 75 220 55 114 89 75 56 M6 x 1 9 50 msec 50 msec PF2A7H-(-M) 68 69 Analog output 1 to 5 VDC 4 to 20 mADC 20 5 Analog output [V] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate
-2No.PS-OMV0003CN-G / *3) 1 1.5 *3)1 1 [] -3No.PS-OMV0003CN-G () () () () -4No.PS-OMV0003CN-G () * UL UL1310 2 UL1585 2 30 Vrms(42.4 V ) (2 ) UL (1 20 ) -5No.PS-OMV0003CN-G * FG (35 N () ,() *() 6 33 () 20 m DC(-)() * ( ) -6No.PS-OMV0003CN-G () CE 0~50(5 ) (FKMHNBR) * 1015 10 1% 1959 LCD * -7No.PS-OMV0003CN-G ISE70 02 L2 M 3 Y K T ISE70 0~1MPa ISE71 0~1.6MPa 02 Rc1/4 N02
A OUT IN A OUT IN 1 2 B 3 B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 5-8-22 5 Series VHS Specific Product Precautions Be sure to read before handling.
A 65 82 98 B2 53 64 76 B3 78 88 108 C1 14 20 22 C2 39 44 54 F 96 111 131 E1 1 1 1 E2 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 63 73 93.5 61 72 88 30.5 36 44 40 46 55 73 84 104 14 14 19 6 6 8 Note) Floating brackets consist of a set of right and left bracket.
160 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 , , 1 4 3 8 40 40 50 50 55 55 65 85 , AMD250 1 2 3 8 1 2 , AMD350 3 4 1 2 3 4 , AMD450 1 1 1 1 AMD550 AMD650 3 4 1 2 , , 14-20-26 6 Micro Mist Separator Series AMD AMD850 Dimensions Accessory D: With auto-drain (N.O.) for AMD850 female thread Option T: With element service indicator Courtesy of Steven Engineering, Inc.-230
O P MGC 20 25 32 40 50 140 80 30 30 23 36 40 86 12 26 12 21 M6 X 1 M5 X 0.8 MGF 153 80 37 30 25 44 47 98 13 31 12 21 M6 X 1 M5 X 0.8 161 82 37 25 28.5 50 53 112 16 38 12 21 M6 X 1 Rc(PT)1/8 CY1 188 92 44 20 33 60 63 132 20 47 12 25 M8 X 1.25 Rc(PT)1/8 241 104 55 20 40.5 70 73 162 25 58 14 26 M8 X 1.25 Rc(PT)1/4 MY1 Without rear plate Bracket mounting stroke Long stroke Bracket mounting stroke
160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122 160 , , 1 4 3 8 40 40 50 50 55 55 65 85 , AMH250 1 2 3 8 1 2 , AMH350 3 4 1 2 3 4 , AMH450 1 1 1 1 AMH550 AMH650 3 4 1 2 , , 14-20-34 6 Micro Mist Separator with Prefilter Series AMH AMH850 Dimensions Accessory D: With auto-drain (N.O.) for AMD850 female thread Option T: With element service indicator Courtesy of Steven Engineering
CA BA 0 0.3 BA 0 0.3 Drawing of view (E) (mm) Bore size 20.5 20.5 9.5 9.5 NA Z 16 10 15 15 18.3 15 18.3 12 20 14 5 4 8 8 5 5 11 11 CA GA BA CB GB 5 5 H NB S FB 17.5 19 FC 5.5 5.5 FT 2.3 2.3 FX 33 33 83 82 M5 x 0.8 M4 x 0.7 MM FY 20 20 FZ 42 42 GC F D BB A 55 54 M12 x 1.0 M10 x 1.0 NN 28 28 17 20 With air cushion With air cushion type is not available for 21-/22-CJ2.
(mm) D H Bore size B GA L LB GC GB C A LX LH MM NB Y X NA Z S LD 3.5 through, 6.5 depth of counterbore 4 9.5 M4 x 0.7 12 28 8 4 8 31.5 85 65 10 15 12 14 16 5 11 20 23 16 4.5 through, 8 depth of counterbore 5 5 9.5 16 15 18.3 20 16 5 11 20 26 20 M5 x 0.8 28 8 10 16 31.5 86 66 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.
9.5 depth 5.4 51 43 8 12 10 M8 x 1.25 10 6 30 5.5 43 1/8 16.5 6 11.5 25 9.5 depth 5.4 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 49 1/8 17 8 12 32 11 depth 6.5 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 63 1/4 19.5 10 19.5 40 14 depth 8.6 75 65 10 22.4 19 M16 x 2 20 7 52 9 71 1/4 21.5 10 21.5 50 17.5 depth 10.8 81 70 11 28 24 M20 x 2.5 24 8 58 11 81 1/4 24 10 24 63 20 depth13 90 77 13 35.5 30 M27 x