Compact Cylinder with Air Cushion

14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 11 for details on rod end nut and accessories.

High Vacuum Angle Valve

Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

RLQ

T3 Cylinder with Bypass Piping Component Parts T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 No. 1 2 3 4 Description Qty. 1 1 1 1 Part no.

Compact

2-wire 12 V M9BWV M9BW Diagnostic indication (2-color indicator) Relay, PLC Yes Grommet 24 V 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 2-wire 12 V M9BAV*1 M9BA*1 *1 Water resistant type auto switches are mountable on the above models, but SMC cannot guarantee water resistance.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Bellows seal, Manual operation: XMH, XYH Features 1 Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal Series XMA, XYA How to Order XMA XYA M9N 16 A A M9N 25 Angle type In-line type 1 2 3 4 5 6 7 2. Flange type 1.

RQ

For detailed specifications, refer to page 7-9-1.

Compact Cylinder with Air Cushion and Lock Series RLQ

T3 Cylinder with by-pass piping component parts No. 1 2 3 4 Quantity 1 1 1 1 Description Part No.

XM, XY

Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Ex.)

SY

SS5Y34, #1 (#1 + #5 + #6 + #7 + #17) SS5Y3-45FU-B .

Guide Cylinder Series MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

VFR

Material Description AXT335-1-11(M4 x 40) VF4000-20-1 VFR41 VF4000-20-1 VFR42 AXT335-1-11(M4 x 40) VF4000-20-1 VFR43/44/45 NBR Hexagon socket head screw Gasket o AXT335-1-11(M4 x 40) Refer to How to Order Pilot Valve Assembly on page 3-5-54. Refer to How to Order Sub-plate Assembly on page 3-5-55. Steel !0 !

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

•

c 0 ZPY401 40 43 lB.5 29S 465 25 ~ 1 5 615 6.5 3.3 N41 :.:::') 1 4.5 1.8 ZPY5O!' 53 5 50 19. 295 <7 5 7S.5 6'l5 7.5 3.8 . . 1 012 12 22 13 15 12 22 38 ~ 64 3 1.7 N4( fS:)145 5 1.8 38 20 68 25 64 3 1.8 38.5 64.S 3.5 1.2 ~ i 1 65 7 2.5 ZPY10D 10 12 15 25 .

LG1H

depth 8 35 85 130 Stroke + 145.7 (table movement range) 77.3 77 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 300 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 The body mounting reference plane and work piece mounting reference plane should be used as standards when mounting onto equipment.

MG

1 !2 !3 !4 !5 !6 !7 !8 !

SYJ300/500/700

Type of actuation Series Port size 1 2 5 7 M5 01 Normally closed Normally open 3 port SYJ500 SYJ700 M5 x 0.8 1/8 (SYJ700 only) (For manifold type 20, 21R) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SYJ 2 5 Y M5 1 5 Body ported 5 1 SYJ 4 5 Y 01 Base mounted Body

CXS

3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.

JXCx-OMT0061CN

5.5) B1 A1 5 6 (17.7) (3 ) 2 1 (18) B6 A6 ( 6.3) 16 15 (11) (30.7) 66 - 15.3 [5m ] (1) (2 ) ---A B-1 2 L A A-1 1 B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6) 8 3 (4) S 4 (+) B-1 5 (-) A-1 1 (+) B-3 2 A-3 (8) (1) (2 ) (B 1) (14.2) A1 2 1 (17.7) (14) (18) 6 (10.2) A6 B6 5

High Vacuum Angle Valve, XL Series

-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.