Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY to 150) Atmospheric pressure to 1 x 10-6 Operating pressure Pa Conductance l/s Note 1) 14 45 80 160 200 5 1.3 x 10-10{1 x 10-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Operating time s 0.05 0.1 0.21 0.24 0.26 0.28 KF (NW), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF
-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.
4-M8 x 1.25 thread depth 10 20 8H10 depth 10 Encoder signal line Bending radius 80 Motor power line Bending radius 80 8H10 depth 8 35 85 210 78.5 78.5 Stroke + 229 (table movement range) 107 10 95 Work piece mounting reference plane 55 Body mounting reference plane 52.5 Stroke + 386 1 125 8(4)-M6 x 1 thread depth 10 3(2)-8H10 depth 10 30 The body mounting reference plane and work piece
(C) 55 50 60 70 80 IDU3D to 6D 45 50 55 65 75 IDU8D to 15C 45 50 55 65 70 IDU22C1, 37C1 40 45 50 55 60 IDU55C, 75C Ambient temperature (C) Outlet air pressure dew point (C) 15 10 5 15 10 5 15 10 5 15 5 10 5 15 10 1.35 1.35 0.60 1.35 1.35 0.60 1.35 1.35 0.60 1.35 0.60 1.35 0.60 1.35 1.35 25 1.35 1.05 0.50 1.35 1.05 0.50 1.35 1.10 0.50 1.35 0.60 1.20 0.55 1.35 1.25 30 1.25 0.95 0.45 1.25 0.95
10 P_2(n_2)1/10 P1HP1L(n1Hn1L)1/4 P2HP2L(n2Hn2L)1/4 -1/7 OFF -42No.PS-OMV0003CN-G OFF or or (3) QXZ((/)(*)) () () A~Z <3 > () OFF -43No.PS-OMV0003CN-G [F11] <> UPDOWN[F11] SET UP DOWN 1000 100 SET [F11] [MPa]/[kPa]/[kgf/cm 2]/[bar]/[psi] ([kgf/cm 2]/[bar]/[psi]) 27[F 0] -44No.PS-OMV0003CN-G [F14] Zero-cut 0 1.0F.S.0.010.0F.S. <> UP DOWN [F14] SET Zero-cut Zero-cut UP
CKZ-50A013 CKZ-50A014 CKZ-50A015 NAAMS code ACA221M ACA222M ACA223M 55.0 85.0 115.0 50 mm Offset-Machined 50 mm Offset-Machined A A B B C C 6H6 through +0.008 0 8F7 through +0.028 +0.013 D D E E F F 200.03 200.03 10 G G 10 300.025 300.025 300.025 300.025 9 through 11 through H H I I J J 250.05 250.05 45 45 M6 x 1.0 M6x 1.0 750.05 750.05 R25 R25 6.5 6.5 10 10 1 1 1 1 R25 R25 18 18 19 19 19
Bore size [mm] Stroke C D Mounting bolt part no. 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L Material: Chromium molybdenum steel Surface treatment: Zinc chromated 12 5.6 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L 16 4.6 5 40 CQ-M3 x 40 L 10 45 CQ-M3 x
auto switch: 10 to 70C (with no freezing) With auto switch: 10 to 60C (with no freezing) Non-lube JIS class 2 +1.0 0 mm 50 to 500 mm/s 1/8 1/4 Note) The minimum operating pressure of the cylinder is 0.1 MPa when the cylinder and lock are connected to separate ports.
12316 123156 12314PA Sight dome 3 1 Lubrication plug assembly 4 1 123528A Standard Bumper assembly 5 1 Note 1) -2, -8 123528-1A Note 1) Needle stud assembly 6 1 123128PA 124232A 123321-1A 123321-4A 12318 123111 113136 KA00466 Standard -8 -1 Siphon tube assembly 7 1 Sight dome seal Siphon nut seal O-ring O-ring 8 9 10 11 12 13 Urethane rubber 1 1 1 1 1 1 Urethane rubber NBR NBR Bumper retainer
SS5Y71, #1 L type plug connector . SS5Y71, #1 + #10 M type plug connector .
Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows
Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !
Opposite side: Same) 2-M5 x 0.8 depth with 4.5 (Piping port) (Opposite side: Same) 3 8 6 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model 10 15 23 55 68.5 CXS6-10 20 20 33 65 78.5 CXS6-20 30 25 43 75 88.5 CXS6-30 40 30 53 85 98.5 CXS6-40 50 35 63 95 108.5 CXS6-50 15 Series CXS Dimensions: 10, 15 Stroke ZZ SS 9 J D B M Y (Hexagon socket head set screw) L Z I 1 1 G 0.2 (G) H A P 6.3
) 40 50 32 40 10 10 32 5 5 1 1 5 100 10 200 1 10 100 50 200 Eccentric distance l (mm) Eccentric distance l (mm) 8-19-13 Series MGP Vertical Mounting (Ball bushing bearing) Operating pressure 0.4 MPa MGPL12 to 25 (9) 30 Stroke or Less, V = 400 mm/s (10) Over 30 Stroke, V = 400 mm/s 1 10 0.5 5 25 25 20 Load weight m (kg) Load weight m (kg) 20 16 0.1 1 Courtesy of Steven Engineering, Inc.-230
0.3 1.0 0.3 0.8 0.3 Actuation pressure difference MPaNote 1) 0.5 0.25 0.4 0.2 0.2 0.15 Reverse pressure potential MPa Note 2) 1 x 10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting
20MGGL 25MGGL 32Stroke Stroke Stroke 1.2 2 1.7 (Ball bushing type) (Ball bushing type) (Ball bushing type) 1.5 1 1.5 500st Deflection Y (mm) Deflection Y (mm) Deflection Y (mm) 600st 400st 1 500st 400st st: Stroke (mm) 1 st: Stroke (mm) 300st st: Stroke (mm) 0.5 400st 300st 200st 0.5 300st 0.5 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 20 40 60 80 100 10 20 30 40 50 60 10 20 30
l % M5 M6 i M8 Ye I M4 1MS M6 , M8. li ZPT02 2.5 3.5 ~~112.5 3.5 \ '(~i~ ~ ~ 1-\ ZPT08 (3.5) (3) H 1""'2., "2,'~) {:~~.:) zpno 10 12 171 (6) (13) ZPn3 10 12 10 12 10 12 ,'6.5) (6) : (13) (6.5) (6) ' :13) 1 1 6.5) (6) (13) II . 13 (7) (7) (13) ZPn6 I ZPT20 IS 26 15 26 15 15 15 16 .
VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 56 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.
102 1.0197 X 102 9.8692 X 103 1.0197 X 102 1 7.5006 1 X 106 1 X 103 1.0197 X 105 7.5006 X 103 1.4503 X 102 1 1 X 10 1.0197 X 10 9.8692 1 X 105 1 X 102 1 X 101 9.8692 X 101 1.0197 X 104 7.5006 X 102 1 1.0197 1.4503 X 10 9.8067 X 104 9.8067 X 102 9.8067 X 101 9.6784 X 101 1 X 104 7.3556 X 102 1 1.4217 X 10 9.8067 X 10 1.0133 X 105 1.0133 X 102 1.0133 X 101 1.0332 X 104 7.6000 X 102 1.0332 1.4706
74 60 820 263 86 70 0.05 AN300-03 3 8 AN400-04 1 2 0.02 AN500-06 3 4 0.01 AN600-10 1 1 1 0.005 AN700-12 1 4 AN800-14 1 2 AN900-20 0.002 50 200 1000 5000 20 100 500 2000 10 50 10 Construction/Parts/Dimensions Air flow (l/min (ANR)) AN500 to 900 AN200 to 400 Noise Level (Initial conditions) End plate End plate AN200 to 900 Condition: 0.5 MPa at inlet pressure of solenoid valve Measurement