Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY x 10-6 Operating pressure Pa Main exhaust valve 14 45 80 160 200 Conductance l/s Note 1) Initial exhaust valve 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 1.3 x 10-10{1 x 10-10} at ambient temperatures, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperatures, excluding gas permeation External Main exhaust valve 0.10 0.21 0.24 0.26 0.28 Operating time
HRX-OM-W060 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.
HRX-OM-M090 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.3.3 Types of hazard labels . 1-3 1.3.4 Locations of Hazard Labels . 1-4 1.4 Other Labels . 1-5 1.4.1 Product Label . 1-5 1.5 Safety Measures . 1-5 1.5.1 Safety
-1 2 The models IDF1E to 11E and IDU3E to 6E have been revised.
68 22 55 18 8 42 57 5.5 48 96 Rc 1/8 NPT 1/8 Rc 1/8 NPT 1/8 Rc 3/4 NPT 3/4 LVA5 58 75 84 26 68 27.5 8 56 71 6.5 62 129 Rc 1 NPT 1 LVA6 58 75 84 32 77 27.5 8 56 71 6.5 71 117 138 17-5-22 20 Series LVA Manifolds Manifold Specifications LLA5A LLA4A LLA3A Model LLA2A Manifold type Stacking type VC P (IN), A (OUT) type Common IN/Individual OUT Valve stations 2 to 5 stations VDW 3/4 1/2 3/8 1
size ISO size 2 Series VQ7-8 ISO size 2 0.96n + 0.77 (n: Stations) Max. 10 stations 3/8 1/2 1/2 3/4 3-10-27 28 Series VQ7-8 DIN Terminal Type VV72-2n-3/8, 1/2 118 142 67 9 118 142 9 34 20 2-1/8 14 Indicator light P , R1, R2 port for Rc 3/4 only U side U side 18 R4.5 60(73) P = 56 P = 56 60(73) 23 R4.5 Manual override B PA 18 42 14 1313 B A SMC SMC SMC B B B A PA B PA B A A B PA Courtesy
(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer 20A 1 pc., Barrel nipple 20A 1 pc., Drain pan for the pump 1 pc.
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 32 BQ-2 BMU1-025 80 BQ-2 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts
Specification SV1000 SV2000 Applicable series Stacking type cassette base manifold Manifold type Common SUP, EXH 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) 18 stations 20 stations Max. number of solenoids 18 points 26 points 1(P)/3, 5 (E) port C8, N9 C10, N11 Port size C3, C4, C6 N1, N3, N7 C4, C6, C8 N3, N7, N9 4(A)/2(B) port Flow Characteristics Flow characteristics Port size
0 Union (Size: 1/2 inch) Stainless steel 1 (197) !1 DI sensor piping assembly Stainless steel 1 !2 Mounting bracket 1 !3 DI filter inlet hose PVC 1 !4 DI filter outlet hose PVC 1 !5 Hose clamp 4 !6 Mounting screw (Size: M5) 2 !7 Cable tie holder 5 !8 Binding band 4 !
81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40
4 18 Nol a\railable with pre$ure range 1 I "-40" inplt ouFut combination not avaibble Slandard soecilication CE marked 1. 17. 18. 19 For man old mountino 2 , 3 . 1 5 CE marked DeviceNet comoatible 4, 5. 6.8. 14 CE marked 16 preset tvpe 4. 5. 7, 10 DeviceNet compatible 5, 6.8, 14 1 6 preset type 5,7.10. 16 0.1s hiqh speed response Digital input type 5. 6. 9. 11 Reverse output 12,13 CE marked
(86) 62 (72) 75 (86) 62 (72) 50 PA R2 R1 P A B Indicator light 2-7.5 Mounting hole 2-Rc1/8 49 (64) 49 (64) (20) 18 18 (20) 5-Rc3/8, 1/2, 3/4 (P, A, B, R1, R2) 44 (58) 44 (58) G1/2 (cable 6.8 to 10) Bottom port drawing Rc1/8 Port Y (PE) 141 (154) 153 (166) SMC 108.5 (121.5) 23 (30) (ports A, B) Y 12 50 (63) 38 (53) 3 5 38 (53) 32 (42) 23 (30) 1 2-Rc3/8, 1/2, 3/4 Ports R1, R 2-Rc3/8, 1/2, 3
-09S 18.5 44.8 5/16" 15.2 28.2 ASD430FG-N02-07S 17 43.9 1/4" 13.2 25.6 18 55 15 36.7 ASD430FG-N02-09S 34.9 34.6 29.6 17.5 18.5 41.7 39.9 11 18.5 46.5 5/16" NPT 1/4 15.2 28.2 ASD430FG-N02-11S 21 19.7 49.3 62 3/8" 18.5 31 ASD530FG-N02-07S 17 48.7 1/4" 13.2 25.6 20.3 76 41.9 ASD530FG-N02-09S 43.3 43 38 19 18.5 46.9 48.3 15.4 23 51.3 5/16" NPT 1/4 15.2 28.2 19.8 ASD530FG-N02-11S 21 23.1 54.1
3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.
3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.
[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2 to 22 2 to 22 40 18 to 30 18 to 30 18 to 30 18 to 30 Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2
Detecting rod assembly . 0.025 (8S-2) 18(Exclusive plug) 88-1 0.74+ 0.10 X 1 00/ 25 +0.28+0.4 + 0.025 = 1,845kgf Conc :litIOOS OUTside, supply pressure 5kgf/ cm ~, No-load (!)