Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 ZH05DS-06-01-06 ZH05DL-06-01-06 ZH07DS-06-01-06 ZH07DL-06-01-06 ZH10DS-06-01-08 ZH10DL-06-01-08 ZH13DS-08-02-10 ZH13DL-08-02-10 ZH15DS-10-03-12 ZH15DL-10-03-12 12.8 24 21 7.8 6 17 24 12.8 24 21 6 17 24 12.8 24 22 6 17 24 12.8 24 22 6 17 24 13.7 26 24.5 8 20 28 13.7 26 24.5 8 20 28 15.3 28 27 10 22 30 15.3 28 27 10 22 30

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions.

Air Cylinder

BAF-10 BT-04 BT-04 BT-06 BT-08 BT-08 D-A3

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Auto switch model Bore size [mm] 40 50 63 80 100 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV D-A9l/A9lV BA7-040 BA7-040 BA7-063 BA7-080 BA7-080 D-A5l/A6l/A59W D-F5l/J59/F5lW/J59W D-F5NT/F5BA/F59F BT-04 BT-04 BT-06 BT-08 BT-08 D-A3lC/A44C/G39C/K39C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 D-Z7l/Z80 D-Y59l/Y69l D-Y7P/Y7PV D-Y7lW/Y7lWV D-Y7BA BA4-040 BA4-040 BA4-063 BA4-080 BA4-080

2/3 Port Valve

VX021 001 01 CBTZ Applicable voltage for electrical option Power supply Voltage code Surge suppressor Light Rated voltage Coil combination code 01 02 03 04 07 08 05 06 02 200V AC 50/60Hz 01 100V AC 50/60Hz 08 48V AC 50/60Hz (See the table below.) 13 24V AC 50/60Hz AC 03 110V AC 50/60Hz 23 440V AC 50/60Hz 04 220V AC 50/60Hz 51 6V DC Solenoid No. 05 24V DC 53 48V DC Applicable valve model

IZx-OMP0064

Recommended piping port size Emitter cartridge Bar length mm One-touch Applicable tube type fitting symbol O.D. mm Single end piping Double ends piping 06 6 340 to 640 340 to 1300 08 8 340 to 1300 340 to 2500 10 10 340 to 2500 340 to 2500 06 6 340 to 1300 340 to 2500 08 8 340 to 2500 340 to 2500 10 10 340 to 2500 340 to 2500 06 6 340 to 2500 340 to 2500 08 8 340 to 2500 340 to 2500 10 10

One-touch Fittings Series KQ2

L D A M Nylon Urethane 3.2 KQ2R23-04 KQ2R04-06 4 6 2 2.1 9.6 33.5 34.5 3.4 2.9 18.5 17.5 15.5 10.4 4 KQ2R04-08 36.5 5.6 5.6 2.3 8 18 16 KQ2R04-10 12.8 39.5 3.6 10 18.5 KQ2R06-04 4 3 12.8 37 4 4 21 6 KQ2R06-08 37 3 8 18.5 17 KQ2R06-10 12.8 39.5 13.1 13.1 3.5 10 18.5 KQ2R06-12 42 15.2 5.2 12 20 8 KQ2R08-10 15.2 41 26.1 18.0 4.5 10 20 18.5 KQ2R08-12 42 5.1 12 12 KQ2R10-12 17 42 41.5 32.8 33

Stainless Steel 316 Fittings

Width across flat Effective area (mm2) Weight (g) d M L Model 2 x Applicable tube H1 H2 I.D. 2.5 3 4 6 7.5 8 9 10 13 H1 H2 H2 4 4 6 8 10 10 12 12 16 KFG2H0425-00 KFG2H0403-00 KFG2H0604-00 KFG2H0806-00 KFG2H1075-00 KFG2H1008-00 KFG2H1209-00 KFG2H1210-00 KFG2H1613-00 7 11 25 43 42 44 42 71 1.8 2.3 3.3 5.3 6.8 7.3 8 9 12 1.6 2.6 6 17 30 35 45 57 101 5 21.8 8 8 d 5.8 6.6 24.8 28.6 10 14 10 14

Plug-in/Plug Lead: Single Unit

Tool required) Option Manual override (2) 150/30 m/s2 Shock/Vibration resistance Dust tight (IP65 compatible) Protection structure Plug lead unit 12, 24 VDC, 100, 110, 200, 220 VAC (50/60 Hz) Coil rated voltage JIS Symbol 2 position single 10% of rated voltage Allowable voltage fluctuation 3 position exhaust center Class B or equivalent Coil insulation type (A) 4 (B) 2 (A) 4 (B) 2 1 W DC (42

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds VV5Q 5 1 08

LEC-OM02704CN

3.7.1 .42 3.7.2 .45 3.7.3 .46 3.7.4 .47 3.7.5 .50 3.7.6 .53 3.8 .56 3.8.1 1 .56 3.8.2 1 .57 3.8.3 2 .59 3.8.4 2 .60 3 1 3CC-Link 3 CC-Link 3.1 CC-Link DC5V CC-Link Ver.1.10 10M/5M/2.5M/625K/156Kbps NRZI CC-Link BUS(EIA RS-485) CRC(X16X12X51) CC-Link Ver.1.10() HDLC 164 156kbps 625kbps 2.5Mbps 5Mbps 10Mbps () 1200m 900m 400m 160m 100m 0.2m 42(1/)(2/32) .

VFS

Multi-connector 7 08 8 stations Side Bottom Individual Individual 8 Max. 8 stations Option Plug-in Type: With D-sub Connector (Wiring specifications: Refer to page 3-8-8.) Thread type Wide range of interchangeability (D-sub connector (25P) conforming to MIL standard) Quick wiring permits easier installation.

Compact

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping 200 08; 12mm lead 10.05 I M <-iD;;,;; uo100 08

LX Series Compact Electric Actuators

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping I M <-iD;;,;; uo200 08; 12mm lead 10.05 100 08

VQ5000

mA), 0.5 W DC (21 mA) (3) 24 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) Note (3) 12 VDC 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Inrush 1.2 VA (12 mA), Holding 1.2 VA (12 mA) 100 VAC Power consumption (Current) 3 position pressure center 2 position double (Metal) Inrush 1.3 VA (11.7 mA), Holding 1.3 VA (11.7 mA) 110 VAC (A) 4 (B) 2 (A) 4 (B) 2 Inrush 2.4 VA (12 mA), Holding 2.4 VA (12 mA) 200 VAC

REA/REB

AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4. Use caution to the direction of the external slider and the piston slider. Since the external slider and piston slider are directional for size 10, refer to the figures below when performing disassembly or maintenance.

REA/REB

AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4. Use caution to the direction of the external slider and the piston slider. Since the external slider and piston slider are directional for size 10, refer to the figures below when performing disassembly or maintenance.

Table of Contents

CDH10 U L CX CZ ZZ + Stroke Z + Stroke RR (mm) Stroke range Bore size (mm) U RR +0.3 +0.1 L CDH10 CX CZ Z ZZ 20 25 32 40 50 63 80 Up to 250 Up to 350 Up to 600 Up to 600 Up to 700 Up to 900 Up to 900 14 14 17 17 26 26 30 10 10 14 14 22 22 25 14 14 20 20 30 30 32 28 28 40 40 60 60 64 8.5 11 12 15 18 23 28 23 23 30 30 42 42 50 129 151 185 208 237 263 298 137.5 162 197 223 255 286 326 8-25-24

Cylinder with Lock

2 Component Parts Component Parts Note No. 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 No.

Hydraulic Filters

FH440-04 FH440-06 FH440-08 FH440-10 FH440-12 FH640-03 FH640-04 FH640-06 FH640-08 FH640-10 FH640-12 3/8 3/8 10 10 FH441-04 FH441-06 FH441-08 FH441-10 FH441-12 FH441-16 FH441-20 FH441-24 FH641-04 FH641-06 FH641-08 FH641-10 FH641-12 FH641-16 15 (1/2B) 15 (1/2B) 1/2 1/2 20 20 20 (3/4B) 20 (3/4B) 3/4 3/4 50 50 Max. 21 MPa 25 (1B) 25 (1B) 1 1 80 80 Max. 7 MPa 32 (1 1/4B) 32 (1 1/4B) 1 1/4