Piping: Base Mounted Common SUP Individual EXH, Stations: 5 Stations, A B Port Size: ø8 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 10 Stations, A B Port Size: ø8 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 2 Stations, A B Port Size: ø8 One-touch Fitting

MGC

BBA3: For D-B5/B6/G5/K5 BBA4: For D-C7/C8/H7 D-G5BA/H7BA switch is set on the cylinder with the stainless steel screws above when shipped. When the switches are shipped as individual parts, the BBA3 or BBA4 is included.

IZx-OMP0064

Ionizer Made to Order 40 Standard type Type IZS 40 1600 10 B IZS 42 1600 10 B Bar type Made to Order Sensor Type Symbol Sensor IZS41 IZS42 Nil Without sensor F Feedback sensor 41 Feedback sensor type 42 Dual AC type G Auto balance sensor [high accuracy type] Emitter cartridge type/ Materials * Feedback sensor cannot be used for the IZS42.

MLGC

BBA3: For D-B5/B6/G5/K5 BBA4: For D-C7/C8/H7 D-G5BAL/H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

MLGC

BBA3: For D-B5/B6/G5/K5 BBA4: For D-C7/C8/H7 D-G5BAL/H7BAL switch is set on the cylinder with the stainless steel screws above when shipped.

Piping: 42 (Base Mounted Common SUP Individual EXH), Stations: 3 Stations, A B Port Size: C6 (ø6 One-touch Fitting)

Piping: 42 (Base Mounted Common SUP Individual EXH), Stations: 3 Stations, A B Port Size: N7 (1/4" One-touch Fitting)

Piping: 42 (Base Mounted Common SUP Individual EXH), Stations: 3 Stations, A B Port Size: N7T (1/4" One-touch Fitting NPTF)

Piping: Base Mounted Common SUP Individual EXH, Stations: 3 Stations, A B Port Size: ø6 One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 3 Stations, A B Port Size: 1/4" One-touch Fitting

Piping: Base Mounted Common SUP Individual EXH, Stations: 3 Stations, A B Port Size: 1/4" One-touch Fitting NPTF

Rotary Actuator

Symbol Shaft Pattern Sequencing1 -XA1 to -XA24 Applicable shaft type: S, W, Y How to Order C RA1 Z X D B S 50 90 M9BW A1 A2 C8 C59 Number of auto switches Magnet Nil 2 pcs. S 1 pc.

Table of Contents

(mm) Connection thread KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 1 4 1 4 3 8 3 8 3 8 14.7 14.7 15 14.2 13.7 13 15 17 21 23 40.5 42.7 49.4 53.9 56.1 14 17 19 24 27 18 19 21.5 24 25.5 2.6 32 36 42 79 105 17 17 19 22 24 M12 x 1 M14 x 1 M16 x 1 M20 x 1 M22 x 1 Applicable tubing 6.8 13.1 20.4 30.4 Straight Union: KCH Applicable tubing O.D.

Table of Contents

VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2 3 4.5 2 0.59 1.2 2.4 0.59 1.2 1.5 0.6 0.2 1.5 0.6 1.5 3.0

KJ

(mm) Connection thread KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 1 4 1 4 3 8 3 8 3 8 14.7 14.7 15 14.2 13.7 13 15 17 21 23 40.5 42.7 49.4 53.9 56.1 14 17 19 24 27 18 19 21.5 24 25.5 2.6 32 36 42 79 105 17 17 19 22 24 M12 x 1 M14 x 1 M16 x 1 M20 x 1 M22 x 1 Applicable tubing 6.8 13.1 20.4 30.4 Straight Union: KCH Applicable tubing O.D.

KQ2

(mm) KQ2F04 to 12 Effective area (2) (mm2) Connection thread Rc (1) Mass (g) D1 D2 L1 L2 M Model Nylon Urethane Applicable tubing KQ2F04-01 KQ2F04-02 KQ2F06-01 KQ2F06-02 KQ2F06-03 KQ2F08-01 KQ2F08-02 KQ2F08-03 KQ2F10-02 KQ2F10-03 KQ2F12-02 KQ2F12-03 KQ2F12-04 KQ2F16-03 KQ2F16-04 1 8 1 4 1 8 1 4 3 8 15 23 15 22 25 17 24 24 27 30 36 31 52 59 58 10 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35

Air Fittings & Tubing

Nylon Urethane L2 L1 M KCE04-02 KCE06-02 KCE08-03 KCE10-03 KCE12-03 1 4 1 4 3 8 3 8 3 8 2.6 6.8 16.2 25.6 35.4 17 17 19 22 24 14.7 14.7 15 14.2 13.7 13 15 17 21 23 18 19 21.5 24 25.5 M12 X 1 M14 X 1 M16 X 1 M20 X 1 M22 X 1 2.6 32 36 42 79 105 14 17 19 24 27 40.5 42.7 49.4 53.9 56.1 6.8 13.1 20.4 30.4 Straight union: KCH Effective area (mm2) Weight (g) Tube O.D.

Table of Contents

21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL