0.4

Note ) When mounting top ported valves, select from page 21. In this case, use caution as there is also output on the A and B port on base side.

LEC-OM069xx

Driver type Driver select Motor select SMC Sigma Win+ SMC Sigma Win+ V5 SGDV-R90*11*Y572AA V6 SGMJV-01A3A2* 100W 200W V7 SGDV-1R6*11*Y572AA V7 SGMJV-02A3A2* LECYM2-** MECHATROLINK 400W V8 SGDV-2R8*11*Y572AA V8 SGMJV-04A3A2* V5 SGDV-R90*21*Y572AA V6 SGMJV-01A3A2* 100W MECHATROLINK 200W V7 SGDV-1R6*21*Y572AA V7 SGMJV-02A3A2* LECYU2-** 400W V8 SGDV-2R8*21*Y572AA V8 SGMJV-04A3A2* Trademarks

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Copper/Fluorine/Silicone free + Low particle generation 21 Prefix the asterisk to the part no. of the solenoid valve, etc.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Copper/Fluorine/Silicone free + Low particle generation 21 Prefix the asterisk to the part no. of the solenoid valve, etc.

Fieldbus system EtherCAT compatible SI Unit

Fieldbus system EtherCAT compatible SI Unit MODEL / Series / Product Number EX600-SEC3/SEC4 EX600-ED# Table of Contents Safety Instructions 3 System Outline 9 Definition and terminology 10 Assembly 11 Mounting and Installation 13 Installation 13 SI Unit Model Indication and How to Order 16 Summary of Product parts 16 Mounting and Installation 17 Wiring 17 Setting and Adjustment 18 LED Display 21

0.4

SOL.A 17 16 () (+) 21 25 24 Gray Red 23 Station 11 13 3 SOL.B () (+) 22 18 23 Black White 24 SOL.A 12 4 () (+) 23 26 Station 12 White None 25 19 22 SOL.B () (+) 24 11 5 21 20 White None 26 COM. 10 9 8 7 6 (+) () 25 COM. M27 female thread (+) () 26 Electrical characteristics Note) Positive COM spec. Negative COM spec.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P G P t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.)

CG5-S

1.5 21 27 71 23 35 64 50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 I-G10SUS Y-G10SUS 100 100 22 22 32 32 31 M26 x 1.5 79 21 45 55 M26 x 1.5 24 31 79 24 40 72 55 64 24 IY-G10SUS Knuckle joint pin Trunnion bracket Material: SUS440 (pin) SUS304 (bracket, snap ring) Material: SUS440 (pin) SUS304 (snap ring) LL CDd9 (CX) LY d Dd9 t m t LH l m L LT (LX) LG LF 4-LD (LV) LP LE (mm) (mm) Part no.

7.5

325 337.5 337.5 93.3 103.3 113.3 123.3 133.3 143.3 153.3 163.3 173.3 183.3 193.3 203.3 213.3 223.3 233.3 243.3 253.3 263.3 273.3 283.3 293.3 303.3 313.3 24 19 20.5 21.5 22.5 23.5 18.5 20 21 22 23 24.5 19.5 20.5 21.5 22.5 24 19 20 21 22 23.5 18.5 21 Series SJ2000/3000 Dimensions: SJ2000/3000 Mixed Manifold SS5J3-M60 D U (S, R, RS) 1 2 P J Stations [32.5 (SJ2000)] 32.1 (SJ3000) 15.4 (SJ3000

HRX-OM-K003

FLT 09 Alarm10 Return High Temp WRN 10 Alarm11 Reservoir High Temp.

HRX-OM-W002

21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2

HRX-OM-X084

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 21. Press the [] key. Displays screen for setting the function of the Contact output signal 3.

0.4

Refer to Semi-standard on page 57 for details. 21 Base Mounted Plug-in Unit Series VQ1000/2000 F kit P kit J kit G kit T kit L kit S kit M kit Construction Semistandard Exploded View of Manifold Electrical Wiring Specifications Terminal no.

10

Refer to pages 21 to 23 for electrical options, other options, and bracket/electrical entry direction. For Air VX210 Valve type: N.C. VX220 Valve type: N.C. VX230 Valve type: N.C.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

-11SD 17.9 31.8 43.3 21 6 3/8" 12.8 39.3 27.8 17 AS321F-03-08SD AS321F-N03-07SD 8 15.2 41 29.5 18.5 1/4" 13.2 27.8 39.3 17 53.7 23 9.8 47.4 R 3/8 1.2 19 20.9 AS321F-03-10SD AS321F-N03-09SD 10 NPT 3/8 19 23 9.8 20.9 53.7 1.2 47.4 18.5 43.3 31.8 21 5/16" 15.2 29.5 41 18.5 AS321F-03-12SD AS321F-N03-11SD 12 20.9 44.3 32.8 22 17.9 31.8 43.3 21 3/8" AS421F-04-10SD AS421F-N04-11SD 10 18.5 47.9 21

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Fittings & Tubing Air Cylinders Rotary Actuators How to Order Manifold 10 SS5Q13 08 FD2 D CE-compliant Clean series Nil Q CE-compliant Stations 1 station 01 1(P), 3(R) port size 24 Note) 24 stations Nil 1(P), 3(R) port 8 One-touch fittings 1(P), 3(R) port 5/16" One-touch fittings Note) The maximum number of stations depends on the type of electrical entries. 00T Option Nil 02 to 24 Note

0.4

Lead wire color Dot marking 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 The D-sub connector cable assembly can be ordered individually or included in a specific manifold model no. Refer to How to Order Manifold.

HRX-OM-X010

FLT 09 ALARM10 Return High TempWRN 10 ALARM11 Reservoir High Temp.

45

323 19 335.5 20 348 21 360.5 L dimension 22 373 23 385.5 24 398 25 410.5 No. 26 423 27 435.5 28 448 29 460.5 30 473 31 485.5 32 498 Caution Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

45

323 19 335.5 20 348 21 360.5 L dimension 22 373 23 385.5 24 398 25 410.5 No. 26 423 27 435.5 28 448 29 460.5 30 473 31 485.5 32 498 Caution Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.