PF2A/PF2W

Maximum measured Maximum measured Minimum measured Minimum measured Part no. flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] flow rate value [l/min] PF2A510--1 PF2A550--1 PF2A511--1 PF2A521--1 PF2A551--1 PF2A510--2 PF2A550--2 PF2A511--2 PF2A521--2 PF2A551--2 10 50 100 200 500 10 50 100 200 500 1.1 5.4 11 21 54 10.7 53.5 107 214 535 1.1 5.4 11 21 54 10.7 53.5 107 214

HEC-OM-S008

0050 0 A9 [CR][LF] :01 06 0050 0 A9 [CR][LF] Stop 0050 Control operation mode 1 :01 06 0050 0001 A8 [CR][LF] :01 06 0050 0001 A8 [CR][LF] Start 0051 Temperature setting 1 :01 06 0051 0BB8 E5 [CR][LF] :01 06 0051 0BB8 E5 [CR][LF] Set at 30.0 deg.C. 0052 Offset setting 1 :01 06 0052 0032 75 [CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

19 21 19 21 21 22 21 22 21 22 19 21 19 21 21 23 21 23 21 23 23 24 23 24 23 24 22 23 30 31 39 41 47 49 61 63 69 74 73 78 95 100 6 8 6 8 8 10 8 10 8 10 10 12 10 12 10 12 10 R 1/8 23.4 27.4 39.8 45.8 17.6 14 R 1/4 25.4 31.4 39.8 45.8 17.6 12 R 1/8 26.7 30.7 45.3 52.8 24 14 R 1/4 28.7 34.7 45.3 52.8 24 17 R 3/8 30.4 36.7 45.3 52.8 24 17 R 1/4 33.8 39.8 49.6 55.6 30 17 R 3/8 35.5 41.8 49.6 55.6

C95

115 25 75 6.3 89 4 5 10 41 16 55 18 11 20 22 32 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52 67 37 35 50 21 50 12 23 15 10.5 9 80 18 20 66 86 47 40 60 25 63 14 27 18 11 11.5 100 18 20 18 71 15 30 12.5 55 50

OMU0023

Step Request data Response data Operation details 1 01 06 0412 000A 01 06 0412 000A Sets Step Data No. 1 Positioning time to 0.1 sec. 01 10 0410 0002 2 01 10 0410 0002 Sets Step Data No. 1 Target position to 10 mm. 04 0 2710 (4) Return to Origin Change the Card Motor controller (controller ID1) operation mode to serial operation, and send a Return to Origin instruction.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

VHS400-02 VHS401-02 VHS400-03 VHS401-03 VHS400-04 VHS401-04 VHS500-06 VHS501-06 Pipipng direction Port size 3 4 1 2 3 8 1 4 1(P) 2(A) 21 105 76 54 35 35 57 93 Effective area (mm2) Mass (kg) 2(A) 3(R) 0.25 0.34 The front face of the handle is the reference position. Easy to Operate The direction of air flow can be verified at a glance by the orientation of the handle.

AR20-B to AR60-B

7 AR40(K)-06-B 50 54 55.5 8.5 10.5 70 2.3 37 42.5 21 7 AR50(K)-B 70 66 65.8 11 13 90 3.2 AR60(K)-B 70 66 65.8 11 13 90 3.2 *1 The dimension of B is the length when the filter regulator knob is unlocked. *2 For the AR20(K)-B only, the position of the pressure gauge is above the center of the piping. 76 AR20-B to AR60-B Regulator Made to Order Please contact SMC for detailed dimensions, specifications

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

M M5 M5 x 0.8 01 02 03 04 00 04 06 08 10 12 R 1/8 R 1/4 R 3/8 R 1/2 Thread connection H/DL L/LL KC Applicable tubing O.D. Same dia. tubing 4 6 8 10 12 04 06 08 10 12 4 6 8 10 12 KK Tubing (rod) connection Different dia. tubing (plug-in reducer) KK130 DM Construction KDM KB KR KA KQG2 KG KFG2 MS KKA M5 type Male connector KP KP Description Material Component Parts LQ No.

Table of Contents - Tubing

TUB-21 Related Equipment .

Vacuum System Peripherals:

Section code 13-14-20 20 ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF ZP ZCU AMJ Misc. 13-14-21 Date issued: 21 Photo copying this page is recommended.

Air cooled Thermo-con (Compact type)

History History Version Preface Contents Chap.1 Chap.2 Chap.3 Chap.4 1.0 Feb/19/21 Feb/19/21 Feb/19/21 Feb/19/21 Feb/19/21 Feb/19/21 Record of Changes Version Contents Date 1.0 First edition Feb/19/21 INR-244-831 i Preface Preface Thank you very much for purchasing SMC Thermo-con.

Dual Speed Controller with One-touch Fitting Series ASD 1

15.2 40.4 35.4 15 18.5 11 R 1/4 17 34.4 29.4 55 18.5 46.5 28.2 19.7 10 ASD430F-02-10S 18.5 58 21 49.3 31 6 ASD530F-02-06S 12.8 74 17 48.3 25.2 20.3 8 ASD530F-02-08S 15.2 76 18.5 51.3 28.2 41.9 46.9 48.8 43.8 19.8 23 15.4 R 1/4 19 42.8 37.8 10 ASD530F-02-10S 18.5 80 21 54.1 32.6 23.1 12 ASD530F-02-12S 83 20.9 22 55.9 34.4 6 ASD530F-03-06S 74 17 12.8 48.3 25.2 20.3 8 ASD530F-03-08S 93 18.5

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

41.5 M12 connector M12 connector 85.5 85.5 72.5 PE port PE port 10.5 PE port PE port 29 29 14 10.5 14 SMC SMC 1/8, 1/4-2 port 3, 5 port 21 21 21 21 1/8, 1/4-2 port 3, 5 port 1/8, 1/4 1 port 1/8, 1/4 1 port 3-11-15 16 Series EVS1-01/1-02 Dimensions EVS1-02-FG-S-M0 102 68 21.5 (14 port) 21.5 (12 port) 8.5 (2 port) 8.5 (4 port) 14 4 2 12 12 34 25 18 14 5 1 3 Indicator light 29.5 32.5 34 2-4.6

Piping: Base Mounted Common SUP Common EXH, Stations: 2 Stations, A B Port Size: -

Piping: Base Mounted Common SUP Common EXH, Stations: 5 Stations, A B Port Size: -

Piping: Base Mounted Common SUP Common EXH, Stations: 10 Stations, A B Port Size: -

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 2 Stations

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 5 Stations

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 10 Stations

Piping: 21 (Base Mounted Common SUP Common EXH), Stations: 20 Stations