High Vacuum Angle Valve, XL Series Valve side exhaust 18 High Vacuum Angle Valve Series XLG, XLGV Dimensions Dimensions (mm) 1in=25.4mm (b) XLG/Air operated type C D E C E E Fn (KF flange) Fd (K flange) (a) (c) G H J B Heater (optional) A A (mm) (mm) H 40 G 17 26 41 52 70 83 Fd Fn 30 40 55 75 87 114 D 1 1 2 2 3 3 C 38 48 66 79 100 117 B 110 120 171 183 209 250 A 40 50 65 70 88 90 A B C D Fn Fd G H 40 Note 1) E J E Note 1)
16 18 (12) 40 (10) 25 40 (15) 70 (30) 32 68 (20) 100 (46) 40 80 (40) Max. work load [kg] The values in parentheses are for when mounted vertically Size 16 141 25 452 32 707 40 Max. pushing force [N] Size Max. stroke [mm] 1200 500 Auto switch mounting 1 The numerical values vary depending on the actuator type, work load, speed, and specifications.
(mm) Rod end male threads Water resistant type (mm) a b c e f g h Bore size (mm) B C N S g h A Bore size (mm) 20 20 12.5 15 M10 x 1.25 6 10 23 66 61 43 18 26.5 6 33 76 25 25 15.5 18 M12 x 1.25 6 12 26 71 63 45 18 30 6 36 81 32 32 22 25 M16 x 1.5 7 14 35 86 71 51 20 38 7 45 96 40 40 27 30 M20 x 1.5 7 19 40 95 75 55 20 45 7 50 105 50 50 32 35 M24 x 1.5 8 24 46 106 81 60 21 55 7 56 116 63 63
Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.
48(22) 2 Position single Base mounted type SYJA3240-M5 51(25) 2 Position double 1.8 (0.1) SYJA3340-M5 M5 0.8 M3 0.5 3 Position closed center 54 (28) SYJA3440-M5 3 Position exhaust center SYJA3540-M5 3 Position pressure center SYJA3130 22 4 Port base mounted type (For manifold) 2 Position single SYJA3230 25 2 Position double Note1) Note1) M3 0.5 M5 0.8 1.2 (0.067) M3 0.5 SYJA3330 3 Position
Type 40 Applicable solenoid valve SYJ514-SYJ514M-SYJ524-SYJ524M-How to Order SS3YJ5--40-05 -M5 R port 1/8 P port 1/8 P, R port thread type Stations A port size 02 : 20 2 stations : 20 stations Applicable blanking plate assembly SYJ500-10-3A Nil A A Rc G NPT NPTF M5 01 M5 x 0.8 1/8 F N T A port M5 x 0.8, 1/8 Note) For more than 9 stations, supply air to both sides of P port and exhaust air
Individual SUP spacer VV802-P-01 (Size 18 mm) VV801-P-03 (Size 26 mm) Individual EXH spacer VV802-R-01 (Size 18 mm) VV801-R-03 (Size 26 mm) Blanking plate assembly VVS8020-11A (Size 18 mm) VVS8040-11A (Size 26 mm) EXH block plate VVS8020-19A (Size 18 mm) VVS8040-19A (Size 26 mm) SUP block plate VVS8020-16A (Size 18 mm) VVS8040-16A (Size 26 mm) Direct EXH outlet with built-in silencer [-S]
How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M
Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6
W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs)
Note 3) M5 fittings for M5 thread are attached without being incorporated.
18 4.5 18 4.5 1.7 4 2-M4 x 0.7 thread depth 5 Mounting thread 3.3 3 15 Groove for auto switch mounting 90 14 Series MHF2 Dimensions MHF2-16D Scale: 50% 4H9 +0.030 0 depth 3 38 4H9 +0.030 0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 57.5 5 M5 x 0.8 Finger closing port 50 72 2-M5 x 0.8 thread depth 5.5 Mounting thread 26 52 10.6 E 20 20 24 33 E 0 -0.1 2-4.3 through (mounting hole
Nominal size Center of sphere R Maximum thread depth P Allowable eccentricity U M A Weight (kg) B L C D T J G H 20 25, 32 40 50, 63 80 100 125, 140 160 JAF20-8-125 JAF30-10-125 JAF40-14-150 JAF63-18-150 JAF80-22-150 JAF100-26-150 JAF140-30-150 JAF160-36-150 8 10 14 18 22 26 30 36 19 25 32 65 75 90 125 150 48 52 70 36 40 52 45 55 65 82 100 21 24 31 41 50 59.5 79 96 6 6 9 12 16 19 24 29 6.6
39.5 31.5 6 6 29 5.5 10 38 5 8 20 3.5 6.5 M6 x 1.0 7 18 10 5 M4 x 0.7 10 to 60 44 34 8 8 36 5.5 16 47 7 10 25.5 5.4 9 M6 x 1.0 7 19.5 10 6 M5 x 0.8 10 to 60 47.5 37.5 10 10 40 5.5 20 52 8 10 28 5.4 9 M6 x 1.0 7 23 10 49.5 7 M6 x 1.0 10 to 50, 75, 100 54 42 12 12 45 8.5 25 60 4.5 10 12 34 5.5 9 M6 x 1.0 7 26 10 57 10 M8 x 1.25 10 to 50, 75, 100 60.5 48.5 13 16 52 8.5 28 69 5 14 12 40
x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.
(mm) ZCU 24 VDC 24 VDC Supply voltage AMJ Suction filter unit ZX1-F Operating pressure range Vacuum to 0.5 MPa Misc. 30 m Filtration Air supply port M5 (Standard)/M6 (Option) Unit Manifold Vacuum pad connection port M5 (Standard)/M6 (Option) Air supply port Rc 1 8 Common specifications Exhaust port Rc 1 8 External pilot port M5 Stations Max. 8 units Refer to pages 13-2-8 to 13-2-18 for more
Cylinder port size C3 With 3.2 One-touch fitting C4 With 4 One-touch fitting C6 With 6 One-touch fitting M5 M5 thread CM Mixed sizes and with port plug L3 Top ported elbow with 3.2 One-touch fitting L4 Top ported elbow with 4 One-touch fitting L6 Top ported elbow with 6 One-touch fitting L5 M5 thread B3 Bottom ported elbow with 3.2 One-touch fitting B4 Bottom ported elbow with 4 One-touch
150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs
X 0.8 Depth 5 M5 X 0.8 Depth 5 13 13 Dimensions/Base Mounted Style: ZSE2-0R Grommet style/ZSE2-0R-15 Connector style/ZSE2-0R-15C Pressure setting Pressure setting Indicator light Indicator light trimmer trimmer 15 15 9 9 L H L H 2-M2.5 Mounting thread 2-M2.5 Mounting thread 25 30 25 30 (3000) (3000) 3 40 9.5 3 40 1.5 16 18 20 16 18 20 11 11 13 13 9 9 Gasket 3.3 Gasket 3.3 3.10-5 Compact
Rc1/8 Rc1/4 Pilot port size XLFV Rc1/8: Port 1(P), M5: Port 3(R) M5: Port 1(P), Port 3(R) XLF 0.25 0.45 1.1 1.6 3.0 4.8 10 18 Weight (kg) XLFV 0.29 0.49 1.14 1.66 3.06 4.86 10.1 18.1 Note 1) Conductance is the value for an elbow with the same dimensions.