Manifold Specifications

One-touch fitting type) VFN n: Stations L Stations 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8 155 164 9 172 181 10 189 198 11 206 215 12 223 232 13 240 249 14 257 266 15 274 283 16 291 300 Formula 17n + 19 17n + 28 L1 L2 With attachment plug lead wire: VV5ZS2-51GStation 1Port size 4-4.5 mounting hole Manual override Indicator light U side (n) (2) (1) Stations D side 2-C4, C6

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail mount type [-D] and connector top entry [-JU].

Intrinsically Safe Valve

The safety barrier must meet the specifications listed in the Installation Instructions section. 14 Series 53-SY5000/7000 Manifold Specifications 53-SS5Y5-20 53-SS5Y7-20 Model 53-SY520 53-SY720 Applicable valve Manifold type Single base B mount P (SUP)/R (EXH) Common SUP/EXH Valve stations 2 to 20 stations Note 1) A, B port location Valve 1/4 P, EA, EB port 1/8 C4 (4 One-touch fitting) C6

ARM10/11

manifold options, please refer to pages 14-4-34 to 14-4-38.

ARM10/11

manifold options, please refer to pages 14-4-34 to 14-4-38.

Table of Contents

Refer to pages 16-14-3 to 16-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-111 to 16-1-13 for Precautions on every series.

Compact manifold regulator ARM5 Series

L1=(14 x n)+36 10 16 14 10 14 Y W Pressure gauge (Accessory) V X 2 x 4.3 L3=50+R+V L4=50+T+X H H L L S S O O M4 thread hole U U C C P P K K 50 SMC 25 S T R L2=(14 x n)+29 29 55 (Max. 58) Note) U IN IN IN 33 15 14 Note) Max. dimension is the size when the knob is unlocked.

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

Serial Transmission System Series EX250 Series EX500

For details, please refer to page 14. DeviceNet DeviceNet CC-Link CC-Link PROFIBUS-DP PROFIBUS-DP Remote I/O AS-i CANopen Nil +COM. COM.

Compact Manifold Regulator

H L 7 26 (Max. 28) 12 7 IN OUT 12 Panel cutout dimensions 28 ARM10F1-06GPC 08GPC 4 x R1 or less 28 to 28.5 IN OUT 38 58 34 23 20 Plate thickness: Max. 2.1 30 15 6 OPEN 34 14 0.6 0.4 0.2 0.8 1 0 MPa 62 SMC P K U C S O H L 7 26 (Max. 28) 7 IN OUT 12 744 Regulator/Single Unit Type Options Pressure Gauge One-touch Fittings for Regulator VVQ1000-50A C4 Part no.

Secondary Batteries

Port size Size Applicable body size 650 850 Symbol 10 14 20 1 1 1 2 2 *Specifications and dimensions for the 90-series are the same as standard products.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

(For 4) C6 (For 6) C8 (For 8) Side P kit: Flat ribbon cable 26P 1 to 12 stations 35 580 20P 1 to 9 stations C10 (For 10) 10-SQ231 J kit: Flat ribbon cable PC wiring system compatible 10-SS5Q23-1 to 8 stations 35 580 C4 (For 4) C6 (For 6) C8 (For 8) Note 2) Top 1 to 12 stations L.

Digital Flow Switch (Integrated display type)

PFM7-C4/C6/C8/N7--X693 PFM7S-C4/C6/C8/N7--X693 PFM7-01/02--X693 PFM7S-01/02--X693 -73No.PF-OMJ0006-J PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 PFM7-01/02--X694 PFM7S-01/02--X694 -74No.PF-OMJ0006-J For a mixture of Argon (Ar) and carbon dioxide (CO2) The mixture ratio can be selected from Ar : CO2 = 92 : 8, 90 : 10, 80 : 20, 70 : 30 or 60 : 40.

Rubber Seal, 5 Port Solenoid Valve, Series SZ3000

14 10 210.5 200 181 15 11 223 212.5 191.5 16 12 235.5 225 202 17 13 248 237.5 212.5 18 14 248 237.5 223 12.5 15 260.5 250 233.5 13.5 16 273 262.5 244 14.5 L1 L2 L3 L4 External pilot manifold L: Dimensions n: Stations (n1 + n2) L n 2 135.5 125 107.5 14 3 148 137.5 118 15 4 160.5 150 128.5 16 5 173 162.5 139 17 6 173 162.5 149.5 12 7 185.5 175 160 13 8 198 187.5 170.5 14 9 210.5 200 181 15

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

(max. 20 stations) 3 SX3000 5 SX5000 Connector mounting position Symbol Mounting position U U side D D side Valve stations A, B port size Note Symbol 02 Stations SX3000 SX5000 2 stations Port size 4 One-touch fitting 6 One-touch fitting Mixed Symbol Port size 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Mixed Symbol C4 C6 M Double wiring specification C4 C6 C8 M 08 02 8 stations

CRB2/CRBU2/CRB1

NBR 14 Holding rubber Parts list No.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) Q M N Size (mm) d 10 Size M3 8.5 9.5 3.4 15 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 A port B port A port B port Q N 30 30 5.5 M5 15.5 14 (Standard) (Altered) M 40 40 M5 21 20 5.5 (Top view from long shaft side) 11-2-34 34 Made to Order Series CRB2 Symbol: C3 Symbol: C4 Change the position

Table of Contents

This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) Q M N Size (mm) d 10 Size M3 8.5 9.5 3.4 15 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 A port B port A port B port Q N 30 30 5.5 M5 15.5 14 (Standard) (Altered) M 40 40 M5 21 20 5.5 (Top view from long shaft side) 11-2-34 34 Made to Order Series CRB2 Symbol: C3 Symbol: C4 Change the position

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

This specification is not available for the rotary actuator with auto switch unit. 3-d Body (B) (mm) Q M N Size (mm) d 10 Size M3 8.5 9.5 3.4 15 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 A port B port A port B port Q N 30 30 5.5 M5 15.5 14 (Standard) (Altered) M 40 40 M5 21 20 5.5 (Top view from long shaft side) 11-2-34 34 Made to Order Series CRB2 Symbol: C3 Symbol: C4 Change the position

Proposals for Energy Saving

L1 Low noise nozzle with male thread/KNS (mm) Model Nozzle size D Connection size L1 A Width across flats H1 0.75 x 4 1 x 4 0.9 x 8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/8 R 1/8 R 1/8 R 1/4 R 1/4 R 1/4 R 1/4 12 12 12 14 14 14 14 18 18 18 20 20 20 20 14 14 14 14 14 14 14 KNS-R01-075-4 KNS-R01-100-4 KNS-R01-090-8 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 D 2 H1 A L1 Connection