Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

x 0.8 x 10L (Hexagon socket head cap bolt) 2-M5 x 0.8 (Through-hole) (Z) 2M5 x 0.8 thread depth 4.5 Note) 30 4M4 x 0.7 thread depth 5 (Opposite side: Same) (Opposite side: Same) 4M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 5 10 10 8 46 2M4 x 0.7 thread depth 6 (30) (Z) 2-M5 x 0.8 thread depth 8 5 450.2 8 Note) 11-, 22: Vacuum suction port Vacuum air from 2 ports on both

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

AS121FG-M5-23 AS121FG-U10/32-01 9.6 25.8 12.3 28.6 8 7 12.7 17.3 22.1 8.4 8.4 3.2 M5 0.8 25 1/8" 22.2 12.3 17.3 22.1 12.7 AS221FG-01-23 AS121FG-U10/32-03 14.2 31.1 14.3 36.1 12 16 12.7 20.4 27.5 9.3 9.3 3.2 32.1 5/32" 27.1 R 1/8 8 10-32 UNF 28.6 25.8 25 22.2 7 9.6 AS121FG-M5-04 AS121FG-U10/32-05 21.3 26.1 12.3 12.7 17.3 22.1 9.3 11.4 4 3/16" 16.5 M5 0.8 11.7 9.6 25.8 28.6 8 7 25 22.2 AS121FG-M5

HRX-OM-S004

HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity . 8-14 8.5.1 HRS100/150-A/W-20/40/46. 8-14 8.6 Types of Hazard Labels (HRS--40/46-) . 8-15 8.6.1 Positions of danger warning label . 8-16 8.7 Standards . 8-17 8.8 Sample DoC. . 8-18 8.9 Daily Check Sheet . 8-19 Chapter 9 Product Warranty

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

PPS PTFE PFA N Pilot port thread type Symbol Nil 2 Body class 6 one-touch fitting M5 x 0.8 Tubing O.D. Body class 2 3 4 5 Tubing O.D. Symbol Metric sizes 06 10 12 19 6 10 12 19 Inch sizes 07 11 13 19 1/4 3/8 1/2 3/4 Variations LVD20-T Model LVD30-T LVD40-T LVD50-T Orifice diameter 4 8 10 16 Tubing O.D. Metric 6 10 12 19 Inch Valve type Type Symbol 1/4 3/8 1/2 3/4 Basic type N.C.

MHF2

62 174 2-M6 x 1 thread depth 6 Mounting thread 33 144 E 13 25 25 30 41 E 4-5.2 through (mounting hole) 0 -0.1 32 46 1.2 46 1.2 Finger opening port M5 x 0.8 Finger closing port M5 x 0.8 4-10 +0.1 0 Close: 0 E-E Open: 801 8-M4 x 0.7 thread depth 4 Attachment mounting thread 128 Mounting thread 4-M6 x 1 thread depth 6 52 24 Groove for auto switch mounting 2.3 4 2-3H9 +0.025 0 depth 3 6 30 8

CA2

JIS B4636 + Two-angle socket 19 2.

MGQ

, 40, 50, 75, 100, 125, 150, 175, 200 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 26 64 17 10 19 52 74 2 8.5 4 46 36 72 8 30 10 60 37 13 18 47 8 M5 x 0.8 13 M5 x 0.8 7 M5 x 0.8 Rc 1/8 10.5 32 76 21 10 21 62 88 2 9 2 56 42 86 8 38 12 70 37.5 14 26 47.5 9 M6 x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E

Modular Type Filter Regulator Series AW

75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4

SYA3000/5000/7000

M5 x 0.8 0.42 0.47 0.13 0.47 [0.44] 0.41 [0.37] 0.13 [0.12] 3 position 39 0.50 [0.41] 0.48 [0.35] 0.15 [0.11] 0.47 0.43 0.13 44 46 Single Double 2 position 0.29 0.18 0.64 0.34 0.72 0.17 0.28 0.15 0.59 0.30 0.59 0.15 C4 Closed center Exhaust center Pressure center 48 SYA320-C4 M5 x 0.8 M5 x 0.8 One-touch 0.35 0.16 0.42 [0.41] 0.34 [0.37] 0.63 0.11 [0.11] 3 position fitting for 4 0.76 [0.46

5 Port Air Operated Valve SYA3000/5000/7000 Series

M5 x 0.8 0.47 0.13 0.47 [0.44] 0.41 [0.37] 0.13 [0.12] 0.42 3 position 39 0.50 [0.41] 0.15 [0.11] 0.47 0.43 0.48 [0.35] 0.13 44 46 Single Double 2 position 0.72 0.18 0.64 0.34 0.29 0.17 0.59 0.15 0.59 0.30 0.28 0.15 Closed center Exhaust center Pressure center C4 48 SYA320-C4 One-touch M5 x 0.8 M5 x 0.8 0.63 0.16 0.42 [0.41] 0.34 [0.37] 0.35 0.11 [0.11] 3 position fitting for 4 0.76 [0.46

MB

+0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 0.10 0.30 +0.30 +0.10 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 40 14 19 24 26 26 36 20 22 28 40 40 46 30 40 50 60 60 92 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2.0 12 16 19 24 34 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M27 x 2 10 11 14 20 20 27 16 19 24 34 34 42 10 10 14 22 22 25 10 10 14 22 22

10

Bore size [mm] E1 L1 MM R1 U1 NDH10 NX NZ I-03M 32 40 14 20 30 M10 x 1.25 12 16 10 +0.058 0 14 0.10 0.30 I-04M 40 50 19 22 40 M14 x 1.5 12.5 19 10 +0.058 0 14 0.10 0.30 I-05M 50, 63 64 24 28 50 M18 x 1.5 16.5 24 14 +0.070 0 20 0.10 0.30 I-08M 80 80 26 40 60 M22 x 1.5 23.5 34 22 +0.084 0 30 0.10 0.30 I-10M 100 80 26 40 60 M26 x 1.5 23.5 34 22 +0.084 0 30 0.10 0.30 I-12M 125 119 36 46 92 M27

Transfer

NN NN MM MM KK LL KK LL 2 x PA (Port for operating cylinder) J I J 2 x PA (Port for operating cylinder) F F F 76.5 91 110 H 73 88 106 J 40 46.5 55 K 46 58 68 M 13 15 19 N 16 15 19 O 18.5 19.5 21.5 F 93.5 107.5 130.5 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 M 30.9 32.4 41.5 N 16 15 19 Applicable cylinder ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 KK 15 16 17.5

CLK1

Weight BAP1-063 BAP2-063 0.03 8 Series CLK1P/CLK1G Construction CLK1P40, 50, 63/With Magnetic Field Resistant Auto Switch Types D-P7, D-P8 Clamp side lock (B) Unclamp side lock (F) Parts list No. 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 No. 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 Description Material Description Material Note Note Free-cutting

MHF2

3 4 15 5 15 5 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 52 12-3-18 19 Series MHF2 Low Profile Air Gripper Dimensions MHF2-16D1 4H9 +0.030 0 depth 3 60 4H9 +0.030 0 depth 3 MHZ MHF MHL 2-M5 x 0.8 thread depth 12 MHR Mounting thread 6 79.5 5 MHK MHS M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Finger closing port Mounting thread MHC 26 74 10.6 MHT E

MHF2

M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port DE-E Open: 321 2058 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread depth 4 Attachment mounting thread Mounting thread 20 43 Auto Switch Mounting Groove Dimensions 2-3H9 +0.025 0 depth 3 2.2 18 5.5 18 5.5 4 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 74 12-3-19 20 Series MHF2 Dimensions MHF2-16D2 4H9

MLU

22 27 MLUB25 MLUB32 MLUB40 MLUB50 M5 x 0.8 73 87 87 102.5 M5 x 0.8 depth 7.5 M6 x 1 depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 54 68 86 104 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc

VK300

: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed hole) 50.4 (P, A, R port) 2 x M5 x 0.8 24 21 3R 1P 62.8 2.3 Refer to grommet type for other dimensions. [ ]: For port size 01 Dimensions

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

www.stevenengineering.com Width across flats 3 Width across flats 8 A 17 2-M5 x 0.8 (Plug: M-5P) 11 H 26.7 M6 x 1 10.5 5.5 35 34 8.5 A 30 4-M6 x 1 4-M5 x 0.8, depth 7 Bottom hole diameter 5.1 19 6.5 W 32 0.05 46 0.5 0.05 8 B D Piping port 2-M5 x 0.8 47 13 J Mounting base side B D 16.5 14.5 Across AA MXP16-30 Without magnet and switch rail 2-M3 x 0.5, depth 3.5 For rail mounting 8 2-M2 x

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16