Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

Vacuum

Flat with rib Male Thread/Weight List 1 0 12 21 29l 46 20 25 72 3 1 . 7 1 3 1 5 21 29.! 46 20 25 72 1 . 8 1 6 1 8 12.121.5130r 46.4 20 67t 25 72: 26 29 3 l 29 29 30 ZPR16 31 57 61 68 Applicable Tube 64 64 65 68 69 67 70 '5h2" tube may be substituted for4mm.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

9.5 2 x 4.3 (Mounting holes) Manual override 60.3 37.2 8.3 48 M5 x 0.8 (External pilot port) 15.5 15.5 4 Insulation Black () B A 17.5 A B 35 X P EB EA Insulation Red (+) E P 17 4.3 56 17 M5 x 0.8 (Pilot EXH. port) 65 62.5 109.1 66.5 (For E type) L (Lead wire length) 0.3 mm2 1.55 22 9.5 18 18 5 x 1/4" (Piping ports) 28 L plug connector with cover (LL) 52-SY5140 (

CQS

) LS B 20 20 29 29 A 32 32 41 44 LS 50.3 50.3 62.7 66.2 B 10 10 17.5 17.5 A 22 22 29.5 32.5 LS 40.3 40.3 51.2 54.7 B 5 5 7.5 7.5 A 17 17 19.5 22.5 12 16 20 25 35.3 35.3 41.2 44.7 35 to 100 35 to 100 75 to 200 75 to 300 5 to 30 5 to 30 5 to 50 5 to 50 A + Stroke LS + Stroke CUJ Bore size (mm) L Y X LZ LY LX LT LH LG L1 LD CU 12 16 20 25 4.5 5 5.8 5.8 8 8 9.2 10.7 44 48 62 66 29.5 33.5 42 46

Series VQ Metal Seal/Rubber Seal Body Ported

The minimum order quantity is 10 pcs. 16 16 18 31.5 32 35 5 6 8 KQP-23-X19 KQP-04-X19 KQP-06-X19 3.2 4 6 Silencer AN103-X233 This silencer is to be inserted into the EXH port (One-touch fittings) of the common exhaust type.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

18 Guide Cylinder Series MGG Construction 20 to 50/MGG #8 !

LEC-OM02904

E7 1A E8 20 2 E9 OFF 21 3 EC 2 24 ED 25 30 (1) (1) (1) 31 32 33 34 1 (2) 35 36 2 37 3D 45 (1) (1) (1) 46 (1) (1) (1) 47 50 1 (1) (1) (1) 51 2 (1) (1) (1) 52 82 /1 (2) 8A USB 8E USB 888 1. 30 2. 8 2 8 8.2 (25) 30 (30) (45) (46) 1(50) 2(51) OFFONCPU 8.1 (ALM) No.

MLGP

C0.2 (2) B 0.2 A 0.2 Hexagon socket head cap screw D Bore size (mm) A (mm) B (mm) C (mm) MLGPM MLGPL 54 12 14 72 20 M5 x 0.8 24 64 15 18 82 25 M6 x 1.0 30 78 18 22 98 32 M8 x 1.25 34 86 18 22 106 40 M8 x 1.25 40 110 22 27 130 50 M10 x 1.5 46 124 22 27 142 63 M10 x 1.5 58 156 28 33 180 80 M12 x 1.75 54 188 33 39 210 100 M14 x 2.0 62 9-11-5 5 Series MLGP Specific Product Precautions 3 Be sure

MLGP

C0.2 (2) B 0.2 A 0.2 Hexagon socket head cap screw D Bore size (mm) A (mm) B (mm) C (mm) MLGPM MLGPL 54 12 14 72 20 M5 x 0.8 24 64 15 18 82 25 M6 x 1.0 30 78 18 22 98 32 M8 x 1.25 34 86 18 22 106 40 M8 x 1.25 40 110 22 27 130 50 M10 x 1.5 46 124 22 27 142 63 M10 x 1.5 58 156 28 33 180 80 M12 x 1.75 54 188 33 39 210 100 M14 x 2.0 62 9-11-5 5 Series MLGP Specific Product Precautions 3 Be sure

MLGP

C 0.2 B 0.2 A 0.2 Hexagon socket head mounting screws D Bore size (mm) A (mm) B (mm) C (mm) MGPM MGPL W 20 12 54 14 M5 x 0.8 24 72 25 18 15 M6 x 1.0 64 82 30 B 32 22 18 M8 x 1.25 98 34 78 A A 40 18 22 40 86 M8 x 1.25 106 50 22 110 27 M10 x 1.5 46 130 B W 63 27 22 M10 x 1.5 124 142 58 B: Retraction locking F: Extension locking 80 33 28 M12 x 1.75 180 54 156 100 33 39 62 188 M14 x 2.0 210 23

MLGP

C 0.2 B 0.2 A 0.2 Hexagon socket head mounting screws D Bore size (mm) A (mm) B (mm) C (mm) MGPM MGPL W 20 12 54 14 M5 x 0.8 24 72 25 18 15 M6 x 1.0 64 82 30 B 32 22 18 M8 x 1.25 98 34 78 A A 40 18 22 40 86 M8 x 1.25 106 50 22 110 27 M10 x 1.5 46 130 B W 63 27 22 M10 x 1.5 124 142 58 B: Retraction locking F: Extension locking 80 33 28 M12 x 1.75 180 54 156 100 33 39 62 188 M14 x 2.0 210 23

High Vacuum Angle Valve

(Refer to page 18.) * Standard lead wire length is 0.5 m. Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

Environment

2 Vertical 18 Max. instantaneous power consumption [W] Note 12) 1275 11LEFS 11LEJS Type Note 13) Non-magnetizing lock Holding force [N] 313 607 1146 2006 313 607 1146 Power consumption [W] at 20C Note 14) 7.9 Rated voltage [V] 24 VDC 0 10% Lock unit specifications 25ALEC Note 1) Please consult with SMC for non-standard strokes as they are produced as special orders.

HRX-OM-Q026

Table 3-1 Weight of the product Weight kg Model Standard model Option A Option T HRSH250/300-AApprox. 280 [Standard model] + 24 None HRSH150/200-AApprox. 215 [Standard model] + 18 None HRSH100-AApprox. 180 [Standard model] + 18 None HRSH150/200/250-WApprox. 180 [Standard model] + 18 [Standard model] + 22 HRSH100-WApprox. 150 [Standard model] + 18 [Standard model] + 52 3.1 Transport HRSH Series

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Clevis Dd9 L m l Knuckle CDP-2A 0.040 0.076 40 10 Polishing ball 10 46 3 38 3 X 18l 4 CDP-3A 0.050 0.093 40, 50, 63 50 12 Polishing ball 12 55.5 3 47.5 3 X 18l 4 CDP-4A 0.050 0.093 63 16 Polishing ball 16 71 4 61 4 X 25l 5 CDP-5A 0.050 0.093 80 18 Polishing ball 18 76.5 4 66.5 4 X 25l 5 CDP-6A 0.065 0.117 80 100 20 Polishing ball 20 83 4 73 4 X 30l 5 CDP-7A 0.065 0.117 100 25 Polishing

Stainless Steel One-touch Fittings Series KG

3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

Series KG Stainless Steel One-touch Fittings

3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 1.5 32 29 30 1 2 KGE16-04 18 44 132 Note) ( ): Values for soft nylon.

Compact 5-Port Solenoid Valve

Symbol Mounting Nil Direct mounting Dm DIN rail mounting 18 18 stations 08 8 stations *1 Double wiring: 2-position single, double, 3-position, and 4-position valves can be used on all manifold stations. The use of a 2-position single solenoid will result in an unused control signal.

CA2

18 18 22 26 40 50 63 80 100 Specifications and dimensions other than the above are the same as the standard type.

OMR0031

Controller Specifications . 15 3.1 Basic specifications . 15 3.2 2 Parts description . 16 3.3 External dimensions . 17 (1) Direct mounting (LATCA-) . 17 (2) DIN rail mounting (LATCA-D). 17 3.4 Mounting . 18 (1) Mounting. 18 (2) Connection to ground . 18 (3) Mounting location. 19 4.