CM2

50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore size (mm) 20 17 36 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 143 156 168 181 206 231 256 25 17 36 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 32 17 36 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 149 162 174 187 212 237 262 40 19 46 41 77 90 102 115 140 165

MGP

17 56 62 81 91 15 17 29 29 3.5 3.5 3.5 4.5 25 27 39 39 41 46 54 64 50 56 72 82 12 16 20 25 37 38 44 50 CY1 16 M5 X 0.8 18 167 167 M6 X 1.0 MY1 26 M6 X 1.0 MGPM(Slide Bearing)/Dimensions A, DB, E MGPL(Ball Bushing Bearing)/Dimensions A, DB, E A E DB A E DB Bore (mm) 100st< 50st< 100st 50st< 100st Bore (mm) 100st< 30st< 100st 30st< 100st 50st 50st 100st< 30st 30st 100st< 12 16 42 46 60.5 64.5

HRX-OM-T002

Required facility water system Table 3-3 Heat radiation Model Heat radiation kW Facility water specifications HRS090-W-20/40/46 Approx. 17 Refer to [9.1 Specifications].

MB

B TA TL TU TC TX TE TO TT TR TS TH TF TDH10 MB-S03 32 40 50 63 80 100 125 32 40 50 63 80 100 125 +0.070 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.084 0 47 60 60 80 80 100 115 46 52 65 75 95 114 136 45 60 60 70 70 90 105 8.5 10 10 15 15 15 18.5 62 80 92 110 130 158 186 50 63 75 90 110 132 160 74 97 109 130 150 184 212 12 17 17 20 20 26 26 13 17 17 22 22 24 24 10 12 12 14 14 17 25 35

HRX-OM-S004

HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity . 8-14 8.5.1 HRS100/150-A/W-20/40/46. 8-14 8.6 Types of Hazard Labels (HRS--40/46-) . 8-15 8.6.1 Positions of danger warning label . 8-16 8.7 Standards . 8-17 8.8 Sample DoC. . 8-18 8.9 Daily Check Sheet . 8-19 Chapter 9 Product Warranty

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

3/8" 36 3/8" 46 24 52 28 23 21 1/2" 44 1/2" 55 29 62.5 39 32 26 3/4" 53.5 3/4" 72 39.5 81 49 46 36 1" 71 17-5-100 5 Series LQ1 High Purity Fluoropolymer Fittings Female Connector: LQ1H-F Metric sizes Connection threads Rc/NPT Model Applicable tubing O.D.

ZP

14 17 8 Buffer assembly part no.

REA/REB

REAH20 REAH25 42 19 M5 x 0.8 8 71.5 106 44 M5 x 0.8 17 33.5 33.5 45 46 97 26.5 21 50 8 23.5 M5 x 0.8 48.5 75.5 108 53 16 M5 x 0.8 41.5 22 54 42.5 26.5 102.5 58.5 28 M6 x 1.0 10 86 138 56 M6 x 1.0 25 46 46 61.5 63 125 29 24 TW S XB Z ZZ W PA PB PP P Model N NL NT REAH15 REAH20 REAH25 161 65 17.5 194 21 88.5 62 8 M5 x 0.8 50 15 16.5 70 169 92.5 205 19.5 50 65 23 Rc 1/8 18 15 8 209 75 23.5

REA/REB

27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc 1/4 70 43 16 29 50 16 92 11 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150 60 40 182 10 19 REA50/63 14 2 -Rc 1/4 L 0 0.2 NA 33 14 E (h8) E (h8) I X D 4-TC Effective thread depth R 14 8-Q Effective thread

Table of Contents

06 10 06 10 90 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 107 06 10 94 M6 x 1 Depth 7.5 39 50 0 77 74 59 175 128 3/4, 1 46 06 10 111 14-3-9 10 Series AV2000/3000/4000/5000 Connecting Spacer for Modular Style F.R.L.

ZP

H: M5 x 0.8 H: M6 x 1 Y Model A B C D E F G G Flat Flat with ribs C Y A B Model ZPR10UT 10 11 1 U C U C U C ZPR10 10 1.7 12 12 15 5 6 21 29.9 46 3 ZPR13UT 13 14 ZPR13 1.8 13 1.5 ZPR16UT 16 17 ZPR16 18 16 12.5 21.5 30.4 46.5 3.5 1.2 2.5 ZPR10CT 10 11 0.8 Deep ZPR13CT 13 14 1 ZPR16CT 16 17 H: M5 x 0.8 H: M6 x 1 Model A B C D E F Y G G Dimensions of D are the same.

Air Cylinder Series CS1

161 128 0 0.2 +0.3 +0.1 +0.100 0 32 40 80 56 53 20 40 90 59 43 14 17 36 80 39 36 Up to 1200 M16 x 1.5 M36 x 1.5 182 144 18.5 0.1 0.3 +0.3 +0.1 +0.100 0 100 40 50 63 60 23 45 70 48 17 20 41 90 39 44 Up to 1200 M18 x 1.5 M40 x 1.5 204 162 115 18.5 0.1 0.3 +0.3 +0.1 +0.100 0 100 50 40 63 60 25 50 74 48 17 20 46 90 39 44 Lube Non-lube Up to 1200 M20 x 1.5 M45 x 1.5 226 182 115 18.5 0.1 0.3 +

24

[mm] Bore size [mm] Reduction rate [%] Weight [kg] Bore size Guide rod Shortened by New dimension Projection Shortened 12 11 0.25 32 40 50 63 80 100 22 22 18 18 10.5 10.5 15.5 9 16.5 11.5 8 10.5 : Compared with the slide bearing type, 25 stroke (32 to 100) (No projection for 12 to 25-25 stroke) 16 3 0.37 20 12 0.59 25 12 0.84 32 17 1.41 40 16 1.64 50 17 2.79 63 17 3.48 80 17 5.41 Guide rod

LX

Terminal part no. 1 10 2 11 3 12 4 13 5 14 6 15 7 16 8 17 9 18 A mark is located on the connector number 1 side. 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 LJ1 LG1 LC1 LX LC6D/LC6C Switches View from the insertion side View from the wiring side Switches Home position switch: This switch indicates the home position. Connect this switch when returning to the origin point.

Modular Design with Uniform Body Style

v*17 v*17 v*17 v*17 ZA*16 Digital pressure switch: With unit selection function *18 *18 *18 *18 *18 *1 Drain guide is NPT1/8 (applicable to the AC20-D) and NPT1/4 (applicable to the AC30-D to AC60-D).

Electric Actuator with Integrated Guide

RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed. Can designate 8 types of programs with a total of 3 bits. (Set by the binary system.)

JXCx-OMT0023

PD ) 4 -46 4.4.1 Parameter list 4 -46 4.4.2 List of details 4 47 4.4.3 Using forward/reverse rotation stroke end to change the stopping pattern 4 58 5.

Air Slide Table

29 6 A B NN x M6 x 1 Tapped through hole 5H9 depth 5 +0.030 0 HA GA Section AA Section BB (mm) ZZ 108 108 108 118 136 169 226 254 282 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 K 31 41 51 61 71 96 121 146 171 J 46 46 46 56 72 100 155 190 215 I 16 16 16 16 18 23 25 18 21 NN 2 2 2 2 3 3 4 4 4 H 46 46 46 56 56 56 59 62 G 22 22 22 22 17 18 37 56

DOC1003626

,C 0x00,0x0C Information of register to write 0x0002 0,0,0,2 0x00,0x02 Checksum ASCII:LRC RTU:CRC E,B 0xC8,0x08 Trailer CR/LF None Total quantity of byte 17 8 3.11 Explanation of function codes HRS400-A-46 3-14 DOC1003626 Chapter 3 Serial communication 3.11.3 Function code: 16 Writing multiple registers Register data of assigned points from assigned address is written.

MY1

. 16.5) 8 (Max. 20) 9 (Max. 25) 3.2 3.5 4.5 4.5 13 13 17 17 45.6 53.5 67 81.5 5.8 6.5 8.5 9.5 43 49 61 76 6 7 9 10 12 15 MY1B25 MY1B32 MY1B40 12 16 16 56 56 46 43 33 43 With high load shock absorber + Adjusting bolt TT h MY1B H Stroke Bore size E F TT EA h EB W FW Stroke adjusting unit FB S (Shock absorber stroke) T FC Shock absorber a 2.8 15.4 Workpiece EC EY FH Since the dimension EY of