RZQ

RB RZQ Mounting Bolt J C CR D 110 135 160 120 145 170 130 155 180 135 160 185 CH Model RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75Mounting bolt M5 x 110l M5 x 135l M5 x 160l M5 x 120l M5 x 145l M5 x 170l M6 x 130l M6 x 155l M6 x 180l M8 x 135l M8 x 160l M8 x 185l D9.5 8 -X 10 8.5 20Data 16.5 11.5 3 17.5 12.5 3.5 10-10-5 6

TABLE OF CONTENTS

48.0 82.0 38.0 15-17040-14 15-17040-15 15-17040-16 15-17040-17 15-17039-14 15-17039-15 15-17039-16 15-17039-17 *15-17034-14 *15-17034-15 *15-17034-16 *15-17034-17 100 240 277 141 260 91.0 220 255 127 240 68.0 165 180 102 175 15-17040-18 15-17040-19 15-17040-20 15-17040-E17 15-17040-E21 15-17039-18 15-17039-19 15-17039-20 15-17039-E17 15-17039-E21 *15-17034-18 *15-17034-19 *15-17034-20 *15

IDG

With float type auto-drain With drain guide Port size A B C D E J K L M N F G H Model P IDG3M/3HM/5M/5HM IDG10M/10HM 157 201 226 150 146 56 87 196 162 158 99 1/8, 1/4 5.5 66.5 35 210 196 15 9 IDG20M/20HM 1/4, 3/8 205 201 66 130 209 13 12 223 209 IDG30M/30HM 162 158 87 6 78 40 20 303 IDG30LM 149 145 56 86 196 9 210 196 5.5 7 5.5 70 95 70 35 50 35 15 22 15 IDG50M/50HM 3/8 177 172 80 87 241

MGQ

, 40, 50, 75, 100, 125, 150, 175, 200 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 26 64 17 10 19 52 74 2 8.5 4 46 36 72 8 30 10 60 37 13 18 47 8 M5 x 0.8 13 M5 x 0.8 7 M5 x 0.8 Rc 1/8 10.5 32 76 21 10 21 62 88 2 9 2 56 42 86 8 38 12 70 37.5 14 26 47.5 9 M6 x 1.0 15 M6 x 1.0 8 M6 x 1.0 Rc 1/8 11.5 MGQM (Slide bearing) A, DB, E Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E

Slider Type Ball Screw Drive/11-LEFS Series

10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Solid State Auto Switches

x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 ( ): Denotes the values of D-A44C Dimensions (mm) D-A3C D-A44C 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland G 1/2 G 1/2 4 x Z 4 x Z (Applicable cable O.D. 6.8 to 9.6) (Applicable cable O.D. 6.8 to 11.5) Hexagon socket head cap bolt Hexagon socket head cap bolt Indicator

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

125

A B 54 38 30 Sol.a 2A VEX3221: M5 VEX3222: None (Port PA/Pilot air) 2 x 4.5 (For mounting) 4 40 58.6 96 86.2 M plug connector 79 (Light/surge voltage suppressor) Grommet L plug connector Manual override + + 69.4 58.1 38.8 12 24 M5 (Port PE/Pilot exhaust) 23.5 46 1 48 58.6 Silencer (for PE) (Option) Caution DIN terminal (D) How to Use DIN Terminal Connector Refer to page 1739.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 4 2.5 1 4 1 4 3 8 KFF04-02 KFF06-02 KFF06-03 KFF08U-02 KFF08N-02 KFF10U-02 KFF10N-02 KFF12U-02 KFF12N-02 10 33.5 17 17 19 26.8 15 15 17 15.5 1.5 1.6 25 27 30 33.2 26.5 15.2 3 6 6 4 12 35.2 28.5 5 6 4 5 5.5 6.5 7 8 11 17 21 30 35 45 1 4 14 17 33.2 26.5 15 16.2 8 28 10 6.5 7.5 1 4 32 17 17 34.8 27.5 15 18.8 12 8 9 35 36 1 4 17 19 35.3 28.5 15 19.3 98 Series KF Insert Fittings Bulkhead

CLK1

15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

1.63

24 26 35 35 44 48 123 146 178 193 247 274 108 128 156 172 220 248 126 146 176 192 240 266 76 92 112 128 168 196 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 9 9 12 12 15 15 20 20 20 23 25 27 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 13 15 20 20 22 22 5.4 5.4 6.7 6.7 8.6 8.6 9.5 9.5 11 11 14 14 30.5 36.5 40.5 46.5 54.5 68.5 NPT1/8 NPT1/8 NPT1/8 NPT1/8 NPT1/4 NPT1/4 G1

HRX-OM-Q026

Ambient temperature (C) Recommended circulating fluids 10 to 45 Tap water, ethylene glycol aqueous solution 15(wt)% -5 to 10 Ethylene glycol aqueous solution 15(wt)% -20 to -5 Ethylene glycol aqueous solution 40(wt)% Circulating fluid temperature(C) Recommended circulating fluids 10 to 35 Tap water, ethylene glycol aqueous solution 15(wt)% 5 to 10 Ethylene glycol aqueous solution 15(wt)%

PSxx-OMM0006CN

) NPT1/8 (M5 ) C3602() O HNBR 45 g 46 g -62No.PS-OMM0006CN-E (M8(3 )71 ) 01/N01 5 4 M5/C4/C6 M5 5 -63No.PS-OMM0006CN-E W1/WF1 4 ( ISO228-1) -64No.PS-OMM0006CN-E A 01/N01 W1/WF1 -65No.PS-OMM0006CN-E B W1/WF1 -66No.PS-OMM0006CN-E D 01/N01 W1/WF1 -67No.PS-OMM0006CN-E 01/N01 W1/WF1/M5/C4/C6 -68No.PS-OMM0006CN-E + 01/N01 W1/WF1/M5/C4/C6 -69No.PS-OMM0006CN-E 36n +4n -1 -70No.PS-OMM0006CN-E

Transfer

NN NN MM MM KK LL KK LL 2 x PA (Port for operating cylinder) J I J 2 x PA (Port for operating cylinder) F F F 76.5 91 110 H 73 88 106 J 40 46.5 55 K 46 58 68 M 13 15 19 N 16 15 19 O 18.5 19.5 21.5 F 93.5 107.5 130.5 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 M 30.9 32.4 41.5 N 16 15 19 Applicable cylinder ML2B25 ML2B32 ML2B40 Applicable cylinder ML2B25 ML2B32 ML2B40 KK 15 16 17.5

VKF300

Proper tightening torque Nm {kgfcm} Tightening torque for piping Connection threads M5 Rc(PT) 1/8 1.5 to 2 {15 to 20} 7 to 9 {71 to 92} Reference: Tightening into the M5 fitting threads After tightening by hand, tighten about 1/6 of a turn further using a tightening tool.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5

VCL

M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101