Intrinsically Safe Valve

) 21 4 Insulator: Black () B A 23 PE 38 46 A B X Insulator: Red (+) Manual override EB EA P 21.5 21 69 6.4 67.2 123.3 M5 x 0.8 (Pilot EXH port) 71.2 (E-type) L (Lead wire length) 0.3 mm2 1.55 26.5 11.5 13.5 20.5 20.5 5 x 3/8", 1/4" (Piping port) 33 L-type plug connector with cover (LL) 53-SY7140(R)-LL02 03 L (Lead wire length) 118.2 Insulator: Red (+) Insulator:

High Vacuum Angle Valve, XL Series

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

ZR

PE port Vacuum release pressure port M5 PD port Ejector unit Non-locking push type Manual override EXH PE PE 109 PD PD PD PD 80.8 81.5 PS PS PV PV 61.5 52 50 13.5 PS PD 42 35.5 33 31.5 28 PV 17 16.5 PV PV Release flow rate adjustment needle Vacuum release pressure port M5 PD port Pilot valve supply pressure port M5 PS port 3 2.5 1 1.5 7.5 7.5 4.5 2-Rc 1/2 EXH port 2-M5 PD port Air supply

51

14 18 18 22 26 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 6 7 7.5 7.5 12 12 16 16 26 31 38 47 58 72 89 110 M4 x 0.7 M8 x 1.25 24 29 35.5 44 55 69 80 100 M5 x 0.8 57 60 62 62 84 84 104 105 Width across flats 6 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 M5 x 0.8 Width across flats 8 length 3.5 Up to 300 M5 x 0.8 M10 x 1.25 Rc1

Auto Switch Guide

x 0.8 x 16 MVGQ M5 x 0.8 x 20 CC M5 x 0.8 x 25 Dimensions ( ): Denotes the values of D-A44C RB D-A3C D-A44C 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland J D-X G 1/2 G 1/2 Applicable cable O.D. 6.8 to 9.6 Applicable cable O.D. 6.8 to 11.5 20Hexagon socket head cap bolt Hexagon socket head cap bolt Data Indicator

PSxx-OMU0002CN

-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch

Table of Contents

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

JXCx-OMT0023

9, 10, 12) 25 Proximity dog 10m max.

Stainless Steel One-touch Fittings Series KG

Nylon Urethane KGW04-M5 KGW04-01 8 32 38.5 18 30 37.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 33.5 42.5 30.5 40 8 8 3.0 3.0 1 8 10 6 17 12.8 20 10 1 4 KGW06-02 46 46.5 10.9 10.9 17 14 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 47 51 43.5 49.5 12 30 47 8 18.5 20.5 14.2 15.2 14 12 23 3 8 KGW08-03 17 51.5 52.5 74

Auto Switch Guide

x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 Dimensions ( ): Denotes the values of D-A44C D-A3C D-A44C 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2-M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland G 1/2 G 1/2 Applicable cable O.D. 6.8 to 9.6 Applicable cable O.D. 6.8 to 11.5 Hexagon socket head cap bolt Hexagon socket head cap bolt Indicator light Most sensitive

/

Q R R 53.5 56.5 56.5 59 59 R 69.5 72.5 72.5 75 75 M 12.8 19 23 19 23 Q 42 52 55 58 61 S Q 41 51 54 57 60 S K 6 8 8 8 8 J M4 M5 M5 M5 M5 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 46 56 59 62 65 30 40 45 50 45 50 18 22 30 22 30 68 78 85 85.5 92 9 10.5 14 10.5 14 19.5 27 30 33 33 36 36 48.5 51.5 51.5 54 54 41 51 54 57 60 65.5 68.5 68.5 71

Series KG Stainless Steel One-touch Fittings

Nylon Urethane KGW04-M5 KGW04-01 8 M5 0.8 32 38.5 18 30 37.5 11 3.0 3.0 8 10.4 1 8 4 16 23 M5 0.8 14 10 10 4.0 4.0 1 4 KGW04-02 43.5 42.5 38 11 26 KGW06-M5 KGW06-01 33.5 42.5 30.5 40 8 3.0 3.0 8 1 8 10 6 17 20 12.8 10 1 4 KGW06-02 46 46.5 17 14 10.9 10.9 41 3 8 KGW06-03 48 48 67 1 8 1 4 KGW08-01 KGW08-02 47 51 43.5 49.5 12 30 47 8 14 18.5 20.5 14.2 15.2 12 23 3 8 KGW08-03 17 51.5 52.5 74

CV/MVGQ

28 32 14 24 1.6 4.5 8 4 14 84 12 M8 x 1 72 15 M4 x 0.7 9.5 60 34.5 12.5 52.5 28 42 20 33 2.3 5.5 8 5 20 85 18 M10 x 1 73 15 M5 x 0.8 9.5 61 40.5 12.5 52.5 10-15-15

Compact Rotary Actuator Series CRQ2

37 6.5 33.5 65h9 67h9 32H9 9 22H9 10 4.5 3 6.5 17 8.6 14 8.5 85.4 80 14 38 22 19 6 15.5 63 37.5 100 50 10 37.5 75h9 77h9 35H9 10 26H9 12 5 3 7.5 20 10.5 18 10.5 D(mm) JC JD JJ JU P Q S SD SE SF SU UU WA WB WC WD WE WF XA XB XC YA YB YC Size 10 20 30 50 M 8 x 1.25 12 M5 x 0.8 M 8 x 1 M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1

EX120/121/122

NS Power source connector Note 1) 88 68 68 88 12 12 COM D COM C COM B COM A 24VDC COM D COM C COM B COM A 24VDC Branch connector Note 2) Branch connector Note 2) Marker: BN-WH (Made by Phoenix Contact) Marker: BN-WH (Made by Phoenix Contact) 160 136 160 136 93.5 or less 48.8 48.8 46 46 10 10 Note 1) Power supply connector specification (M12, 5 pins, plug) Note 2) Branch connector specification

Rotary Clamp Cylinders

Example) M5 x 75 L (MK2B) 6 Moment of inertia (kgm2) 4 MK220/25 2 Mounting bolt 103 6 4 Operating range Flat washer 2 104 Note) Be sure to use a flat washer to mount cylinders via through-holes. 50 100 200 66 120 D 75 85 80 90 90 100 80 90 105 135 105 135 Cylinder model C Mounting bolt size M5 x 75 L M5 x 85 L M5 x 80 L M5 x 90 L M5 x 90 L M5 x 100 L M5 x 80 L M5 x 90 L M6 x 105 L M6 x 135

30

KQB2W16-03S KQB2W16-04S 31.2 31.3 35.1 31.6 31.7 35.5 32.7 32.8 36.6 38 37 40.2 41.6 46.6 45.9 50.1 47.7 49 53.2 57.6 61.4 13.1 32.4 32.3 34.5 33.2 33.1 35.3 13.5 15.3 34.7 14.1 16.2 35.6 16 17.8 37.2 60.3 28.9 39.2 63.7 42.1 64.5 123 46 58.2 118 89.6 116 M5 x 0.8 1/8 1/4 M 3.2 12 8.3 2.8 13.6 D 3 13.7 M5 x 0.8 1/8 1/4 4 12.6 9.1 14.4 4 3 A L2 14.7 M5 x 0.8 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8

Table of Contents

C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread 1 2 3 4 5 6 7 8 9 10 11 12 42 62.5 73 n L L1 L2 L3 152 175 185.5 141 162.5 173 130 150

PSxx-OMS0006CN

-100.0100.0 kPa T 2 N NPN1 P PNP1 A1 A M SI*2 () P (psi)*1 1 2kPaMPa A2 B () M5 M5 M5 B 01 R1/8 N01 NPT1/8 D + 1 L 2m -8No.PS-OMS0006CN-G / A ZS-46-A1 3X8L (2 ) B ZS-46-A2 3X8L (2 ) ZS-46-B + ZS-46-D ZS-46-3L 3 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch ZS-46-N7H 4mm ZS-46-C4L 6mm ZS-46-C6L 1/4 inch ZS-46-N7L -9No.PS-OMS0006CN-G LCD LCD

Digital Pressure Switch

Remarks Bracket A ZS-46-A1 Self tapping screws: Nominal size 3 x 8L (2 pcs) Bracket B ZS-46-A2 Self tapping screws: Nominal size 3 x 8L (2 pcs) Panel mount adapter ZS-46-B Panel mount adapter + Front protective cover ZS-46-D Lead wire with connector ZS-46-5L 5 cores, 2 m Front protective cover ZS-27-01 R1/8 piping adapter ZS-46-N1 NPT1/8 piping adapter ZS-46-N2 One-touch fitting 4 mm straight