Electric Actuator

or less 125st or more, 200st or less 201st or more, 300st or less 37 52 82 50 174.3 92 175 16 16 35 69 83 41.3 8 10.5 8.5 4.3 32 42.5 25 23 M4 x 0.7 5.5 195 194.3 112 202.6 206.4 115.5 67.5 25 20 45 85 103 52.5 11 14.5 12.5 5.4 40.5 53.5 31 29 M5 x 0.8 6.5 227.6 84.5 102 55 231.4 140.5 228.9 128 68 32 25 60 101 123 64 12 18.5 16.5 5.4 50.5 68.5 38.5 30 8.5 M6 x 1.0 258.9 158 85 102 Step

SMC Pneumatic Clean Series

S + Stroke Relief port M5 x 0.8 1.5 (20, 25) FZ Z N N F H 20 to 32 Standard port ZZ + Stroke 4-FD F Y 45 Relief port (32, 40) 40 (mm) K I HC H FY D B2 A F FD 10.5 7.5 7.5 7.5 DL Bore size FT 22 17 17 13 B1 66 52 40 40 34 B FX AL FZ G H1 H2 E C2 MM 0 41 32 32 26 20-0.033 16 13 13 13 7 7 7 4 4 4 60 60 60 21 19.5 19.5 15.5 24 22 22 18 40 32 25 20 5 24 46.5 37.5 33.5 28 11 8 8 8 82 75 75 75 36

CY1

NN M10 x 1.0 M10 x 1.0 M10 x 1.0 S 63 63 83 W 25 30 35 X 10 16 19 Model CY1B6 CY1B10 CY1B15 ZZ 81 81 103 Port size M5 x 0.8 M5 x 0.8 M5 x 0.8 CY1B20 to 40 CY1B50, 63 (mm) B 36 46 60 70 86 100 MM x J M4 x 0.7 x 6 M5 x 0.8 x 8 M6 x 1.0 x 8 M6 x 1.0 x 10 M8 x 1.25 x 12 M8 x 1.25 x 12 C 32 38 D 22.8 27.8 35 43 53 66 E 30 32 G 8 8 9 11 14 14 H 20 20.5 22 29 33 33 I 28 34 40 50 58.2 72.2 K 8 10

Table of Contents

Refer to pages 11-3-31 to 11-3-32 for details of made-to-order specifications.

CG5-S

x 0.8 5.5 8 14 3.5 M10 x 1.25 29 1/8 9 83 13 32 10 24 to 300 22 19.5 17 20 32 12 18 12 40 6 38 M5 x 0.8 5.5 10 16 3.5 M10 x 1.25 35.5 1/8 11 85 15 40 10 24 to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 21 109 63 14 40 to 600 35 32 27 38 60 20 21 14 58 11 72 M10

Electric Actuators

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

KR

(mm) <M5, M6> <M5, M6> A Weight (g) D P M L Model Urethane 2-applicable tubing KAU23-M5 38 9.6 15.5 34.5 9 M5 x 0.8 M6 x 1 2.2 2.2 10 38.5 3.4 2.9 11 1 8 KAU23-M6 KAU23-U01 11 3.2 9.6 KAU04-M5 39.5 M5 x 0.8 M6 x 1 4 2.2 2.2 KAU04-M6 10 11 10.4 16 36 10.4 40 4 1 8 KAU04-U01 11 4.2 4.2 K 1 4 KAU04-U02 42 16 14 KAU06-M5 42.5 M5 x 0.8 M6 x 1 39 2.2 2.2 12 KAU06-M6 43 13 M Connection thread 17

Air Cylinder

[mm] Bore size A B C D F FB FC FT FX FY FZ GB H MM NA NB NC NN S 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 6 15 12 14 3 8 11 4.5 1.6 24 14 32 5 28 M3 x 0.5 3 9.5 7 M6 x 1.0 37 (42) 46 (51) 50 (55) 64 (69) 10 15 12 14 4 8 13 4.5 1.6 24 14 32 5 28 M4 x 0.7 4.8 9.5 M8 x 1.0 45.5 53 65 77 16 15 18.3 20 5 8 19 5.5 2.3 33 20 42 5 28 M5

24

2 20, 32, 40, 80, 100 50 or more 63 or more 32 to 63: Over 100 stroke @1 Lock type MGJ $1 $0 JMGP $2 #8 $3 MGP MGP MGPW MGQ MGG MGC MGF MGZ MGT D-X 473 MGP Series Dimensions: 20, 25 4 x 5.4 through 4 x NN through 4 x MM depth ML 4 x M6 x 1.0 depth 12 L 4 x 9.5 counterbore depth 5.5 17 WA Section XX Section XX Section XX (5.5) 24 M5:T-slot for hexagon bolt X 0.02 X 0.02 DA X 0.02 11 VB H VA

MG

M8 x 1.25 6.6 50 97 69 20 16 12 64 14 11 12 148 M8 32 32 46 M10 x 1.5 22 M10 x 1.5 8.6 63 102 74 20 16 12 78 16.5 13.5 16.5 162 M10 39 39 58 M10 x 1.5 22 M10 x 1.5 8.6 WB WA Bore size (mm) OB OL P PA PB PW Q R S T U VA VB Over 75 st to 175 st 124 Over 175 st to 275 st 200 Over 250 st 300 Over 75 st to 175 st 83 Over 175 st to 275 st 121 Over 275 st 171 75 st or 75 st or 32 11 7.5 1/8 32 15

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

Air Slide Table Series MXQ

M 15 25.5 MXQ-CS 6 (L)-X11 5 18 MXQ-CS 8 (L) B MXU 8 7 22 3 9 7.5 16.6 14.6 8 9.8 MXQ 8 (L) M6 x 1 15 M3 x 8 M3 x 10 28 MXQ-CS 8 (L)-X11 F 25 38 MXQ-CS 8 (L)-X12 MXS 5 22 MXQ-CS12 (L) G E MXQ12 (L) M8 x 1 M4 x 12 M4 x 12 12 9.5 29 4 14 11 20.5 18.5 11 13 15 32 MXQ-CS12 (L)-X11 C MXQ 25 MXQ-CS12 (L)-X12 42 5 23 MXQ-CS16 (L) Table mounting section MXF M10 x 1 MXQ16 (L) 14 11 36 5 17 M5 x 16

Electric Actuator/Slider Type

(mm) T U Y V Without lock With lock F G W X Z W X Z 25 15 to 100 92 1 26.5 40 82.5 115.5 11 127.5 160.5 11 2 4 105 to 400 32 20 to 100 118 1 34 60 80 120 14 120 160 14 2 4 105 to 500 63 50 to 200 146 4 32.2 60 98.5 138.5 12.5 (13.5)138.5 178.5 12.5 (13.5) 4 8 205 to 500 505 to 800 L lead Motor left side parallel type: LEY L 25 32 63 Motor right side parallel type: LEY R 25 32 63 U S1 U S1

Slide Unit Series CX2/CXWM/CXWL

Slide Bearing Type Series CXWM 20 With End Lock: CXWM20Stroke/50 to 200 R 2 x 2 x M6 x 1.0 thread depth 8 2 x 2 x 6H7 depth 8 +0.012 0 4 x M5 x 0.8 thread through From opposite side 11 depth 21 4 x 7.5 counterbore depth 4.5 (An adjusting bolt M10 x 1.0 x 14 l to the plate port) 2 positions for set screws for fixing adjusting bolt (M5) 45 2 x M5 x 0.8 (Cylinder port) 4 x 5.5 through 4 x 9.5

Slide Unit Series CX2/CXWM/CXWL

Slide Bearing Type Series CXWM 20 With End Lock: CXWM20Stroke/50 to 200 R 2 x 2 x M6 x 1.0 thread depth 8 2 x 2 x 6H7 depth 8 +0.012 0 4 x M5 x 0.8 thread through From opposite side 11 depth 21 4 x 7.5 counterbore depth 4.5 (An adjusting bolt M10 x 1.0 x 14 l to the plate port) 2 positions for set screws for fixing adjusting bolt (M5) 45 2 x M5 x 0.8 (Cylinder port) 4 x 5.5 through 4 x 9.5

Compact Cylinder Series CQS

10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Basic Style Bore size (mm) Stroke range (mm) Without auto switch With auto switch C D E F H I K1 K2 L M N OA OB Q RA RB T A 34 34 40 44 B 27 27 31 34 A 39 39 50 54 B 32 32 41 44 12 16 20 25 6 8 7 12 6 8 10 12 25 29 36 40 7.5 7.5 9 11 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5.2 6.2 8.2 10.2 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4

7.5

CC-LINK compliant (32 points), T-branch type Mitsubishi Electric Corp. CC-LINK compliant (32 points), Straight type DeviceNet compliant (32 points), T-branch type DeviceNet compliant (32 points), Straight type The asterisk denotes the symbol for assembly. Prefix to the part no. of the solenoid valve, etc.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51 62 HS 8.5 7.5 6.5 7 8 K 14 11 15 13 15 B 8 9.5 9.5 11 11 HT 17 24 23.5 29 36 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 C 4.2 5.2 5.2 6.5 6.5 HB 17 21 23.5 29 36 CB 2 3 3 3 5 CR 0.5 1 1 1.5 2 D 16.6 21.6 26.4 33.6 41.6 F 8 9 8.5 10.5 13 G 5 6 6 7 7 GP 33 39 44 55 65 GW 31.5 37.5 42.5 53.5 63.5 H 32 39

CXS

2-11 counterbore with depth 6.3 2-M5 x 0.8 with depth 7.5 80 30 78 28 14 60 35 6 12 12 30 12 M6 x 1.0 x 18.5 64 CXS25 2-M6 x 1.0 2-6.9 through 2-11 counterbore with depth 6.3 2-M5 x 0.8 with depth 8 98 38 96 36 18 75 44 8 16 14 30 16 M8 x 1.25 x 23 76 2-M6 x 1.0 CXS32 PP Q QQ R T TT U W X Y Model UU V 2-M6 x 1.0 with depth 10 2-M8 x 1.25 with depth 12 2-M8 x 1.25 with depth 12 4-M5 x 0.8