Vacuum Unit Ejector / Vacuum Pump System

(When ordering only bracket, refer to page 18.) B C Vacuum pump system PE port female thread specification(M3) Note 18) Use for pilot pressure exhaust piping. (Standard vacuum pump system is released to the atmosphere.) D With individual release pressure supply (PD) port(M3) Note 19) Use when supply pressure for vacuum release is individually requested.

Plate Cylinder

I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 +0.058 0 +0.058 0 +0.058 0 +0.070 0 25 32 40 50, 63 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 25 32 40 50, 63 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 8 10 10 14 NX NZ R1 U1 NO NDH10 NL NL NO NX R1 U1 Part no. Applicable pin Part no.

Modular F.R.L. Units

18 18 18 18 18 18 ZA17 Digital pressure switch: With unit selection function 19 19 19 19 19 19 19 14 Without a valve function 15 The combination of metal bowl: 2 and 8 is not available. 16 For pipe thread type: NPT.

New

Av = Q .(8) $P Av : Flow coefficient [m2] Q : Flow rate [m3/s] $P : Pressure differential [Pa] : Fluid density [kg/m3] (3) Formula for flow rate Described by the practical units. Also, the flow-rate characteristics are shown in Graph (2).

Round Type Hydraulic Cylinder

Size Tolerance +0.2 +0.1 +0.2 +0.1 +0.3 +0.1 +0.3 +0.1 +0.058 0 +0.058 0 +0.070 0 +0.070 0 With CDP-3 0.013 0.035 0.013 0.035 0.016 0.043 0.016 0.043 AD-EI-20 AD-EI-25 AD-EI-32 AD-EI-40 Y-020B Y-032B Y-04D Y-04B 9 9 16 16 9 9 12 12 20 25 32 40 45.5 45.5 52 60 35.5 35.5 42 50 10 10 12 12 3.2 3.2 4 4 16 18 22 22 36 38 55 55 20 25 32 40 5 5 13 13 20 20 24 24 14 14 25 25 18 18 38 38 M8 x 1.25

A

M5) NAN110-N01 (1 8 NPT) NAN101-N01 (1 8 NPT) Model NAN101-01 NAN110-01 NAN120-M3 NAN120-M5 Port Size 18* 18* M3 M5 Noise Reduction (dB) 16 21 13 18 Max Operating Pressure 1MPa / 145PSI Ambient & Fluid Temperature 5~150C / 40~300F Effective Orifice mm2 (Cv) 20 (1.1) 35 (1.9) 1 (0.05) 5 (0.27) Weight (gf) 9.5 20 1 3.3 H O W T O O R D E R SERIES AN SILENCER *Tapered thread ISO7/1 AN120-M3 (

1.1

At present, 18 organizations have been recognized as NRTLs.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Calle 18 69-05 Apart.

VQ20/30

Calle 18 69-05 Apart.

SMC Pneumatic Clean Series

30 Up to 1000 58 35 11 32 7 81 18 70 3/8 27 52 20 40 70 9 110 108 178 M18 x 1.5 15 59 35 14 63 17 31 Up to 1000 58 35 11 32 101 7 18 85 3/8 27 64 20 40 86 130 105 116 189 M10 x 1.25 M18 x 1.5 11.5 49 Actuator / Common Precautions 1 Be sure to read before handling.

SI unit ( device)

Value 7 6 5 4 3 2 1 0 Output No. 7 6 5 4 3 2 1 0 1 0-7 All disable Setting value 00 0 0 0 0 0 0 0 0 Output No. 15 14 13 12 11 10 9 8 2 8-15 All enable Setting value FF 1 1 1 1 1 1 1 1 Output No. 23 22 21 20 19 18 17 16 3 16-23 All disable Setting value 00 0 0 0 0 0 0 0 0 Output No. 31 30 29 28 27 26 25 24 4 24-31 Output 24-27: disable Output 28-31: enable Setting value F0 1 1 1 1 0 0 0 0

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Coordinates and Moments z M3: Yawing MX MTS MY CY M1: Pitching y x MG CX M2: Rolling DStatic Moment -X Ceiling mounting Horizontal mounting Wall mounting 20Data M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y m3 x g x X m4 x g x Y M3 m4 x g g: Gravitational acceleration Dynamic Moment z Mounting orientation Horizontal Ceiling Wall Vertical M1 x a x mn x g 1.4 100 Dynamic load FE 1 3 a Dynamic

Valve Single Unit

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 4 Caution Thread type 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 Nil Mounting screw tightening torques Rc 12 6 8.5 10 11.5 22 16 18 20.5 22 43 32 35 39 43 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 10 5/32" 1/4" 5/16" 3/8" G F M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm N NPT NPTF T Warning When mounting a valve or spacer on the manifold

Compact Manifold Regulator

Panel cutout dimensions ITVX 28 SMC PVQ K P C U O S H L VY1 23 28 VBA VBAT Plate thickness: Max. 2.1 22 AP100 26 (Max. 28) 42 Through hole for M3 3.2 59.5 73.5 SMC 2 10.5 35 OUT IN 12 743 ARM10 Series Dimensions Panel cutout dimensions ARM10F1-06 08 28 4 x R1 or less 28 to 28.5 IN OUT 37 58 34 23 20 Plate thickness: Max. 2.1 22 5 15 34 14 31 SMC 62 Through hole for M3 3.2 SMC K P U C S O

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Supply port PD (mm) D FC GC 6 8 11 15 A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 2.6 3.3 5.1 6.8 8.6 9 12.5 16.5 20 24.5 28 37 54 71 80 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

Escapements Series MIW/MIS

6 18 15 17.5 26 5 5 M6 x 1 M5 x 0.8 M3 x 0.5 14 26 6 2.8 25 10 7 15 12 8 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 28 14 10 20 14 12 25 25 8 40 6 14.5 2.5 M10 x 1.5 M4 x 0.7 20.4 39 Rc1/8 34 12 12 15 25 11 RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD Model 2 5.7 7 6 12.5 4 8.5 18.6

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Supply port PD (mm) A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 D FC GC 6 8 11 15 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 9 12.5 16.5 20 24.5 2.6 3.3 5.1 6.8 8.6 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

RSQ

10 15 7 24.5 25.5 31.5 28 31 27 17 11 21 15 20 14 18 12 18.5 12.5 15.5 9.5 31.5 32.5 38.5 35 38 34 27 29 26.5 21.5 11 25.5 15 24.5 14 22.5 12 23 12.5 20 9.5 35 36 42 38.5 41.5 37.5 30.5 32.5 30 29.5 4.5 33.5 8.5 32.5 7.5 30.5 5.5 31 6 28 3 41 42 48 44.5 47.5 43.5 36.5 38.5 36 10-8-13 14 Series RSQ Operating Range Bore size (mm) 12 Auto switch model 16 20 32 40 50 D-A7/A80 10 12 11 12 12

IZx-OMX0087

) Note 18) Note 18) Note 18) Note 17) OFF ON ION BALANCE Note 19) Note 19) Note 19) Note 19) OFF ON Display Ions are generated (green) OFF ION/HV ON 1Hz 1Hz 1Hz 1Hz 1Hz Incorrect high voltage (red) Note 23) Note 24) Note 21) Note 22) Note 23) Note 23) OFF ON Product type IZTP43(green) DAC/AC OFF ON Maintenance (green) NDL Note 26) Note 26) Note 26) Note 26) Note26) OFF ON Built-in sensor