Process Pump

PAF3000/5000 Series Description PAF3000 series PAF5000 series PAF3413 PAF3410 PAF5410 PAF5413 Diaphragm kit KT-PAF3-31 KT-PAF5-31 Check valve kit KT-PAF3-36 KT-PAF5-36 The maintenance procedure is to be distributed individually. Please contact your SMC sales representative for details. Note) One of Nil, F or N is entered as thread symbol.

3

/521 20A (Port size 06) 40A (Port size 14) p16 p10 PF3W711/511-;06 p9 p8 p7 p6 p5 p4 p3 p2 p1 p0 p14 (at 100 L /min) p12 Accuracy [% F.S.]

VZ100/300/500

Made to Order Specifications (For details, refer to page 4-6-46.) 4-6-30 31 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 External Pilot VZ500R JIS Symbol VZ51R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port.

ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 13-9-10

Compact Vacuum Ejector Series ZQ

XT53440 05 Number of stations 05 06 12 1 station 2 station 8 station 10

Shuttle Valve/AND Valve with One-Touch Fittings

How to Order VR 12 1 1 F 06 Body size Applicable tubing outside diameter Metric sizes Inch sizes 1 1/8 standard 3.2 23 04 06 01 03 07 1/8" 5/32" 1/4" 4 6 Use 1/8" tubing for 3.2.

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

22.5 8 15.2 15.2 60.4 8.1 38.2 28.2 18.7 18.7 24.0 VR1210F-08 6 12.8 12.8 59 7.4 37.7 25.2 16.8 16.8 27.2 VR1220F-06 23.9 19.8 8 15.2 15.2 65 8.2 39.7 28.2 18.7 18.7 31.9 VR1220F-08 10 18.5 18.5 71.6 9.8 25.8 44.8 31 20.8 20.8 43.2 VR1220F-10 Inch sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 1/8" 11.4 8.4 52 6.2 19.4 29.8 17.5 12.7 12.9 21.4 VR1210F-01 5/32" 12.8 10.4 56 20.3 32.2

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

MGC Bore size (mm) 40 Bore size (mm) 40 Model Model 50 63 80 100 50 63 80 100 MGF D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6 D-B59W D-G5/K59 D-G5W/J59W D-G5BAL D-G59F/G5NTL D-A3C/A44C D-G39C/K39C CY1 BT-04 BT-04 BT-06 BT-08 BT-08 BA-04 BA-05 BA-06 BA-08 BA-10 MY1 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 To order

Free Mount Cylinder for Vacuum Series ZCUK

(mm) DQ HQ HP Model Applicable pad model Note) ZPU-X11 ZC(D)UKD10 ZC(D)UKR10 SP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 12 18 32 13 7 32 13 9 12 15 18 31 12 2. 6 26 10 2. 6 31 12 4. 8 26 10 4. 8 31 12 7 26 10 7 31 12 9 26 10 9 12 15 18 ZCUK DQ HQ HP AMJ ZP ZC(D)UKD16 ZC(D)UKR16 AMV DQ HQ HP ZC(D)UKD20 ZC(D)UKR20 ZP 53 15 36 16 37 28 20 44 43 29 16 37 53 38

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

MG Bore size (mm) 40 Bore size (mm) 40 Model Model 50 63 80 100 50 63 80 100 MGP D-A5/A6 D-A59W D-F5/J5 D-F5W/J59W D-F5NTL D-F5BAL/F59F D-A3/A44 D-G39/K39 D-B5/B6 D-B59W D-G5/K59 D-G5W/J59W D-G5BAL D-G59F/G5NTL D-A3C/A44C D-G39C/K39C MGQ BT-04 BT-04 BT-06 BT-08 BT-08 BA-04 BA-05 BA-06 BA-08 BA-10 MGG MGC BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 To order

Brake mechanism added

BA4-040 BA4-063 BA4-080 BA4-080 Bore size (mm) Auto switch model 40 50 63 80 100 D-A3/A44 D-G39/K39 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M D-B5/B64 D-B59W D-G5/K59 D-G5W/K59W D-G59F D-G5NT BA-04 BA-05 BA-06 BA-08 BA-10 Note 1) D-A9 and D-A9V cannot be mounted on 50.

ZP

Pad diameter (mm) 02 04 2 4 ZCU Vacuum entry port (Refer to Table (2) for applications.) 06 6 AMJ 08 8 10 10 Misc. 13 13 Table (2) Vacuum Entry/Mounting Thread Diameter 16 16 Thread dia.

Mist Separator Series AFM20/30/40

, AFM40-06 Drain cock with barb fitting With drain guide With auto-drain (N.C.)

Clamp Cylinder Series CK1

Auto switch model Auto switch 40 50 9 4 7 11 63 40 50 63 -X D-A93 D-M9B D-M9BW D-B54 8 3.5 5.5 10 8 4 6.5 10 D-A93 D-M9B D-M9BW D-B54 Note) qBMA2-040 wBJ3-1 Note) qBMA2-050 wBJ3-1 Note) qBMA2-063 wBJ3-1 Individual -X BA-04 BA-05 BA-06 Since this is a guideline including hysteresis, not meant to be guaranteed. (Assuming approximately 30% dispersion.)

Cylinder

I ' . 0.040 6 7 11 17 8 M3 x O.5 I. 16.5 10.5 6 B M10 X1.0 9 3 7 3 , 065 '10 . , jj:!'

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x 0.5 x 14 L CK1 CK1 Zinc chromated 29 30 31 Switch mounting spacer Cushion ring Spacer 2 1 2 Aluminum alloy Aluminum alloy Bearing alloy Anodized CKG1C only CLK2 Speed controller valve seal CLKG CKP140, 50, 63 Rod mounting type CKQ CLKQ #1 q @1 w e @2 @3 @0 !

VCA

AXT632-69-1 AXT632-69-2 VVCA40-3A-06-2 VVCA40-3A-06-1 OR-3200-200-H VCA45--VVCA40-6-n VVCA40-4A-06-2 VVCA40-4A-06-1 Material Mounting screw (side port) Mounting screw (side port) q q Steel Steel Mounting screw (front port) Mounting screw (front port) End plate assembly (D side, side port) End plate assembly (D side, side port) w w Aluminum Aluminum End plate assembly (D side, front port)

Air Cylinder NCA1 Series

No Thread IMPERIAL Code : Thread Form 00 : None (No reduction in METRIC Code : Thread Form METRIC Code : Thread Form Code : Thread Form 27 : 3/4-10 60 : M3 x 0.35 88 : M14 x 1.5 piston rod diameter) 28 : 3/4-16 61 : M3 x 0.5 89 : M20 x 1.5 01 : 2-56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04

NCA1

No Thread IMPERIAL Code : Thread Form 00 : None (No reduction in METRIC Code : Thread Form METRIC Code : Thread Form Code : Thread Form 27 : 3/4-10 60 : M3 x 0.35 88 : M14 x 1.5 piston rod diameter) 28 : 3/4-16 61 : M3 x 0.5 89 : M20 x 1.5 01 : 2-56 29 : 7/8-9 62 : M4 x 0.5 90 : M12 x 1.25 02 : 2-64 30 : 7/8-14 63 : M4 x 0.7 91 : M42 x 1.5 03 : 4-40 31 : 1-8 64 : M5 x 0.5 92 : M24 x 3.0 04

SZ3000

(With switch mounted) Power supply terminals (M3 terminal screws) A: Orange B: Green ( The voltage indication marking is for 24VDC.) L2 5 (Rail mounting hole pitch 12.5) L1 (Station n).