SMC Corporation of America
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Note 2) The data for l/min (ANR) refers to the conditions of 20C, 1 atm. pressure and relative humidity of 65%. Note 3) Install a circuit breaker with sensitivity of 30mA.

Size ASF Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

Output 1 Output 2 A B C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9

Output Output 3 B Output 1 Output 2 A B C A B A Dimensions (mm) 1in = 25.4mm 1g = 0.0353 oz D3 Metric sizes: Light gray Inch sizes: Orange D2 L5 M2 IN Blue L3 L2 L4 OUT IN D1 M1 Applicable tubing O.D. d M1 L1 Metric sizes: Light gray Inch sizes: Orange Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1210F-23 3.2 11.4 8.4 52 6.2 19.4 29.8 17.5 12.7 12.9 21.4 VR1210F-04 4 12.8

Output 1 Output 2 A B C Dimensions L5 D2 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tubing O.D. d L1 D3 Metric sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9 26.4 VR1211F-23 14.8 4 12.8 10.4 56 26.6 38.5 21.9 15.7 15.8 30.4 VR1211F-04 6.8 6 12.8 12.8 53.2 28.8 41.9 25.2 16.8 16.8 25.0 VR1211F-06 Inch sizes Weight g Model d D1 D2 L3 L2 D3 L1

Note 2) 3/16", 3/8", 1/2" are made of brass (Electroless nickel plated). 15-9-95 5 Dimensions L5 Elbow type D3 H Applicable tubing O.D. d (Hexagon width across flats) L4 L3 A D1 M1 L1 L2 D2 T Metric Size Inch Size d T H D2 D3 L1 L2 L3 L4 L5 A M1 d T H D1 D2 D3 L1 L2 L3 L4 L5 A M1 D1 Model Model AS121F-M5-23T AS121F-U10/32-01T 1/8" 8.4 17.3 22.1 12.3 3.2 8.4 5/32" 9.3 12.7 17.3 22.1 12.3

IDFA Series 6-1 Specifications 6 1 IDX-OM-W016 Air dryer6 References 6-3 Dimensions DRAFT AIR OUTLET IDFA3E B Q A E D AIR INLET VENTILATION WITH LAMP SWITCH AIR OUTLET THERMOMETER EVAPORATION G F C DRAFT AIR INLET DRAIN TUBE (O.D.10 LENGTH:0.8m) VENTILATION (820) J TERMINAL BLOCK N L K M H GROMMET POWER SUPPLY ENTRY(17) P Measuremm Model Thread size A B C D E F G H J K L M N P Q IDFA3E Rc3

.0.8m) J L K [200VAC specification] [200VAC specification] Terminal block Power cable outlet(17) H P N M [100VAC specification] Power cable(Length:approx.1.9m) measure mm Model Port size A B C D E F G H J K L M N P Q IDF1E Rc3/8 69 101 270 32 21 330 IDF2E Rc3/8 51 232 138 24 327 IDF3E Rc3/8 473 67 304 33 73 31 36 154 21 330 226 410 413 125 240 15 38 150 IDF4E / IDF6E / IDF8E, IDF11E A B

IDF Series 6-1 Specifications 6 1 IDX-OM-W025 Air Dryer 6 References 6-3 Dimentions IDF22E, IDF37E AIR OUTLET PORT SIZE AIR INLET PORT SIZE B A E D G SWITCH WITH LAMP EVAPORATION THERMOMETER DRAFT BALL VALVE AIR OUTLET F VENTILATION VENTILATION C TERMINAL BLOCK DRAIN TUBE (O.D.10) (820) K L P J H N M 413 POWER SUPPLY ENTRY( 17) [OTHER SIDE] measure mm Model Port size A B C D E F G H J

Flow rate conversion Normal condition: 0C, 101.3 kPa, dry air Standard condition: 20C, 101.3 kPa, 65%RH (ANR) Switchable between these conditions.

Operating Pressure Specifications KA 3.0 Bend the tube into a U shape at a temperature of 20C. Fix one end and bend the loop gradually. Measure 2R when the tube breaks or is crushed.

In-line Air Filter RoHS Operating pressure range 100 kPa to 1.0 MPa (20C) Both positive pressure and vacuum pressure can be used with one unit! 5 m Filtration OUT IN 100 kPa 1.0 MPa Positive pressure e.g.)

(mm) 2.5 4 6 7.5 9 12 2.18 3.48 4.57 6.99 9.56 D Black (B) White (W) MS Red (R) T Blue (BU) Burst pressure (MPa) Yellow (Y) TS0425, TS0604 VMG Green (G) Other than T00425, T0604 Nominal size (inch) 5 32 " 5 16 " 1 4 3 8 " 3 16 " 1 8 " 1 2 " " Max. operating pressure (TS0425, TS0604) Max. operating pressure (For other than TS0425, TS0604) Air Fluid Max. operating pressure (at 20C) Operating

9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note 1) It should have no condensation.

A 98A, Shore D 55D -50~ +140F (-45~ 60C) Linear low density polyethylene tubing, industrial grade Length Applicable SMC Fitting Series: KQ2, KQG2, KQB2, KG, KB, KS, KX, DMK, KDM Note: Fittings are not FDA/NSF compliant 33 77 153 305 100 (33m) 250 (77m) 500 (153m) 1,000 (305m) Specifications Metric Working Pressure @ 70F (20C) (psi) Service Temp Range Hardness Nominal Wall (mm) Nominal OD

Wedge Cam Operation Slide Guide Air Gripper/2-Finger Type Series MHK2 12, 16, 20, 25 How to Order MHK 2 20 D 1 F M9B Standard type MHKL 2 20 D 1 F M9B Long stroke type Number of fingers Made to Order Refer to page 523 for details. 2 fingers 2 Bore size Number of auto switches 12 16 20 25 12 mm 16 mm 20 mm 25 mm Nil S 2 pcs. 1 pc.

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)