MVGQ

12 VDC 6 VDC 5 VDC 3 VDC There are only 24 VDC and 12 VDC types for type U.

TABLE OF CONTENTS

300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Nil, G 1 to 40 DC Note) With no condensation How to Order (Single Unit) 5 01 GY1 VX 2 0 21 Normally Closed (N.C.)

Rubber seal 5 Port Solenoid Valve Series SYJ7000

For sub-plate, manifold type 40, 41, 42 P, E port R port Port size 3:Common exhaust type for main and pilot valve Nil: Without sub-plate D: Push-turn locking slotted type P, E port R port Electrical entry (With gasket and screws) 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC Grommet L plug connector M plug connector 24,12 VDC 100,110, 200, 220 VAC DIN terminal 24, 12, 6, 5, 3 VDC M8 connector

Support Guide/11-LEFG Series

[kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 60 Model Selection (11-)LEFG Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) AC Servo

VQZ1000/2000/3000

Note 4) When two or more symbols are specified, indicate them alphabetically. 24 VDC 12 VDC Note) For the special voltages, please consult with SMC.

0.4

Switching system from high voltage to low voltage SW1 Valve SW1 Valve High-voltage power supply (24 VDC) High-voltage power supply (24 VDC) SW2 Low-voltage power supply (Note) ON ON SW1 OFF SW1 OFF ON SW2 OFF 24 VDC (Note) 24 VDC (Note) Average voltage Voltage between terminals OFF OFF (Note) 80 W type: 3 to 6 VDC 40 W type: 4 to 8 VDC 10 W type: 8 to 16 VDC Specific Product Precautions Be

42

Seal Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC Series Enter in order starting from the first station on the D side.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

28 VDC or less 2.5 to 40 mA 40 mA or less Load current 4 V or less 0.8 V or less at 10 mA (2 V or less at 40 mA) Internal voltage drop 100 A or less at 24 VDC 0.8 mA or less Leakage current Operating range .

Digital Flow Switches Series PF2A

OUT2 41.8 40.3 NC 8 Load 4 Sensor 40 4.3 OUT1 Black Main circuit Main circuit 7 3 Load Brown 6 2 Blue + SMC FLOW SWITCH 5 1 12 to 24 VDC Series PF2A5 35.8 A 40 UNIT PF2A30-A RESET SET OUT2 NC 8 Load 4 Sensor OUT1 Panel fitting dimensions Black 3 x 7.2 (=21.6) 7 3 Load 8-M3 36 +0.5 0 6.4 Brown 6 2 + Blue 5 1 12 to 24 VDC 1 2 3 4 Series PF2A5 PF2A31-A 36 +0.5 0 19.4 Do not connect the white

0.4

, 100, 110, 200, 220 VAC (50/60 Hz) 3-position exhaust center 2(B) (A)4 10% of rated voltage Allowable voltage fluctuation VQ 1/2 VQ 1/2 Coil insulation type Equivalent to Class B (R1)5 1 (P) 3(R2) 3-position pressure center 0.4 W DC (17 mA), 0.95 W DC (40 mA) Note 3) 24 VDC VQ 4/5 2(B) (A)4 0.4 W DC (34 mA), 0.95 W DC (80 mA) Note 3) 12 VDC Inrush 0.96 VA (10 mA), Holding 0.96 VA (10 mA)

CE2

MK(2) 14.5 mT Magnetic field resistance Symbol Specifications 10.8 to 13.2 VDC (Power supply ripple: 1% or less) Power supply RS Q G -XC18 NPT finish piping port 40 mA Current consumption RS H A 0.1 mm/pulse Resolution Model Note) 0.2 mm Accuracy RZQ Open collector (Max. 35 VDC, 80 mA) Output type Bore size (mm) Rod Action Action Series Type A/B phase difference output Output signal MI W

Multi-Axis Step Motor Controller

(R1.25-4) 40 20 39 (7.5) 40 20 Cable length (L) [m] 50.8 1 1.5 3 3 5 5 2 21 1 21 1 Pin no. Wire color Pin no. Wire color Pin no. Wire color Pin no.

Vacuum System Peripherals:

Power supply voltage S L Straight type 3 m Right angle type 3 m Without cable connector Flow Characteristics 0 1 24 VDC 12 to 15 VDC N 0 Option Input signal 10 Bracket 0 1 2 3 4 Current type 4 to 20 mA DC Current type 0 to 20 mA DC Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Preset input 20 Output pressure (kPa) Nil B Without bracket Flat bracket L-bracket 30 40 C Option 50 Monitor

0.5

IZF21/31 IZF10/IZF10R Technical Data With automatic cleaning unit IZF21-m-mmSm IZF31-m-mmSm 64 (144) 20.5 (40) 64 (40) (104) 20.5 153 113.4 (195) (155) With adjustable louver IZF21-m-mmWm IZF31-m-mmWm (60) (144) 14 (40) 127 (60) (104) 14 (40) 89 127 89 (195) (155) With filter IZF21-m-mmmU IZF31-m-mmmU (144) (45) 134 5 (40) (45) (104) 5 (40) 95.5 126 87 (195) (155) 18 IZF21/31 Series Dimensions

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

How to Order Relay output module SV 000 60 A 5 1A Light window No. of output points Series A B 1 output 2 outputs 1 2 3 4 10-SV1000 10-SV2000 10-SV3000 10-SV4000 Rated voltage 5 6 24 VDC 12 VDC Note that serial wiring manifolds (EX500, EX250 and EX120) are available with 24 VDC only.

VQ4000

Refer to pages 2-5-40 to 2-5-43 for control unit.

Ejector Valve Unit Series ZYY/ZYX 1

40 40 40 40 40 Suction flow rate Suction flow rate 20 20 20 20 20 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 0 0 0 10 20 30 40 50 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) How to Read Flow Characteristics Graph The flow rate characteristics indicate the relationship between the vacuum pressure

energy saving effect

Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) Power supply 40 3-phase 380 to 415 VAC (50/60 Hz) Specifications Model HRSH100-Al-40-l HRSH150-Al-40-l HRSH200-Al-40-l HRSH250-Al-40-l HRSH300-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.27 2.1 2.1 2.8 2.8 Control method PID control Ambient temperature/Altitude

Table of Contents

AW10 to 40 AW10 to 40 AW30/40 AW20 AW30/40 AW10 to 40 AW10 to 40 AW30/40 AW10 to 40 Symbol 1 2 6 8 C J N R W Z VEX Body size (5) 10 20 30 40 AMR Thread type ITV Metric thread (M5) Rc NPT G Nil (6) N (1) IC F (2) Note 1) Drain guide is NPT 1/4 (applicable to AW30 and 40), and the exhaust port for autodrain comes with 3/8" Onetouch fitting (applicable to AW30 and AW40).