SMC Corporation of America
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Power saving circuit is only available in the "Z" type. 3 position pressure center Bracket Nil: Without bracket F: With bracket Rated voltage AC (50/60 Hz) DC 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] A, B port size M5 C4 C6 N3 N7 M5 x 0.8 One-touch fitting for 4 One-touch fitting for 6 For type W, DC voltage is only available.

12 VDC 6 VDC 5 VDC 3 VDC ZH Output specifications (Vacuum switch) ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com NPN open collector, single output Analog, no output, 3 turn setting 14 ZL Note 1) The serial transmission type is 5 (24 VDC) only.

Flash Operating voltage 24 VDC +20%/-15%, Class 2 1 ON US2 [US3, US4 .. etc] is present (> approx. 22.8 VDC). Detected: < approx. 20.4 VDC Cancelled: > approx. 21.6 VDC 3 : If the US2 power supply is not present or below the dropout level, the SF LED will also flash and the error code "0x01F1" will be generated.

Thread type Nil F N T Rc G NPT NPTF Rated voltage DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] A, B port size 01 C6 C8 N7 N9 1/8 One-touch fitting for 6 One-touch fitting for 8 Note) Do not remove the factory installed bracket from models with the bracket option.

Core wire color Brown: 24 VDC +10%/5% (For output) White: 0 V (For output) Blue: 24 VDC10% (For control and input) Black: 0 V (For control and input) Gray: Not connected Terminal no.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4.5 mm Coil: Class B, Class H 6 mm 8 mm Rated Voltage 100 VAC, 200 VAC, 110 VAC, 220 VAC, 240 VAC, 230 VAC, 48 VAC, 24 VDC, 12 VDC 10 mm 1 2 1 4 3 8 , 1 2 Port size 1 8 1 4 , 1 4 3 8 , Normally Open (N.O.)

: 5 Pilot valve assembly VQZ111P: Coil rated voltage Example) 24 VDC: 5

Rated voltage (with connector and 2 of sockets only) Lead wire length Nil 300 mm 6 600 mm Electrical entry 5 24 VDC 6 12 VDC 10 15 20 25 30 50 1000 mm G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire 1500 mm 2000 mm 2500 mm 3000 mm 5000 mm V 6 VDC S 5 VDC L With lead wire L plug connector R 3 VDC LN Without lead wire 50 60 1 100 VDC Hz LO Without connector With lead wire Without lead

NPN type -PNP type Input signal power Input signal power CN5 CN5 supply supply 24 VDC 24 VDC A1 COM A1 COM A2 IN0 A2 IN0 A3 IN1 A3 IN1 A4 IN2 A4 IN2 The power supply can be either polarity. The power supply can be either polarity.

Application Relay, PLC 24 VDC relay, PLC IC circuit, Relay, PLC Load current range Indicator light Type Reed switch 2-wire 3-wire Solid state switch Load voltage 24 VDC, 100 VAC 24 VDC (10 to 28 VDC) 28 VDC or less Auto switch part no.

In-line In-line In-line Electrical entry direction Perpendicular Perpendicular Perpendicular 2-wire Wiring type 3-wire Output type NPN PNP 24 VDC relay, PLC Applicable load IC circuit, Relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less 24 VDC (10 to 28 VDC) Load voltage 28 VDC or less Caution 5 to 40 mA Load current 40 mA or less 80 mA or less

S and Z types 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 8% to +10% 12 VDC: 6% to +10% Select the DC standard type or the power saving circuit type when the valve is continuously energized for long periods of time.

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted type Electrical entry 24 VDC, 12 VDC, 6 VDC, 5 VDC, 3 VDC Grommet L plug connector M plug connector G: 300 mm lead wire L: 300 mm lead wire M: 300 mm lead wire MN: Without lead wire Light/Surge voltage suppressor Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge

(Example) SYJ3120-5M-M3 VJ3000-13-1 -+ Single Double Rated voltage 5 port DC AC (50/60 Hz) 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, DC voltage is only available.

Cable core wire colors Brown: 24 VDC (for solenoid valve) White: 0 V (for solenoid valve) Blue: 24 VDC (for control and input) Black: 0 V (for control and input) Gray: Not connected Terminal no.

Rated voltage 5 6 24 VDC 12 VDC Note 1) Light/surge voltage suppressor is built-in.

Note 4) When the suction flow rate is 0 L/min, the particle concentration is measured during operation without suction. 510 A Particle Generation Characteristics 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Particle Generation Characteristics Step Motor (Servo/24 VDC), Servo Motor (24 VDC) 11-LEFS16 Speed 500 mm/s 11-LEFS25 Speed 500 mm/s 10 10 LEF

DXT170-176-2-01 DXT170-176-2-02 DXT170-176-2-03 DXT170-176-2-04 DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 For Series VZ300/500 With light/surge voltage suppressor With surge voltage suppressor 100 VAC 200 VAC 110 VAC 220 VAC 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC S E For VZ120 Indicator light is not available for grommet type.

For body ported models with the external pilot option, please refer to page 58. 16 Series SYJ500 How to Order Light/surge voltage suppressor Rated voltage DC Electrical entry for G, H, L, W Electrical entry for D 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Nil Without light/surge voltage suppressor Nil Without light/surge voltage suppressor S Z R U With light/surge voltage suppressor (Non-polar