Vacuum Pad: Ball Joint Type

Vacuum Pad: Ball Joint Type ZPT/ZPR Series Pad Diameter: 10, 13, 16, 20, 25, 32, 40, 50 on n io on n a io a pt pt s s or la or la ds nt ds nt ed ed a a or or w w l f l f or or ea ea k k id su id su pe rfa pe rfa ty ty ce ce nt nt s s oi oi ac ac l j l j ac ac al al e e B B s s ZP3 ZP3E ZP2 ZP2V ZP ZPT ZPR ZPT ZPR XT661 ZPT Series: Vertical Vacuum Entry Type ZPR Series: Lateral Vacuum Entry

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

T) LVQ LQ (mm) Dimensions PB LVN T U Model LVD2-S LVD3-S LVD4-S LVD5-S PA 28 9.6 TI/ TIL 34 17.5 A B 35 20 U PA 57 25 PAX With flow rate adjustment & by-pass PB (Max. S) (Max.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

12.8 S 10 to 16 (mm) 10.4 21.6 Q: 6 Q: 8 Pad diameter (mm) R 24.3 R S 15.2 S ZPR F-0-B8 (Without buffer/Female thread) 40 50 20 to 32 12.8 26.2 S Hexagon width across flats 12 N 8 R F Applicable tubing O.D.Q E D C Y 2.5 A B Dimensions (mm) A B C D E F N Y Model ZPR40F-0-B8 40 43 12.5 18.5 32.3 49.5 5 M8 x 1.25 ZPR50F-0-B8 50 53 13.5 19.5 33.3 50.5 6 Dimensions by Tubing Diameter (mm) Q: 6

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

S Applicable tube O.D.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

E M H B Model L2 L1 E L2 LQ3E2A-S LQ3E3A-S LQ3E4A-S LQ3E5A-S LQ3E6A-S LQ3E7A-S 1/4" 3/8" 1/2" 3/4" 1" 1 1/4" 4 5 6 7 8 9 6 9 10 14 18 22 17 22.5 24.5 26.5 30 35 16 19.5 22.5 24 26 35 16 21 24 32 41 50 34.5 47.5 52.5 64 78 92.5 33.5 44.5 50.5 61.5 74 92.5 39.5 49.5 54.5 66 80 97.5 38.5 46.5 52.5 63.5 76 97.5 20 25 29 37 49 64 M H Class 7 342 Series LQ3 Space Saving Branch Tee How to Order

With Factory Installed

S After setting needtes. remount the cover. Insert the cover nail into hole of case (\l mark), set the mark( DO ) of the cover to the case and rotate the cover ctockwise until it stops.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Auto Switch Guide

CDV3, CDVS CE2, CNA CDL1 CDS1 MDB, MDBB BT -04 BT -04 BT -06 BT -08 BT -08 BT -12 BT -12 BT -16 BT -18A BT -20 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 [Mounting screws set made of stainless steel] The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

VZS

Other dimensions are the same as the grommet type. 3-7-12 13 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS2000 Non Plug-in 2 position double, 3 position closed center/exhaust center/pressure center Grommet 2 position double: VZS2250-G H(S)-01 3 position closed center: VZS2350-G H(S)-01 3 position exhaust center: VZS2450-G H(S)-01 3 position pressure center

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Note 4) Piston speed is ranged from 50 to 500 mm/s. Standard model no.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Nil S 3 n 2 pcs. 1 pc. 3 pcs. "n" pcs.

7.4

Kit EX510 Gateway Type Serial Transmission System S0700 Series RoHS SJ How to Order Manifold SY SY SS0755 08 C4 SA S0700 Option S Kit EX510 serial wiring S0700 S0700 Symbol Type Nil None Note) For SI Unit part number, refer to page 897.

Return Filter FH100 Series

When washing the micromesh element, do not wipe it using a stiff brush or rag. 0.03 12 08 20 24 10 16 Pressure drop (MPa) 06 0.01 0.005 COM. N.O.

Serial Transmission System Series EX250 Series EX500

Stations N R S 01 1 station Note 5) Note 6) The maximum number of stations differs depending on the electrical entry.

ZQ-OM01301

5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEC EE FC FE EA EB FA FB *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 34 - Doc.

ZQ-OM01401

-*ZQ000MA-K25L-*ZQ000MA-J15L-FPD ZZQ1A-ROC *ZQ000MA-K15L---S *ZQ000MA-K25L---S EA EB FA FB EC EE FC FE *ZQ3MAK1 5L--S *ZQ3MAK2 5LK--S EA EB FA FB EC EE FC FE *ZQ000MAJ1 5LF *ZQ000MAK1 5L*ZQ000MAK2 5LEA EB FA FB EC EE FC FE *ZQ000MAK1 5L--S *ZQ000MAK2 5L--S 36 - No.ZQ-OM01401-B 11. ,,, 11.1 / ZQ05A 0.35MPa -100 30 -100 -80 25 [L/min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

01(R) Note 1) Option Note 2) When two or more symbols are specified, indicate them alphabetically. (2) 01 [Rc 1/8] 02 [Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

LVD LVQ How to Order Manifold Base LQ1 LLH 2 A 05 11 S LVN Body class TL/TIL Tubing size for port P and L side connection Tubing size for port P and R side connection Body class 2 3 4 Symbol 2 3 4 Body class 2 to 4 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class 2 to 4 Tubing size Plug LQ3 6 1/4" 6 1/4" Base type 2 8

Unit Manifold Valve

Positioning hole Positioning hole Caution e One-touch fitting Tightening torque: 0.12 Nm q Unit Assembly Part No. r Bracket Assembly Part No. 00 VV061 08 5 H Description Part no.