ISO Cylinder

20 M22 x 1.5 8 G1/8 16 20 8 44 17 8.2 M8 x 1.25 32 11 24 22 11 13 12 24 25 22 M22 x 1.5 8 G1/8 16 22 8 50 20 10.2 M10 x 1.25 32 11 30 22 11 17 12 28 Bore size S (XC) Z ZZ 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 56 (62) 74 (80) 86 (92) 96 (102) 10 56 (60) 74 (78) 86 (90) 96 (100) 12 60 (63.5) 85

CA2

n Same side 80 90 80 90 100 100 10 20 100 1 Different sides 2 Same side D-A3C D-G39C D-K39C 20 + 35(n 2) n = 2, 3, 4 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2) n = 2, 4, 6, 8 Different sides n 100 + 100(n 2) n = 2, 3, 4 Same side 100 + 100 (n2), n = 2, 4, 6, 8 80 90 80 90 80 90 10 20 55 1 Different sides 2 Same side 20 + 35(n 2) n = 2, 3, 4 80 + 35(n2) n = 2, 4, 6, 8 90 + 35(n2)

MY1

L unit 1000 1000 Air cushion Adjusting bolt 500 400 300 500 400 300 0.5 200 200 100 1 2 3 4 5 10 20 30 1002 3 5 10 20 50 40 50 30 100 Shock absorber m2, m3max m1max m2max m3max m1max 2.

V100

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

Air Cylinder

100 125 147 160 172 185 210 235 260 32 32 36 18 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 149 162 174 187 212 237 262 40 41 46 20 77 90 102 115 140 165 190 12.5 25 37.5 50 75 100 125 181 194 206 219 244 269 294 Bore size Female Rod End (mm) With Rod Boot Boss-cut (mm) (mm) Bore size ZZ Bore size A1 H MM ZZ 20 8 20 M4 x 0.7 95 25 8 20 M5 x 0.8 95 32 12 20 M6 x 1 97 40 13 21 M8 x

Electric Actuator

LECP6 20 7.5 12 to 500 12 LEFS25 100 to 600 20 15 6 to 250 6 Step motor Series LECP1 (Servo/24 VDC) 40 10 16 to 500 16 Ball screw drive LEFS32 100 to 800 45 20 8 to 250 8 Series LECPA o0.02 Page 2 50 20 to 500 20 LEFS40 200 to 1000 Clean room compatible 60 23 10 to 250 10 7 2 10 to 500 10 LEFS16A 100 to 400 10 4 5 to 250 5 Servo motor (24 VDC) Series LECA6 11 2.5 12 to 500 12 LEFS25A 100

Table of Contents

7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AM 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5120-01 800 700 600 500 400 300 200 100 0 SY7120-02 800 700 600 500 400 300 200 100 0 SY9120-03 Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load

ZP

/125) H ZP (100/125) HB 100, 125 M22 x 1.5 Heavy-duty Ball Joint Pad Product part no.

MGP

MGP 5 4 3 10 MGQ 5 10 100 200 20 30 40 50 1 100 10 200 20 30 40 50 2 3 4 5 MGG Eccentric distance l (mm) Eccentric distance l (mm) MGC Over 75 stroke Over 125 stroke MGF 100 100 63 200 P=0.5MPa P=0.5MPa CY1 80 100 50 Load weight m (kg) Load weight m (kg) MY1 50 40 40 50 30 40 30 32 20 20 10 10 100 10 10 100 200 20 30 40 50 20 30 40 50 200 Eccentric distance l (mm) Eccentric distance l (mm

Electric Actuator

100 Lead 5: LEY63;C Lead 5: LEY63;C Horizontal work load [kg] 80 80 Lead 10: LEY63;B Vertical work load [kg] 60 60 Regeneration (100%) /High load Lead 10: LEY63;B Lead 20: LEY63;A 40 40 Lead 20: LEY63;A Regeneration (50%) 20 20 Regeneration (100%) /Low load 0 0 0 200 400 600 800 1000 1200 1400 0 200 400 600 800 1200 1000 Speed [mm/s] Speed [mm/s] Required conditions for Regeneration option

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

100% Duty ratio: 100% 12500 12500 10 10 7500 7500 5000 5000 2500 2500 0 0 0 10 20 30 40 0 5 10 15 20 Work load [kg] Work load [kg] 667 LEFS Series AC Servo Motor Work LoadAcceleration/Deceleration Graph (Guide) LEFS40lV8H/Ball Screw Drive LEFS40lV8H/Ball Screw Drive Horizontal Vertical 22500 22500 Duty ratio: 50% 20 20 Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] Duty

ZP

-75kPa -80kPa -85kPa 100 Pad diameter (mm) 80 63 50 40 10 30 50 70 100 200 5 7 Lifting force (N) How to read Example: Work load 20 kg (Lifting force: 196 N) Conditions:Desired number of pads 5 pcs.

CG1

acting/Spring extend (mm) C95 A B A B Bore size Auto switch model Bore size Auto switch model Hs Hs C92 25 50 75 100 125 150 200 25 50 75 100 125 150 200 All strokes All strokes 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 D-C7 D-C7 55 55 80 80 105 24.5 (27) 45.5 45.5 70.5 70.5 95.5 24.5

CL

601 to 1000 751 to 1000 751 to 1000 22 27 27 32 41 100 110 130 160 180 230 255 275 12 12 15 18 18 14 20 20 71 81 101 119 133 145 160 180 80 90 105 130 150 190 212 236 30 35 35 40 40 50 50 56 59 67 73 77 85 69 78 84 92 100 44 52 64 78 92 115 128 144 16 20 20 25 30 36 36 40 42 50 59 76 92 100 112 118 27 32 32 37 37 47 47 53 40 50 55 65 80 90 90 90 60 70 86 102 116 145 161 182 32 40 40 52 52

CATALOG VC10

AC DC PORTS PORTS 1/32 1/32 3/64 1/16 1/16 1/16 1/16 3/32 3/32 3/32 1/8 3/32 1/8 1/8 3/16 3/32 3/16 1/8 1/4 3/32 1/4 1/8 .024 .024 .052 .095 .095 .095 .095 .156 .156 .156 .284 .156 .284 .227 .500 .156 .500 .227 .700 .156 .700 .227 400 150 (200) 100 (135) 100 (135) 75 (100) 50 (70) 35 (40) 20 20 15 15 400 150 (200) 100 (135) 100 (135) 75 (100) 50 (70) 35 (40) 20 20 E23GG7DCCM E23HJ7DCCM

TABLE OF CONTENTS

AC DC PORTS PORTS 1/32 1/32 3/64 1/16 1/16 1/16 1/16 3/32 3/32 3/32 1/8 3/32 1/8 1/8 3/16 3/32 3/16 1/8 1/4 3/32 1/4 1/8 .024 .024 .052 .095 .095 .095 .095 .156 .156 .156 .284 .156 .284 .227 .500 .156 .500 .227 .700 .156 .700 .227 400 150 (200) 100 (135) 100 (135) 75 (100) 50 (70) 35 (40) 20 20 15 15 400 150 (200) 100 (135) 100 (135) 75 (100) 50 (70) 35 (40) 20 20 E23GG7DCCM E23HJ7DCCM

Table of Contents

CRB2BW15/20/30/40-D/Illustrations below show size 20 actions. For 90 (Top view from long shaft side) For 100 (Top view from long shaft side) For 100 (Top view from long shaft side) For 90 (Top view from long shaft side) A port B port A port B port A port B port A port B port (Long shaft side) (Long shaft side) (Long shaft side) !83 e i e i u !2 u !2 w !4 w !7 !

Combination Cylinder

to 1500 30 40 45 50 76 92 112 136 Long stroke (50 to 100) 50 63 80 100 (mm) Stroke range (mm) Bore (mm) GR GL GD GC GB GA F E D C BQ BP BN B1 B AL A Without rod boot With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 40 50 63 80 100 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 to 500 to 600 to 600 to 750 to 750 10 12 15 17 19 54 59 67 72 76 10 13 18 23 25 15 17 17 21 21

4/5 Port Solenoid Valve

Load rate: 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SYJ5140-01 Cylinder is in extending.