VQC

seal VQC4200 260 Double 7.2 7.3 0.43 2.1 0.38 2.0 15 or less 15 or less Rubber seal VQC4201 1 (P) 5 (R1) 3 (R2) 5.9 6.3 0.23 1.5 0.18 1.6 45 or less 47 or less Metal seal VQC4300 Closed center VQC4000 7.0 6.4 0.34 1.9 0.42 1.9 50 or less 52 or less 3-position pressure center Rubber seal VQC4301 (A) 4 (B) 2 6.2 6.9 0.18 1.5 0.17 1.7 45 or less 47 or less Metal seal VQC4400 Exhaust center 280

5 Port Solenoid Valve, Series VQC

12 or less 12 or less 260 (0.57) Double 7.2 Rubber seal VQC4201 7.3 0.43 2.1 0.38 2.0 15 or less 15 or less 1 (P) 5 (R1) 3 (R2) 5.9 Metal seal VQC4300 6.3 0.23 1.5 0.18 1.6 45 or less 47 or less Closed center VQC4000 7.0 Rubber seal VQC4301 6.4 0.34 1.9 0.42 1.9 50 or less 52 or less 3-position pressure center (A) 4 (B) 2 6.2 Metal seal VQC4400 6.9 0.18 1.5 0.17 1.7 45 or less 47 or less 280

CJ2X/CUX/CQSX/CQ2X/CM2X

20 25 32 40 Bore size (mm) MK(2) 32 Piston speed (mm/s) 0.5 to 300 40 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) RS Q G Note) Other intermediate strokes can be manufactured upon receipt of order.

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

CJ2X/CUX/CQSX/CQ2X/CM2X

20 25 32 40 Bore size (mm) MK(2) 32 Piston speed (mm/s) 0.5 to 300 40 0.27 0.4 0.65 1.2 Allowable kinetic energy (J) RS Q G Note) Other intermediate strokes can be manufactured upon receipt of order.

Series CQ2

(Mounting position: Horizontal) W 1000 500 400 Allowable lateral load W (N) 300 Allowable kinetic energy 200 Piston speed 200 180 200 100 180 Piston speed Allowable kinetic energy 20 to 400mm/s 12.4J 50 40 30 (m1 + m2) V Kinetic energy E (J) = 2 m1: Weight of moving cylinder parts kg m2: Load weight kg V: Piston speed m/s 20 10 0 20 40 60 80 100 120 140 160 180 200 220 260 240 280 300 Kinetic

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Maintenance check Model Connect(Flange) 2B/3B 8B C 2B/3B/4B 500 A 300 B 300 D 1300 E 1430 F 1520 G 20 H 720 M16 X l 400 Anchor bolt Caution M20 X l 500 AMD800 AMD900 400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 q The replacement interval for the element for models AMD150 to AMD850 is when the pressure drop reaches 0.1MPa or after 2 years of operation, whichever comes first.

LEC-OM071xx

When the external regenerative resistors for power are used at the rated load ratio, the resistor temperature increases to between 200 C and 300 C. The resistors must be used at or below the rated values. Check with the manufacturer for the resistors load characteristics.

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

Weight Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 LEKFS25 Product weight[kg] 1.7 1.8 2.0 2.1 2.3 2.4 2.5 2.6 2.8 2.9 3.2 3.5 3.8 0.26 Additional weight with lock[kg] LEKFS32 Series Stroke[mm] 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 Product weight[kg] 3.6 3.8 4.0 4.2 4.5 4.7 4.9 5.1 5.3 5.5 5.9 6.3 6.7 7.1 7.5 0.53 Additional weight with lock[kg

E-MY2_E_D

Heavy load Standard load Medium load Light load 1 10 50 100 200 1 0.25 0.49 0.98 1.96 2 20 2 0.49 75 200 400 0.74 1.47 2.94 3 30 3 0.74 100 300 600 0.98 1.96 3.92 4 40 125 400 800 4 0.98 1.23 2.45 4.90 5 50 5 1.23 150 500 1000 1.47 2.94 5.88 6 75 200 600 1200 6 1.47 1.96 3.92 7.84 7 100 250 700 1400 7 1.72 2.45 4.90 9.80 8 300 300 800 1600 8 1.96 2.94 5.88 11.76 9 500 500 900 1800 9 2.21

Flow Control Equipment

In-line style How to Order 1F 12 K 400 AS JIS Symbol Option Body size K N None Hexagonal lock nut Electroless nickel plated 100 200 205 300 400 M5 1/8 1/4 3/8 1/2 Indicate symbols in alphabetical order if two options or more desired. Applicable tube O.D.

-fl Seies

Model Position /No. of solenoid Type Port size {NPTD Cv factor MaKOperating cycle CPM Response time (ms) Weight lbs (ks0 Plug-in Non Piug-in 2 position Single wFR2100 NVFR2110 Va 300 20 or less 0.75 (0.34) V1 Double wFR2200 NVFR2210 la 0.9 300 20 or less o.92 (0.421 Y.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12

seal X42 Anti-corrosive guide unit X45 EPDM seal Mass (g) Stroke (mm) Stroke (mm) One side centralized piping, with switch rail One side centralized piping, without switch rail Model 250 300 350 400 200 380 620 1240 150 330 550 1130 100 280 480 1020 250 300 350 400 50 230 410 910 200 450 690 1320 150 390 600 1190 100 330 510 1060 50 270 420 930 MXY6 MXY8 MXY12 690 1350 760 1460 780 1450

E-MY2B_E_A

Heavy load Standard load Midium load Light load 1 10 50 100 1 0.25 0.49 0.98 1.96 2 20 75 200 2 0.49 0.74 1.47 2.94 3 30 100 300 3 0.74 0.98 1.96 3.92 4 40 125 400 4 0.98 1.23 2.45 4.90 5 50 150 500 5 1.23 1.47 2.94 5.88 6 75 200 600 6 1.47 1.96 3.92 7.84 7 100 250 700 7 1.72 2.45 4.90 9.80 8 300 300 800 8 1.96 2.94 5.88 11.76 9 500 500 900 9 2.21 3.92 7.84 15.68 10 1000 1000 1000 10 2.45

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Model Position /No. of solenoid Type Port size {NPTD Cv factor MaKOperating cycle CPM Response time (ms) Weight lbs (ks0 Plug-in Non Piug-in 2 position Single wFR2100 NVFR2110 Va 300 20 or less 0.75 (0.34) V1 Double wFR2200 NVFR2210 la 0.9 300 20 or less o.92 (0.421 Y.

Compact Rotary Actuator Series CRQ2

CRJ 400 CRA1 Displacement (m) Displacement (m) CRQ2 MSQ 250 MSZ 350 CRQ2X MSQX MRQ 200 300 30 25 20 15 10 5 0 40 30 20 10 0 Load (N) Load (N) MSQXB30A MSQXB50A 350 300 300 250 Displacement (m) Displacement (m) 250 200 200 150 150 D100 100 100 80 60 40 20 0 50 40 30 20 10 0 Load (N) Load (N) 329 Series MSQX Construction o i w@3 r !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S 32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63/10 to 100 80, 100/25 to 100 7-6-142 Air-hydro

MHL2

300 Pressure 0.6 MP 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) Gripping force (N) Gripping force (N) 400 400 250 250 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MP 0.5 MPa 0.5 MPa 0.5 MPa 0.5 MP 0.5 MPa 0.5 MPa 0.4 MP 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MP 0.4 MPa 200 200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3

MHL2

300 0.6MPa 0.6MPa 400 400 Holding force (N) Holding force (N) Holding force (N) Holding force (N) 250 250 0.5MPa 0.5MPa 0.5MPa 0.5MPa 0.4MPa 0.4MPa 200 200 300 300 0.4MPa 0.4MPa 0.3MPa 150 150 0.3MPa 0.3MPa 200 200 0.3MPa 100 100 0.2MPa 0.2MPa 0.2MPa 0.2MPa 100 100 50 50 0.1MPa 0.1MPa 0.1MPa 0.1MPa 50 100 150 200 50 100 150 200 0 0 40 80 120 160 200 40 80 120 160 200 0 0 Holding point R

MK

(mm) Operating direction Piston area (cm2) RHC 1.0 0.7 0.5 0.3 80 56 40 24 0.8 R 12 6 MTS 110 77 55 33 1.1 H 150 105 75 45 1.5 R 16 8 CC 200 140 100 60 2 H 200 139 100 60.8 2 R 20 12 298 208 149 90.2 3 H 370 258 185 112 3.7 R 25 12 490 341 245 149 4.9 H Order Made 600 418 300 182 6 R Made to Order 32 16 800 557 400 243 8 H 1050 731 525 319 10.5 R Refer to the p.5.4-1 regarding made to order