e

30 20 20 20 E-MY2HT16 10 10 10 E-MY2HT16 E-MY2HT16 8 8 8 5 5 5 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Load Mass: E-MY2HT (Double Axis) E-MY2HT/m1 E-MY2HT/m2 E-MY2HT/m3 80 80 80 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2HT25 E-MY2HT25 E-MY2HT25

Free Mount Cylinder Series CU

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

Solid State Auto Switches

Weight (g) Applicable bore size(mm) Weight Applicable bore size(mm) Weight Auto switch model Auto switch model D-A33C-4, A34C-4 D-A33C-5, A34C-5 D-A33C-6, A34C-6 D-A33C-8, A34C-8 D-A33C-10, A34C-10 D-A44C-4 D-A44C-5 D-A44C-6 D-A44C-8 D-A44C-10 162 166 184 210 232 160 164 182 208 230 40 50 63 80 100 40 50 63 80 100 Dimensions (mm) T Applicable bore size (mm) 40 50 63 80 100 C 44 52 64 78 92

Cylinder with Turntable Series MGT

25st 50, 75, 100st Larger than 100st WA WB Bore size (mm) 63 80 100 X XA XB XC XL YY YL Z 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 24 28 11 88 92 85 8 10 10 6 7 7 5 6 6 80 100 124 4 5 5 20 24 28 M10 x 1.5 M12 x 1.75 M14 x 2.0 D-X (mm) MGTM (Slide bearing) MGTL (Ball bushing bearing) (mm) AA A E BD Bore size (mm) 63 80 100 AA A E DB Bore size (mm) 63 80 100 Individual -X 25, 50st Larger

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5120-01 800 700 600 500 400 300 200 100 0 SY7120-02 800 700 600 500 400 300 200 100 0 SY9120-03 Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load

AC Servo Motor Driver (CC-Link Type ）

Position data Speed Dwell Auxiliary Model adaptive control 1 1000 1000 80 80 0 0 Speed control 2 2000 2000 100 100 0 0 3 4000 2000 70 60 500 1 4 500 2000 60 70 1000 1 5 2000 80 80 0 0 1000 6 2000 1000 80 80 0 0 Position 7 1000 1000 80 80 0 0 control LEC-MR-J3BAT 8 1000 1000 100 100 0 0 MR-J3BAT 1000 1000 100 100 0 0 (Note 3) CN4 255 2000 2000 80 80 0 0 Position Optional battery (for absolute

Table of Contents

124 AC10B AC20B AC25B AC30B AC40B AC40B-06 AC50B AC55B AC60B S V T SV TV L3 57 74 74 95 102 Attachment Model L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L3 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L3 61 76 76 99 104 AC20C AC25C AC30C AC40C AC40C-06

MXS Series Air Slide Table

-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 49 MXS Series Air Slide Table Table Deflection Table deflection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment

MGQ

39 12 16 20 25 32 40 50 63 80 100 40 42 52 62 80 90 100 110 140 170 18 22 26 32 38 38 44 44 56 62 36 38 46 56 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2 C dimension for a bore size of 32 to 100 is identical to the A dimension. 8-20-4 5 Compact Guide Cylinder Series MGQ Operating Conditions Allowable Lateral Load (Ordinary load) F (N) Stroke

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

25 30 20 15 100 80 10 35 40 45 50 60 70 75 80 90 40 45 35 30 25 20 15 100 10 50 60 70 75 80 90 Model CXS10 CXS15 97 92 87 82 102 107 112 117 122 132 142 147 30 40 50 90 85 80 75 70 65 100 105 115 125 130 95 104 55 99 94 45 89 109 114 119 124 129 139 149 154 159 169 179 25 35 45 95 90 85 80 75 70 105 110 120 130 135 140 150 160 100 8-29-8 9 Dual Rod Cylinder: Basic Type Series CXS Dimensions

CXS

CXSM6 0.5 0 0.01 20 40 60 80 100 32 Weight m (kg) Overhang l (mm) 25 Graph (9) Up to 50 st 0.1 20 0.05 V = Up to 100 mm/s V = Up to 300 mm/s 0.05 0.04 15 10 0.03 0 0.01 Weight m (kg) 20 40 60 80 100 Overhang l (mm) 0.02 Graph (12) V = Up to 400 mm/s; Up to 30 st 2 CXSM CXSL 1 CXSL6 CXSM6 0 0.01 20 40 60 80 100 Weight m (kg) Overhang l (mm) 32 25 0.1 20 0.05 15 10 0 0.01 20 40 60 80 100 Overhang

CXS

60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) CXSJM CXSJL Graph (15) V = Over 400 mm/s; Up to 100 mm stroke CXSJM CXSJL Graph (14) V = Over 400 mm/s; Up to 75 mm stroke 1 1 Weight m (kg) Weight m (kg) 32 32 0.1 0.1 25 25 20 20 10 15 15 0.01 0.01 0 20 40 100 60 80 0 20 40 100 60 80 Overhang L (mm) Overhang L (mm) 8-28-9 9 Series CXS Courtesy of Steven Engineering, Inc.-230 Ryan

AC Servo Motor Driver (Network card type ）

PF50 100 5 11 5.

Free Mount Cylinder

, 90, 100 Weight/( ): Denotes the values with D-A93.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350 kPa 10 70 kPa 70 kPa 350 kPa 00 20 40 60 80 100 Flow [L/min] Flow [L/min] Flow Rate Characteristics (Reference Data) PF2M710(-L) PF2M705(-L) PF2M725(-L) 10 L/min 5 L/min 25 L/min 12 10 8 6 4 2 0 0 2 4 6 8 10

Integrated Controller

/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 mm/s2 5000 mm/s2 0 0 Speed: V [mm/s] 140 Speed: V [mm/s] 12 Easy to Operate EQFSH Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) EQFS40HH/Ball Screw Drive Horizontal/Lead

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

7ND9071en

No, Yes MENU 2 Signal Direction Open, Close 3 Position Limit Low 0.0% [0..100%] METHOD 4 Position Limit High 100.0 % [0..100%] 5 Travel Rate Open 0.0 %/s [0..1000%/s] Editable variable 6 Travel Rate Close 0.0 %/s [0..1000%/s] 7 Low Cut-off 2.0 % [0..100%] Read-only variable 8 High Cut-off 100.0 % [0..100%] 9 Split Range Low 0.0 % [0..100%] in ND9000HT only Split Range High 100.0 % [0..100%

ITV

Count ARP Pressure Characteristics Flow Characteristics Set pressure: 10 kPa IR 0 1 10 kPa 20 kPa Output deviation factor (% F .S.) 20 IRV 0.5 40 kPa Set pressure (kPa) 40 VEX Out 60 kPa 60 0 SRH Return 80 kPa 80 SRP 0.5 100 kPa 100 SRF 100 80 60 40 1 4 20 0 1 1.5 0.5 2 2.5 3 3.5 120 VCHR Supply pressure (kPa) Flow rate (L/min (ANR)) ITV ITV IC ITVX PVQ VEF VEP VER VEA VY1 VBA VBAT AP100

Basic type / Direct mount type Series CY3B/CY3R

Caution Theoretical Cylinder Thrust 6, 10 15, 20, 25, 32, 40 50, 63 63 63 1200 40 40 1100 H 3000 100 90 80 70 60 50 40 30 20 10 Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) Theoretical thrust (holding force) (N) Bore size 10 Bore size 2500 1000 900 800 700 10 50 50 H 32 32 2000 1500 600 25 25 500 400 300 200 100 1000 6 6 20 20 15 15 500 0 0.1 0.2 0.3 0.4 0.5