AC

0.28 16 0.9 25 1.4 590 33 5 0.28 0.16 0.13 0.007 0.11 1%F.S. 0.5%F.S. 16 0.9 25 1.4 36 2.0 60 3.3 70 3.9 36 2.0 60 3.3 70 3.9 130 160 180 670 37 330 18 0.56 7.4 Effective area Cv factor 7.2 8.9 10 0.41 0.19 0.25 0.35 0.55 AC Weight (kg) (1) 0.75 1.5 2 4 Hysteresis (2) 2.5%F.S. 1%F.S. 1%F.S. 3%F.S. 1.5%F.S. 1%F.S. 5%F.S. 2%F.S. 2%F.S.

HRX-OM-X084

Ambient temp. 500 Heating capacity [W] Heating capacity [W] 400 40 40 400 32 32 300 300 25 25 5 5 200 200 100 100 0 0 10 15 20 25 30 35 40 10 15 20 25 30 35 40 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9-11 Heating capacity (HRR010-A-20-) 9.5.4 HRR010-W-20400 400 Facility water temp.

e

M1 M2 M3 m1 m2 m3 E-MY2C 16 25 16 25 16 25 5 18 16 14 4 3.5 13 35 35 30 14 10 LJ1 LJ1 7 15 13 13 6 7 E-MY2H 28 32 30 30 26 26 LG1 LG1 46 20 18 18 55 46 E-MY2HT 100 38 35 35 120 100 Maximum Load Mass LTF LTF The above values are the maximum allowable values for moment and load mass.

VQ4000

44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner D side mounting D

JXCx-OMT0023

5 -16 5.7 Parameter mode 5 -18 5.7.1 Parameter mode transition 5 -18 5.7.2 Operation example 5 -19 5.8 External I/O signal display 5 -21 5.9 Output signal (DO) forced output 5 -24 5.10 Test operation mode 5 -25 5.10.1 Mode change . 5 -25 5.10.2 Jog operation . 5 -26 5.10.3 Positioning operation . 5 -27 5.10.4 Motor-less operation . 5 -29 5.10.5 Forced tough drive operation . 5 -30

MY2

5@8 @7 %5!

AC Servo Motor Driver (CC-Link Type ）

OPERATION 5 1 to 5 -60 5.1 Switching power on for the first time . 5 2 5.1.1 Startup procedure . 5 2 5.1.2 Wiring check . 5 3 5.1.3 Surrounding environment . 5 4 5.2 Startup . 5 5 5.2.1 Power on and off procedures . 5 5 5.2.2 Stop . 5 5 5.2.3 Test operation. 5 6 5.2.4 Parameter setting . 5 7 5.2.5 Point table setting . 5 8 5.2.6 Actual operation . 5 8 5.3 Driver display . 5 9 5.4 Automatic

MQQ

Air filter (5 m or less) 6 (Standard only) 10 16 20 25 MQML Standard type 6: 0.02 to 0.7 0.5 to 1000 10 to 25: 0.005 to 0.7 When using a solenoid valve, use a metal seal type (Series VQ/VQZ/SQ, etc.). 5 to 3000 MQMLH 0.01 to 0.7 High speed/frequency 10-5-2 10-5-3 3 Series MQQ/MQM 10-5-4 4 Series MQQ/MQM Specific Product Precautions 1 Be sure to read before handling.

MQQ

Air filter (5 m or less) 6 (Standard only) 10 16 20 25 MQML Standard type 6: 0.02 to 0.7 0.5 to 1000 10 to 25: 0.005 to 0.7 When using a solenoid valve, use a metal seal type (Series VQ/VQZ/SQ, etc.). 5 to 3000 MQMLH 0.01 to 0.7 High speed/frequency 10-5-2 10-5-3 3 Series MQQ/MQM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

5 !

Rotary Actuator

0 0.030 30 80 92 72 70 20 35 3 50 M12 x 1.75 depth 13 5 199 (243) 1.5 5 29.5 33 186 (230) 142 22.5 23.5 13 9 43.5 19 25 12 6 0 0.030 40 100 112 85 85 25 40 4 60 M12 x 1.75 depth 14 5 259 (325) 1.5 5 39.5 33 245 (311) 172 28 25 14 10 43.5 29 25 12 8 0 0.036 45 Note) A parallel key is included in the same package, (but not assembled).

Shock Absorbers and Rate Controls

Po.l l{lntel Itodel (Rell f( FH RD nt 5A s0 Boh Sizew4l (s) itlllitilxl ,5 NI210{9141 trR)0rMl.l5 5.5 o < 41.3 50.8 44.528.6 [5 RFlll36rl.5 Nl2t293r?9 .R)0EMt.25 5.5 9.5 4t.3 58.844.5?8.6 M5 30 Prtl!+-l2 M5t?

Electric Actuators

5 !4 !3 e u !

HRX-OM-Q026

10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-10: Cooling Capacity (HRSH250-A-20/40-) 8.4 Cooling Capacity HRSH Series 8-14 HRX-OM-Q026 Chapter 8 Documents 8.4.5 HRSH300-A-20/4035 Ambient temperature: 32 oC 30 25 Ambient temperature: 43 oC Cooling capacity [kW] Ambient temperature: 45 oC 20 15 10 5 0 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Fig. 8-11:

XL

Electrical entry G Grommet C Conduit T Terminal D DIN terminal XLS 25 5 G Without control power supply XLS 25 P 1 G With control power supply High vacuum angle valve Bellows pressure balance, 2 stage voltage switching type Valve size Electrical entry G Grommet 16 25 KF16 KF25 Voltage 1 2 100VAC 200VAC Control power supply 5 24VDC P With control power Warning (1) In case there is no control

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

63 246 106 20 10 44.5 40 77 25 90 114 24 140 103 53 11 1/4 12.5 43 30 18 depth 6 80 299.5 135 25 10 44.5 50 98 25 110 138 28 164.5 132 54 13 1/4 12.5 49 40 20 depth 6 Bore size (mm) S T U V W WB X Y 24 50 16 3.1 7.2 15.5 72 32 5 10 24.5 63 18.5 3 8.8 16 87.5 38.5 5 10 24.5 80 21 3.7 9 19 109 49 5 12.5 10-9-20 Series RSH Series RS1H & & ' " ( " % RSQ !

Best Pneumatics Vol. 14

AD37 AD37N(5) AD48 AD48N(5) AD47 AD47N(5) AD48 AD48N(5) Float type auto-drain N.O.

Refrigerated Air Dryers Series IDF/IDU

VDC, 5 A Error signal ... 220 VAC, 1 A 24 VDC, 0.5 A Minimum current value: 20 V, 5 mA (AC/DC) for operating and error signals.

AC Servo Motor Driver (CC-Link Type ）

OPERATION 5 1 to 5 -60 5.1 Switching power on for the first time . 5 2 5.1.1 Startup procedure . 5 2 5.1.2 Wiring check . 5 3 5.1.3 Surrounding environment . 5 4 5.2 Startup . 5 5 5.2.1 Power on and off procedures . 5 5 5.2.2 Stop . 5 5 5.2.3 Test operation. 5 6 5.2.4 Parameter setting . 5 7 5.2.5 Point table setting . 5 8 5.2.6 Actual operation . 5 8 5.3 Driver display . 5 9 5.4 Automatic

0.4

Rc N NPT VQZ T NPTF F G SQ In the case of alone Sub-plate Terminal block Port size VFS 02 PW VQ2000 1/4 02 VFR Dimensions VQ7 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1-02 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5