CLS

500 400 300 200 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed:

MXS Series Air Slide Table

0.03 0.06 MXS2075 0.020 MXS2030 0.02 0.04 MXS2020 0.015 MXS2050 MXS2040 MXS2010 0.010 MXS2030 MXS2020 MXS2010 0.01 0.02 0.005 100 200 300 0 0 0 100 200 300 160 120 80 40 240 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 25 25 25 Lr=154mm 0.040 0.07 0.05 MXS25-125 MXS25-150 MXS25-100 0.035 MXS25-150 MXS25-75 MXS25-50 MXS25-40 MXS25-30 MXS25-20 MXS25-10 0.06 MXS25

MTS

0 40 60 80 100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) Graph (21) Stroke: Up to 200 stroke Graph (17) Stroke: Up to 200 stroke 10 20 10 20 2 3 4 5 2 3 4 5 Weight W (kg) Weight W (kg) 40 40 32 32 1 1 0.5 0.4 0.3 0.2 0.5 0.4 0.3 0.2 25 20 25 20 0.1 0.1 100 120 140 160 180 200 0 40 60 80 100 120 140 160 180 200 0 40 60 80 20 20 Overhang

CXWM/CXWL

Bore size/Stroke (mm) Data 10 25, 50, 75, 100 16 25, 50, 75, 100, 125, 150, 175, 200 End lock 20 25, 50, 75, 100, 125, 150, 175, 200 25 25, 50, 75, 100, 125, 150, 175, 200 R End lock 32 (25), 50, 75, 100, 125, 150, 175, 200 Nil None Note 1) For (25) stroke, the shock absorber is mounted on a single side of the plate.

SMC Pneumatic Clean Series

3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 20 25 32 40 50 63 80 100 100 Non-lube Double acting, Available double rod 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Suction flow rate of vacuum suction type (Reference values) Specifications Bore size (mm) Item 20/25/32/40/50/63/80/100 Bore size Suction flow rate l/min (ANR) 20/25/32/40 50/63/80/100 1.5MPa

Vacuum Ejector Series ZM

setting (ZSE1) 2 outputs, without analog output, 3 rotation setting (ZSE1) 2 outputs, without analog output, 200 setting (ZSE1) 1 output, analog output, 3 rotation setting (ZSE1) 1 output, analog output, 200 setting (ZSE1) 1 output, without analog output, 200 setting, PNP output (ZSE1) Note) When the product is used for the manifold, the exhaust air of the operating ejector may enter the

Modular F.R.L. Unit

G 30 41 41 50 50 H 24 35 35 40 40 B 132 184 187 222 224 E 41.5 55 55 72.5 77.5 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 AC20C AC25C AC30C AC40C 50 71 71 88 88 2 Note 1) 80 80 80 105 105 126 167 167 220 235 114 143 146 183 185 26.5 28 31 36 36 0 3.5 3.5 3 AC40C-06 Note 1) For AC20C only, the position of the pressure gauge is above the piping center.

Compact Guide Cylinder Series MGQ

2 2 2.5 2.5 1 1 1 1 1.5 1.5 80 90 100 110 140 170 5 10 10 10 15 15 100 110 124 132 166 200 M8 x 1.25 11 11 12.5 15 18 21 16 17 17 19 21 25 E DB A 50 st or less 53 54 60 61 84 89 Bore size (mm) Bore size (mm) 32 40 50 63 80 100 MGT A DB E M8 x 1.25 Over 50 st 90 90 102 102 143 153 50 st or less 5.5 0 4 0 9.5 5 Over 50 st 42.5 36 46 41 68.5 69 M10 x 1.5 32 40 50 63 80 100 20 20 25 25 28 36

Modular F.R.L. Unit

77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L3 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L1 41.5 55 55 72.5 77.5 L2 43 57 57 75 80 L3 61 76 76 99 104 AC20C AC25C AC30C AC40C AC40C-06 Attachment Model L1: Dimensions from the end of the IN side to the center of the mounting hole for the first bracket.

Ejector Valve Unit Series ZYY/ZYX 1

(OUT1: Red, OUT2: Green) Setting trimmer rotation angle 3 turns 200 degrees 3 turns 200 degrees 3 turns 200 degrees 200 degrees 17 mA or less (When 24 VDC is ON) 25 mA or less (When 24 VDC is ON) 17 mA or less (When 24 VDC is ON) Current consumption 0.2 MPa Max. operating pressure Note 1) When using an ejector, there is no problem if pressure of 0.5 MPa is applied for 1 second or less.

Process Valve Series VNA

5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 Equivalent size Note 1) No freezing Note 2) This product cannot be used for water applications.

SYJ300/500/700

Station n L1 L2 L3 L4 Station 20 341 328 304 296 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 Station 2 53 40 16 8 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 4-4-27 28 Series SYJ500

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L Dimension n: Stations L n 2 148 137.5 106.4 24 80 3 160.5 150 122.4 22.5 96 4 173 162.5 138.4 20.5 112 5 185.5 175 154.4 19 128 6 210.5 200 170.4 23.5 144 7 223 212.5 186.4 21.5 160 8 235.5 225 202.4 20 176 9 248 237.5 218.4 18 192 10 273 262.5 234.4 22.5 208 11 285.5 275 250.4 21 224 12 298 287.5 266.4 19 240 13 323 312.5 282.4 23.5 256 14 335.5 325 298.4 22 272 15 348 337.5 314.4 20 288

Ionizer

(Standard pitch: 80 mm) Note) Maximum bar length is 1260 mm. The air purge nozzles are arranged at an 80 mm-pitch. X15 Model with 40 mm-pitch emitter cartridges High-voltage/control unit detachable short type Model with 80 mm-pitch emitter cartridges X210 A short type ionizer (full length of 180 mm and 220 mm) can be installed in a small space.

Guide Cylinder/Compact Type Series MGC

, 125, 150 200, 250, 300 MGT 125 107 19 16 160 176 110 125 9 12 85 165 M8 37 160 40 70 95 60 38 150 142 25 19 190 210 115 135 11 12 95 200 M10 42 194 45 82.5 115 75 50 Bore size (mm) P Note 2) Q R S T U V W WH X Y Z O 20 25 32 40 50 86 80 M6 x 1 M5 x 0.8 21 12 26 12 40 36 30 140 23 M6 x 1 M5 x 0.8 21 12 31 13 98 47 44 37 80 153 25 M6 x 1 1/8 21 12 38 16 112 53 50 37 82 161 28.5 M8 x 1.25

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

100 120 140 160 180 200 0.1 0 40 60 80 100 120 140 160 180 200 20 20 Overhang L (mm) Overhang L (mm) MXJ Graph (19) Stroke: Up to 100 stroke Graph (15) Stroke: Up to 100 stroke MXP 20 20 10 10 MXY 3 4 5 3 4 5 40 Mass W (kg) Mass W (kg) MTS 40 2 2 32 32 1 1 25 20 0.5 0.4 0.3 0.5 0.4 0.3 25 20 16 16 0.2 0.2 12 12 0.1 0.1 0 40 60 80 100 120 140 160 180 200 20 20 0 40 60 80 100 120 140 160 180

Refrigerated Thermo-chiller

VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 30 19 Refer to page 94.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW MY1MW m 200 200 190 (kg) (kg) 190 (2100) (2100) (2100) (2100) 180 180 l 170 170 160 160 150 150 140 140 m l (2400) (2400) (2400) (2400) (2400) (2400) 130 130 (1800) (1800) (1800) (1800) m 120 120 Weight (m) Weight (m) 110 110 MY1MW63 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) l l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 80 80 MY1MW50 MY1MW50 MY1MW50 Caution

Auto Switch Guide

(Band) Cylinder series Applicable bore size (mm) 200 40 180 160 32 140 50 20 25 63 80 100 125 CDV3, CDVS CE2, CNA CDL1 CDS1 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M BS1 -125 BS1 -140 BS1 -160 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1 -04M RHC BMB1 -050 BMB1 -063 BMB1 -080 BMB1 -100 BMB2 -032 BMB2 -040 MDB 7-9-41 42 Technical Data 2: How to Mount and Move the Auto Switch Mounting