VS 8-2/VS 8-4

Note 1) 1-station addition 1, 3 (P, R) 2, 4 (A, B) 12, 14 (PE, X) Mass (g) 1-station manifold Type S kit: Serial transmission Gateway-type (EX500) For I/O (EX250) For I/O (EX600) For Output (EX126) F kit: D-sub connector P kit: Flat ribbon cable connector T kit: Terminal block box L kit: Lead wire M kit: Circular connector 1 (P) 5 (R1) 3 (R2) 3/8" Built-in silencer (Option) S R 90 250 300

Adsorption Plate

Adsorption surface size SP1330 SP1430 SP1530 SP1630 150 x 150 180 210 20 150 82.5 97.5 120 16 200 x 200 230 260 20 200 107.5 122.5 145 25 250 x 250 280 310 25 250 132.5 147.5 170 36 300 x 300 330 360 25 300 157.5 172.5 195 49 754 SP Series Adsorption Plate Square/SP230 SP SP A D ZCUK Rc 1/8 (Suction port) C AMJ AFJ AMV ZH -X185 B D F Related Products G E 4 x 5.5 drill Element fixing nut N

Electric Actuator / Slider Type 《 AC Servo Motor 》

Recommended Value of acceleration time constant of Point table No.1 [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Point table No.1 Initial value Recommended Value Home position return acceleration time constant (msec) *5 0 1000 600 300 1200 800 400 1500 1000 500 *5.

Electric Rotary Table

force (N) Size 16 25 32 40 16 25 32 40 141 452 707 1058 Up to 300 Up to 400 Up to 500 Up to 500 Up to 200 Up to 300 Up to 300 Up to 300 141 452 707 1058 AC Servo Motor Basic type Series LEY In-line motor type Guide rod type Series LEYG Guide rod type /In-line motor type Series LEYD Series LEYGD Dust/Drip proof compatible Dust/Drip proof compatible Series LEY Series LEY Series LEYG Series

Hygienic Design Cylinder Series HY

Standard Stroke Standard stroke (mm) Bore size (mm) 32 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500 40 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500 50 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500, 600 63 25, 50, 75, 100, 125, 150, 200, 250, 300, 400, 500, 600 Intermediate strokes of 1 mm each can be produced.

VM

(Option) Foot bracket and manifold mounting possible. 9.9 mm2 SA Maximum frequency (Mechanical operation type) 300 c.p.m. or less Not required (Use turbine oil class 1 ISO VG32, if lubricated.)

C85

With Rod Boot (mm) Item h AM C e f K KK 1 to 50 Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 109 M8 x 1.25 71 84 96 134 159 25 22 10 36 20 8 M10 x 1.25 74 87 99 112 137 162 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore

0.4

Bore size CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQ1101 Port size: 6 One-touch fitting 800 700 600 500

C85

With Rod Boot (mm) Item h KK 1 to 50 AM C e f K Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 M8 x 1.25 71 84 96 134 159 109 25 22 10 36 20 8 M10 x 1.25 74 87 99 137 162 112 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore

Air Slide Table

-100 MXQR25-125 MXQR25-150 0.06 0.08 MXQR25-30 MXQR25-150 MXQR25-50 MXQR25-30 MXQR25-50 MXQR25-125 0.08 0.06 MXQR25-20 0.04 MXQR25-20 0.04 MXQR25-10 0.04 0.02 MXQR25-10 0.02 0 0 0 100 200 300 400 500 100 200 300 400 500 800 200 400 600 Load (N) Load (N) Load (N) 7 Series MXQR Dimensions: MXQR 6 For detailed dimensions about the stroke adjuster, refer to Adjuster Options.

Compact Electric Actuator Series LG1

7.2 16.4 14.2 6.3 Aluminum alloy frame Slide screw 15.3 16.7 14.0 18.0 12.5 19.5 11.2 25.7 20.8 22.2 9.8 Stainless steel frame C Operating temperature range 5 to 40 (with no condensation) 300 10 mm Lead Horizontal specification Ball screw Maximum work load 100W N 300 20 mm Lead 150 Slide screw 20 mm Lead 500 10 mm Lead Ball screw Maximum speed Horizontal specification 1000 600 500 930

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied.

Table of Contents

AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900

Thermo-con

8.3 (210) SMC THERMO-CON 5.6 (142) HAZARDOUS VOLTAGE INSIDE WARNING Contact may cause electric shock,orburn.

Dual Rod Cylinder Series CXSJ/CXS

Stroke (mm) Up to 10 Up to 30 Up to 50 Up to 75 Up to 100 Max. speed (mm/s) Up to 100 Up to 300 Up to 400 Over 400 Up to 100 Up to 300 Up to 400 Over 400 Up to 100 Up to 300 Up to 400 Over 400 Up to 100 Up to 300 Up to 400 Over 400 Up to 100 Up to 300 Up to 400 Over 400 6 (7) (8) (9) 10 15 Selection graph 20 (10) (11) (12) (13) (14) (15) (17) (16) 25 32 The maximum speeds for 10 to 32 are

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Support Guide/11-LEFG Series

[mm] Dimensions [mm] Model L A B n D E F 11-LEFG25-S-50 180 57 160 4 20 11-LEFG25-S-100 230 107 210 Model L A B n D E F 11-LEFG25-S-450 580 457 560 10 4 480 35 11-LEFG25-S-500 630 507 610 11-LEFG25-S-550 680 557 660 12 5 600 11-LEFG25-S-600 730 607 710 11-LEFG25-S-150 280 157 260 11-LEFG25-S-200 330 207 310 6 2 240 11-LEFG25-S-250 380 257 360 11-LEFG25-S-300 430 307 410 8 3 360 11-LEFG25

VM

(Option) Foot bracket and manifold mounting possible. 9.9 mm2 SA Maximum frequency (Mechanical operation type) 300 c.p.m. or less Not required (Use turbine oil class 1 ISO VG32, if lubricated.)

MXQ

0 100 200 300 100 200 300 Load (N) Load (N) Load (N) 25 25 25 Lr = 200 mm 0.08 MXQ25-150 MXQ25-150 MXQ25-150 MXQ25-10 MXQ25-10 MXQ25-20 MXQ25-20 MXQ25-30 MXQ25-30 MXQ25-40 MXQ25-40 MXQ25-100 MXQ25-125 MXQ25-150 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-50 MXQ25-50 MXQ25-75 MXQ25-75 0.12 0.10 MXQ25-75 MXQ25-75 MXQ25-75 MXQ25-40 MXQ25-40 MXQ25-40 Table displacement amount

Air Slide Table Series MXQ

0 100 200 300 100 200 300 (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) 25 25 25 Lr = 200mm 0.08 MXQ25-50 MXQ25-75 MXQ25-10 MXQ25-20 MXQ25-30 MXQ25-40 MXQ25-150 MXQ25-40 0.12 0.10 MXQ25-75 MXQ25-125 MXQ25-100 MXQ25-75 MXQ25-40 MXQ25-150 MXQ25-100 MXQ25-100 MXQ25-125 MXQ25-150 Table displacement mm Table displacement mm Table displacement mm