XL

Electrical entry G Grommet C Conduit T Terminal D DIN terminal XLS 25 5 G Without control power supply XLS 25 P 1 G With control power supply High vacuum angle valve Bellows pressure balance, 2 stage voltage switching type Valve size Electrical entry G Grommet 16 25 KF16 KF25 Voltage 1 2 100VAC 200VAC Control power supply 5 24VDC P With control power Warning (1) In case there is no control

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

63 246 106 20 10 44.5 40 77 25 90 114 24 140 103 53 11 1/4 12.5 43 30 18 depth 6 80 299.5 135 25 10 44.5 50 98 25 110 138 28 164.5 132 54 13 1/4 12.5 49 40 20 depth 6 Bore size (mm) S T U V W WB X Y 24 50 16 3.1 7.2 15.5 72 32 5 10 24.5 63 18.5 3 8.8 16 87.5 38.5 5 10 24.5 80 21 3.7 9 19 109 49 5 12.5 10-9-20 Series RSH Series RS1H & & ' " ( " % RSQ !

Best Pneumatics Vol. 14

AD37 AD37N(5) AD48 AD48N(5) AD47 AD47N(5) AD48 AD48N(5) Float type auto-drain N.O.

Refrigerated Air Dryers Series IDF/IDU

VDC, 5 A Error signal ... 220 VAC, 1 A 24 VDC, 0.5 A Minimum current value: 20 V, 5 mA (AC/DC) for operating and error signals.

AC Servo Motor Driver (CC-Link Type ）

OPERATION 5 1 to 5 -60 5.1 Switching power on for the first time . 5 2 5.1.1 Startup procedure . 5 2 5.1.2 Wiring check . 5 3 5.1.3 Surrounding environment . 5 4 5.2 Startup . 5 5 5.2.1 Power on and off procedures . 5 5 5.2.2 Stop . 5 5 5.2.3 Test operation. 5 6 5.2.4 Parameter setting . 5 7 5.2.5 Point table setting . 5 8 5.2.6 Actual operation . 5 8 5.3 Driver display . 5 9 5.4 Automatic

0.4

Rc N NPT VQZ T NPTF F G SQ In the case of alone Sub-plate Terminal block Port size VFS 02 PW VQ2000 1/4 02 VFR Dimensions VQ7 4 89.4 (43.8) 2 x 4.5 (Mounting hole) 10.5 (A port) 10.5 (B port) Manual override Indicator light VQ210 0 1-1-02 37 5 45 121 <127.9> 22.4 15.5 77.2 Clamp screw M5 x 0.8 External pilot port 72.7 <76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5

Modular F.R.L. Units

-MLA [ISE35-N-25-M (Switch body only)] Digital pressure switch *5 NPN output, Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] PNP output, Wiring bottom entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output, Wiring top entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] *1 Assembly of a bracket and set nuts.

Rotary Actuator/Vane Type

26 59 30 50 47.5 29 22 8 0.005 0.020 16 0 0.043 2 9 12 1.0 33.5 14 4.5 M5 x 0.8 5.5 5.5 M5 x 0.8 21.5 4.5 52 42 29 69 40 63 53 36.3 30 10 0.005 0.020 25 0 0.052 3 10 20 39 20 5 M5 x 0.8 5.5 5.5 M5 x 0.8 25 5 64 52 38 85 80 A Free Mount Type Rotary Actuator with Angle Adjuster With Auto Switch CDRBU2WU Series Dimensions: Free Mount Type (With Auto Switch and Angle Adjuster) 10, 15, 20, 30

2–4

Mounting Bolt for CQM/Without Auto Switch Model C D Mounting bolt Model C D Mounting bolt Model C D Mounting bolt CQMB12-5 -10 -15 -20 -25 -30 CQMB16-5 -10 -15 -20 -25 -30 CQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CQMB32-5 -10 -15 -20 -25

LEC-OM02704CN

PC25 PD25 PC26 *COP5 C-5 PC27 PD30 PC28 *COP7 C-7 PC29 PC30 *DSS PC31 LMPL PC32 LMPH PC33 LMNL PC34 LMNH PC35 TL2 2 PC36 PC37 *LPPL PC38 *LPPH PC39 *LNPL PC40 *LNPH PC41 PC50 3 2 CN6 1 14 2 15 3 16 4 17 DOCOM 5 18 6 19 DICOM OPC PP NP 7 20 8 21 9 22 10 23 LG 11 24 12 25 LA LAR 26 LB LBR 13 LZ LZR 3 721-2105/026-000(WAGO) 45(20) 26.45 25 2.75 5 15.1 2.9 5.25 5 4.75 8 10.6 5.

MLGP

-9 9 Series MLGP Operating pressure 0.4 MPa Operating pressure 0.5 MPa or more Vertical Upward Mounting (Ball bushing bearing) MLGPL20, 25 (5) 30 Stroke or Less V = 200 mm/s (6) Over 30 stroke V = 200 mm/s 20 20 25 10 10 20 Load weight m (kg) Load weight m (kg) 5 5 25 20 1 10 50 100 200 1 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) MLGPL32 to 100 (8) Over 50 Stroke

MLGP

) MLGPL20, 25 (5) 30 Stroke or Less V = 200 mm/s (6) Over 30 stroke V = 200 mm/s 20 20 25 10 10 20 Load weight m (kg) Load weight m (kg) 5 5 25 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 1 10 50 100 200 1 10 50 100 200 Eccentric distance l1 (mm) Eccentric

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

A Bore size (mm) 32 40 50 63 80 100 125 H 0.5 0 0.1 C DH7 FH11 L M N P 15 32.5 10.5 22 10 14 30 6.6 45 10.5 5.5 5 38 12 25 12 16 18 35 6.6 55 11 5.5 5 51 15 21 20 46.5 27 16 40 9 65 15 6.5 5 56.5 15 32 16 21 23 45 9 75 15 6.5 5 70 27 72 18 36 20 25 45 11 95 18 10 5 89 18 41 20 25 30 55 11 115 18 10 5 40 110 25 50 30 37 60 13.5 140 20 10 7 100 Black color 81 Series CP96/C96 Dimensions

2 Phase Stepper Motor/Without Motor Brake Series LXS

5 9 0 Transfer load m (kg) Refer to page 304 for deflection data. 276 5 Phase Stepper Motor/With Motor Brake Series LXS Dimensions/LXSH5BD Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 5H9 10 D-5.1 through Refer to Cross section C-C, bottom view.

MXS Series Air Slide Table

M8 X 1 MXS-AS12-X11 15 30 D F MXS-AS12-X12 25 40 MXS-AS16 5 24.5 MXS16 Mounted to table 16.5 M5 X 18 19 M5 X 18 12 5 21 14 37 11 MXS-AS16-X11 15 34.5 M10 X 1 MXS-AS16-X12 25 44.5 Q MXS-AS20 5 27.5 MXS20 M12 X 1.25 21 M6 X 20 24 M6 X 20 13 6 25 17 13 45.5 MXS-AS20-X11 15 37.5 I MXS-AS20-X12 25 47.5 J H MXS-AS25 5 32.5 MXS25 MXS-AS25-X11 15 42.5 25.5 M8 X 25 M8 X 25 17 6 31 19 26.5 M14 X 1.5

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

35 20 4 20 6 33.6 8.5 7 M5 x 0.8 x 5l 30 thread depth 7 thread depth 4.5 2-4.3 through 2-8 counterbore depth 4.4 2-M5 x 0.8 4-M4 x 0.7 2-M4 x 0.7 thread depth 6 M5 x 0.8 x 10l CXS15 9 10 58 20 56 18 2-M5 x 0.8 45 25 5 30 8 48 10 10 M6 x 1.0 x 5l 38.5 thread depth 8 thread depth 5 Dimensions by Stroke (mm) Symbol SS Z ZZ Stroke 10, 15 20, 25 30, 35, 40, 45, 50 60, 70, 75 90, 100 25 30 20 15

CJ2X/CUX/CQSX/CQ2X/CM2X

, 32 40, 50, 63 CY1S, CY1L: 6 to 40 12, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion

Modular F.R.L. Unit

AD38 AD38NNote 5) AD48 AD48NNote 5) AD48 AD48NNote 5) Float type Note 4) auto drain N.C. AD27 AD37 AD37NNote 5) AD47 AD47NNote 5) AD47 AD47NNote 5) With back flow mechanism Filter regulator Note 1) Assembly includes a bracket and set nuts. Note 2) in part numbers for a round pressure gauge indicates a type of connection thread.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5 19.5 G 3/8 Electrical entry 39.1 5 x 1/4" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 43.8 53.6 < >: AC Note) When using this valve for IP65, mount a seal connector to the electrical entry. 560 VQ1000/2000 1021Semi-standard Different Number of Connector Pins F and P kits with the following number of pins are available besides

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

76.7> 70.7 3 R2 R1 5 X 12 P 1 (A, B port) 25 25 25 20 15.4 12 2.5 5 14.5 19.5 G 3/8 Electrical entry 39.1 5 x 1/4" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 43.8 53.6 < >: AC Note) When using this valve for IP65, mount a seal connector to the electrical entry. 560 VQ1000/2000 1021Semi-standard Different Number of Connector Pins F and P kits with the following number of pins are available besides