Vacuum Pad

/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B/N/T)01 ZP40 With three M3 bolts Buffer stroke () ZP50 40 50 63 80 100 125 Stroke 25 50 75 100 ZP63 With four M4 bolts ZP80 Buffer Specifications (Rotating) ZP100 With four M5 bolts Pad diameter 40 to 80 100, 125 ZP125 Stroke (mm) Spring reactive force 25, 50, 75 25, 50, 75, 100 At 0 stroke (N) 6.9 10 Note 1)

Vacuum Pad

/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B/N/T)01 ZP40 With three M3 bolts Buffer stroke () ZP50 40 50 63 80 100 125 Stroke 25 50 75 100 ZP63 With four M4 bolts ZP80 Buffer Specifications (Rotating) ZP100 With four M5 bolts Pad diameter 40 to 80 100, 125 ZP125 Stroke (mm) Spring reactive force 25, 50, 75 25, 50, 75, 100 At 0 stroke (N) 6.9 10 Note 1)

Electric Actuator

LER Symmetrical Type (L Type) Basic Type (R Type) In-line Motor Type (D Type) High Precision Type Basic Type Series LESHmR Series LESHmL Series LESHmD Series LERH Size Rotation angle () Size Rotation angle () 310, 180, 90 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 Stroke 50, 75 50, 100 50, 100, 150 Size 8 16 25 10 30 50 10 30 50 310, 180

CATALOG VC10

SERIES 15 FLOW CHARTS 400 400 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 50 FLOW CHARTS 96 SERIES 70 FLOW CHARTS 400 400 SERIES 40 FLOW CHARTS 1/32 1/32 3/64 3/64 1/16 1/16 3/32 3/32 1/8 1/8 ORIFICE-INCH ORIFICE-INCH 100 100 50 50 PRESSURE PRESSURE DROP ROP

MY1

Allowable Moment MY1HT/M1 MY1HT/M3 1000 1000 500 500 300 300 Moment (Nm) Moment (Nm) MY1HT63 MY1HT63 100 100 MY1HT50 MY1HT50 (2) (4) (1) (3) 50 50 40 40 30 30 20 20 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed (mm/s) Piston speed (mm/s) 8-11-93 89 Mechanically Jointed Rodless Cylinder High Rigidity/High Precision Guide Type Series MY1HT 50, 63 How to Order MY1HT 50

TABLE OF CONTENTS

MODEL EW53 3-Way Normally Closed ATMOSPHERE EXHAUST EW53GG8DCCP EW53HH8DCCP EW53HJ8DCCP EW53JJ8DCCP EW53KK8DCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055 .075 .150 .020 .048 .075 .075 .150 DE-ENERGIZED ENERGIZED MODEL EW53 3-Way Normally Closed WITH PIPED EXHAUST ** EW53GG8XCCP EW53HH8XCCP EW53HJ8XCCP EW53JJ8XCCP EW53KK8XCCP 250 150 150 100 50 250 150 150 100 50 .022 .055 .055

AC Servo Motor Driver (Pulse input type/Positioning type ）

The following graphs show overload protection characteristics. 1000 1000 Operating Operating Operating 100 100 Operation time [s] Operation time [s] Servo-lock Servo-lock 10 10 1 1 0.1 0.1 100 200 300 350 0 50 150 250 100 200 300 400 0 50 150 250 350 (Note 1, 2) Load ratio [%] Load ratio [%] (Note 1, 2, 3) LECSB2-T5 LECSB2-T7, LECSB2-T8, LECSB2-T9 Note 1.

Table of Contents

/60 Hz 200 VAC 50/60 Hz 100 VAC 50/60 Hz Port size Rc Valve size 1 to 4 1 2 3 Note) N.C.

AC Servo Motor Driver (Network card type ）

The following graphs show overload protection characteristics. 1000 1000 Operating Operating 100 100 Operation time [s] Operating Operation time [s] Servo-lock Servo-lock 10 10 1 1 0.1 0.1 100 200 300 350 0 50 150 250 100 200 300 400 0 50 150 250 350 (Note 1, 2) Load ratio [%] Load ratio [%] (Note 1, 2, 3) LECSN-T5 LECSN-T7, LECSN-T8, LECSN2-T9 Note 1.

Air Cylinder

, 75, 100, 125, 150 1000 25 25, 50, 75, 100, 125, 150, 200 Air cushion Double acting, Single rod Symbol 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250, 300 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

15

4 100 NY M4 x 0.7 8 70 50 4 100 NX M5 x 0.8 9 63 40* 4.5* 103.2 NW M5 x 0.8 9 70 50 5 101 NV M4 x 0.7 8 63 40 4.5* 103.2 NU M5 x 0.8 9 70 50 5 101 NT M5 x 0.8 9 70 50 4 100 NM1 M4 x 0.7 8 47.14 38.1* 4.5* 87 NM2 M4 x 0.7 8 50 36* 4.5* 94 * Dimensions after mounting a ring spacer (Refer to page 818.) 816 Electric Actuator/Slider Type Belt Drive LEFB Series Motorless Type Refer to the Motor

C95

speed: V (mm/s) Maximum speed: V (mm/s) Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 100 80 500 400 300 500 400 300 63 63 63 100 80 200 200 50 40 50 50 100 100 Load weight: m (kg) Load weight: m (kg) 63 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 300 400 500 1000 1 100 200 300 400 500 1000 200 Maximum speed: V (mm/s) Maximum speed:

CL

Bore e f 1 to 50 68 72 72 77 51 to 100 81 85 85 90 101 to 150 93 97 97 102 151 to 200 106 110 110 115 201 to 300 131 135 135 140 301 to 400 156 160 160 165 401 to 500 185 185 190 51 to 100 25 25 25 25 101 to 150 37.5 37.5 37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 1 to 50 12.5 12.5 12.5 12.5 20 25 32 40 68 72 72 77 35 35 35

MLGP

50 50 Load weight m (kg) Load weight m (kg) 40 40 50 50 40 40 32 32 10 10 25 25 32 32 20 20 25 25 20 20 1 1 10 50 100 200 10 50 100 200 Eccentric distance l1 (mm) Eccentric distance l1 (mm) (16) Over 50 Stroke V = 400 mm/s (15) 50 Stroke or Less V = 400 mm/s 100 100 100 100 50 50 80 80 63 63 Load weight m (kg) Load weight m (kg) 50 50 10 10 40 40 32 32 25 25 1 20 20 1 10 50 100 200 0.7 10

MLGP

s (24) Over 50 Stroke V = 400 mm/s 100 100 100 80 100 80 63 63 10 Load weight m (kg) 50 50 10 40 40 32 1 32 2 10 100 200 0.3 10 50 50 100 200 Eccentric distance 1 (mm) Eccentric distance 1 (mm) 9-11-14 14 Compact Guide Cylinder with Lock Series MLGP Horizontal Mounting (Slide bearing) MLGPM20 to 100 (25) l2 = 50 mm V = 200 mm/s (26) l2 = 100 mm V = 200 mm/s 50 50 100 CL 100 100 100 80 CL1

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Weight Product Weight: Top Mounting Type [kg] Series LEYG25M LEYG32M Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Weight [kg] 1.7 1.9 2.2 2.6 3.0 3.3 3.6 3.1 3.4 4.0 4.7 5.3 5.7 6.2 Series LEYG25L LEYG32L Stroke [mm] 30 50 100 150 200 250 300 30 50 100 150 200 250 300 Weight [kg] 1.7 1.9 2.2 2.6 2.9 3.2 3.4 3.1 3.4 3.8 4.5 5.0 5.5 5.9 Product Weight: In-line Motor Type

Table of Contents

page 12 for dimensions. 200, 220, 230, 240 VAC (50 Hz), 200 to 260V (60 Hz) 2 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase 380, 400, 415 VAC (50 Hz), 380 to 420V (60 Hz) 3 Compound 420, 440, 480 VAC (50 Hz), 420 to 520V (60 Hz) 4 Please refer to page 11 for dimensions.

Electric Actuator with Integrated Guide

point distance mm LTF8 Horizontal Lateral 10 10 Load 100% Load 100% Load 50% 1000 Load 50% 10 Amount of deflection m Amount of deflection m 100 1000 10 100 1 No load 10 No load 0.1 1 0.01 100 1000 100 1000 Load point distance mm Load point distance mm w w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

CG1

Additional weight0.09/50 stroke Cylinder stroke100 stroke 0.35+0.09 X 100/50=0.53kg JIS symbol Accessories Stroke Standard stroke (mm) Bore size (mm) Basic Mounting Standard Rod end nut Single knuckle joint 20 25/32 25, 50, 75, 100, 125, 150 25, 50, 75, 100, 125, 150, 200 Option Double knuckle joint (with pins) 25, 50, 75, 100, 125, 150, 200, 250, 300 Order Made Made to order 40/50/63

Cylinder with Lock

P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg] Load mass m [kg] 50 50 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] 6 Cylinder with Lock Double Acting, Single Rod 32, 40, 50, 63, 80, 100 MWB Series RoHS How to Order 50 B 40 MWB With auto switch MDWB M9BW B 40 50