Process Pump Series PA3000/5000/PAX1000 Series PB1000 supply By-pass Strainer Silencer Throttle Transfer fluid 4 Series PA3000/5000 Process Pump Automatically Operated Type Dimensions/Automatically Operated Type (mm) 1in = 25.4mm PA3000 68 85 105 4-7 7.5 (185) Reset button FLUID OUT 3/8 5.5 AIR SUP (pilot air supply port) 1/4 FLUID OUT PROCESS PUMP AIR SUP 2 115 90 74.5 FLUID I N AIR EXH AIR EXH (pilot air exhaust port) 44.5 3 32 1/4 100 130
Circuit example (1) 3 port solenoid valve Process pump PAX112 Regulator Ball valve Air filter FLUID OUT AIR SUP FLUID IN Air supply AIR EXH Strainer Silencer Throttle Transfer fluid 14 Series PAX1000 Dimensions 4-M8 (M6 hexagon socket head screw can be inserted) 10.5 105 7.5 Mounting hole detail 69 Reset button 100 125 23 RESET (175) AIR SUP (pilot air supply port) Rc 1/4 FLUID IN Rc 1/4
55 36.0 IDW65N 141 65 7 43.5 IDW85N 85 165 1" 55.8 IDW105N 105 200 20.5 63.5 IDW135N 135 224 1-1/4" 79.5 IDW175N 175 271 55.8 IDW215N 215 378 13.5 63.5 Duplex 1-1/2" IDW275N 275 422 79.5 IDW365N 365 510 1.
Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63
Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63
R S (32) U G1/2 L L G1/2 H E H E U F F 2 P 2 P G G Port size Port size Faston terminal A B C D K J I 1/4 Exhaust port 11 Q R S 12.5 L H E U F G 2 P Port size Dimensions (mm) Model Port size P A B C D E F G H I J K L S VXF24A< 80 118 23.5 62.5 39 16.5 30 2 136 112 112 78 185 40 Conduit terminal Conduit Faston terminal Model Q R U T Q R 99.5 20 169 68.5 47.5 20 VXF24A< Q R U 169 23 20 175
15.6 25 28 38 51.5 32.4 50 27 57 53 24 33 ZPT32B-6-A10 32 34 29 38 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 Model G E F E F 20 25 32 Model G ZPTB10-6-A14 E F F E F E 60 129 64 133 ZPTB20-6-A14 ZPTB10-6-A10 50 70 132 74 136 44 82 44.5 82.5 49.5 87.5 23 ZPTB30-6-A14 ZPTB20-6-A10 80 142 84 146 54 120 54.5 120.5 59.5 125.5 51 ZPTB50-6-A14 ZPTB30-6-A10 100 187 104 191 75 64 130
110 56 175 93 8.5 30 2.3 2.3 30 3-6.3 3-6.3 23 20 26 23 20 33 29 9 33 29 9 26 99 79 79 99 126 R 3/8 R 3/8 126 JIS F 8801 A type 20a Cable gland JIS F 8801 A type 20a Cable gland 16-9-7 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.
H G 5H9 depth 5 +0.030 0 33.5 6 5H9 +0.030 0 depth 5 (mm) N G H NN J M Z ZZ Model MXF20-30 4 29 30 4 57 91 91 104 MXF20-50 4 36 45 4 77 113 113 126 MXF20-75 6 40 45 6 125 162 162 175 MXF20-100 6 59 60 6 175 211 211 224 144 Low Profile Slide Table Series MXF Auto Switch Proper Mounting Position (Detection at Stroke End) Reed Auto Switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V (mm) B E
Use these holes during reinstallation after the table has been removed for the maintenance of an identical product. 130 Series MXQ Specific Product Precautions 3 Be sure to read before handling. Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions.
Relationship between boundary value and display value of the level bar/switch point value bar and process data Distance type Level 1 Level 2 Level 3 Level 4 Level 4 60 or less (60 to 36) X+30 X+25 X+20 ISA-F (35 to 31) (30 to 26) (25 to 21) ISA3-G 300 or less X+150 X+125 X+100 Display (300 to 176) (175 to 151) (150 to 126) (125 to 101) value ISA3-H 500 or less X+300 X+250 X+200 Constantly
Foot type Flange type Knuckle joint Clevis type Flexible mounting: Possible to mount on all surfaces except for the one with ports Bottom mounting type Side mounting type Axial surface mounting Series Variations Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Extension lock 32 MLU 40 Retraction lock 50 Features 2
Inch sizes 1/4", 5/16" 3/16" 5/32" 3/16", 1/4" 1/8", 5/32", 3/16", 1/4" l/min (ANR) {Nl/min} Flow rate 12 38 7 Controlled flow Effective area mm 0.2 0.6 0.1 l/min (ANR) {Nl/min} Flow rate 460 100 290 130 230 Free flow Effective area mm 7 1.5 4.5 2 3.5 Note) Flow rates are values measured with pressure at 0.5MPa and temperature at 20C.
0.02 Ground ball screw Corporation 1000 Yaskawa Electric 100W 0.05 Rolled ball screw Corporation Features 1 Simplified Selection Flow Chart Series LJ1/LG1 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Clean room Dust seal Deflection TSUBAKI 100 200 300 400 500 600 700 800 900 1000 1200 1500 CABLEVEYOR LJ1S101SC 88 128 116 94 to 300 146 LJ1S202SC 90 130
Foot type Flange type Knuckle joint Clevis type Flexible mounting: Possible to mount on all surfaces except for the one with ports Bottom mounting type Side mounting type Axial surface mounting Series Variations Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 25 Extension lock 32 MLU 40 Retraction lock 50 Features 2
0.8 GA RA H1 GA 2-P (Rc, NPT, G) MM Rod side air port Relief port Relief port Head side air port RA MM H1 Width across flats B1 1 2 1 2 Width acros flats B1 D D E-0.05 0 E-0.05 0 I H + Stroke K A AL AL C0.1 KA H A K F F 8-J S + Stroke ZZ + 2 Stroke NA (mm) 26 20 16.5 14 C 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 13<10> 20<18> 20 20 GA 50 40 40 35 H 8 6 6 5 H1 19 17 17 13 B1 47 38 31 26 I 187 175
Piston rod Standard stroke (mm) Locking direction Bore size (mm) Series 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 LOCK LOCK Load direction Fulcrum FREE 25 Extension lock 32 MLU Pivot 40 Retraction lock Clearance 50 9-13-2 9-13-3 3 Series MLU Specific Product Precautions 1 Be sure to read before handling. Selection Selection Warning Allowable Load Weight 1.
31-1.) 220 188 157 126 94 63 OUT 314 20 10 165 142 118 94 71 47 IN 236 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Symbol Specifications -X42 Anti-corrosive specifications for guide unit Standard Stroke Standard stroke (mm) Model MXF8 10, 20, 30 MXF12 20, 30, 50 MXF16 30, 50, 75 MXF20 30, 50, 75, 100 Weight (g) Standard stroke (mm) Model 100 75 50 30 20 10 MXF8 170 130
CE marked CE marked (EMC directive, RoHS directive), Standard (EMC directive, RoHS directive) UL (CSA) Weight 170 g 175 g 170 g 1: All unused connectors must have a seal cap fitted. -32No.EX-OMZ0024 Dimensions EX600-ED2 -33No.EX-OMZ0024 EX600-ED2-2 -34No.EX-OMZ0024 EX600-ED2-3 -35No.EX-OMZ0024 EX600-ED3 EX600-ED3-2 -36No.EX-OMZ0024 EX600-ED3-3 -37No.EX-OMZ0024 EX600-ED4/ED5 -38No.EX-OMZ0024
X4 X2 X4 X2 X4 Y4 Y4 Y4 Y4 0 Port 4 Port 3 Port 2 Port 1 Port 4 Port 3 Port 2 Port 1 1 Reserved (fixed value: 0) Reserved (fixed value: 0) Input process data Output process data 2 to 129 2 to 39 2 to 33 2 to 65 Process data is assigned to each port based on the process data mapping size setting Process data is assigned to each port based on the process data mapping size setting 40 66 66 130