Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

Environment

5 300 200 LEY32 Motor mounting position: Top/Parallel 200 W /60 (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed

Dual Rod Cylinder Series CXSJ/CXS

10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200 For long strokes, it will be made-to-order.

LEYx-OMZ0015

Rod type / LEY Series 2.1 Specification LEY63 (Top/Parallel) LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Main circuit of switch MSM022P1A 200 Output Black lead wire 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation HC-PQ23 200 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yaskawa Electric Corporation Blue lead wire 200/230 SGDE-02AP SGME-02AF12 H S For motor mounting dimensions, refer to the dimensions for series LJ1 30 on page 143 as a reference for mounting and design

Compact manifold regulator ARM5 Series

200 250 0 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-308 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.7 MPa ARM5AA1-308-1 (One-touch fittings: IN/OUT 6) Condition: Inlet pressure 0.5 MPa 0.7 0.35 0.6 0.30 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM5AA1-309

nca1mp

Contents 150 NC1AKW150-PS 200 NC1AK200-PS-XC11 200 NC1AKW200-PS 250 NC1AKW250-PS

SeriesNCA1 Air Cylinder: Standard Type Double Acting, Single Rod Maintenance Parts Ø150 to Ø400

Contents 150 NC1AKW150-PS 200 NC1AK200-PS-XC11 200 NC1AKW200-PS 250 NC1AKW250-PS

Air Slide Table Series MXS

200 MXP 200 160 120 80 40 0 0 100 50 150 200 Load (N) Load (N) Load (N) MXY 20 20 20 Lr=122 mm MTS 0.040 0.05 0.10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100

Compact Cylinder Series CQS

, 150, 175, 200 75, 100, 125, 150, 175, 200, 250, 300 12 16 20 25 CQM MU 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSW 560 12 16 20 25 5, 10 Double acting Single acting Return/Extend CQS 567 12, 16 20, 25 Non-rotating Rod Single rod CQSK 575 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Double rod CQSKW 582 Anti-lateral Load

5 Port Solenoid Valve Series VQZ1000/2000/3000

200 100 0 SV VQZ2121-C6 SYJ SZ 800 700 600 500 400 300 200 100 0 VP4 VQZ3121-C6 S0700 VQ Base Mounted Bore size VQ4 Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series VQ5 6 10 16 20 25 32 40 40 50 63 80 100 VQC 800 700 600 500 400 300 200

MXS

200 200 0 160 120 80 40 0 100 150 200 Load (N) Load (N) Load (N) CXT 20 20 20 Lr=122mm MX 0.040 0.05 0.10 MXU 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection (mm) Table deflection (mm) Table deflection (mm) MXS 0.025 0.03 0.06 MXS2075

AZ1000

MPa) AZ1200 2.12 (53.8) 120 0.83 Max. 5.6 (142.2) Max. 6.0 (152.4) (When selecting option code P or HR) Max. 6.5 (165.1) (When selecting option code FC) 100 0.69 Delivery pressure (psig) 80 0.55 1.5 (38.1) 60 0.41 40 0.28 2.62 (66.5) 20 0.14 0 0.00 0 100 200 300 400 500 600 700 800 900 1000 Flow rate (slpm, N2) AZ1200FC Inlet pressure: 150 psig (1.0 MPa) 3/4 inch connections ) 0.69 (17.5

Single Axis Electric Actuator Serriies LJ1S Slider Guide

D-Y7GL Motor model Compatible driver model Power supply voltage (VAC) Motor output (W) + Brown lead wire MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 100/115 Main circuit of switch MSM022P1A 200 Output Black lead wire MSD023P1E 200/230 MR-C20A1 100/115 Mitsubishi Electric Corporation HC-PQ23 200 MR-C20A 200/230 SGDE-02BP 100/115 200 SGME-02BF12 Yaskawa Electric Corporation

Adsorption Plate

Adsorption surface size SP2330 SP2430 SP2530 SP2630 150 x 150 180 180 20 150 82.5 82.5 105 16 200 x 200 230 230 20 200 107.5 107.5 130 25 250 x 250 280 280 25 250 132.5 132.5 155 36 300 x 300 330 330 25 300 157.5 157.5 180 49 755 SP Series Made to Order Please contact SMC for detailed specifications, delivery and pricing.

Smooth Cylinder

, 175, 200, 250, 300, 350, 400, 450, 500 Replacement Parts: Seal Kits 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Kit No.

Electric Actuator Triple Axis P&P Unit

the weight of the work piece and the body. 2) Values in parentheses are those for side mount specification. 100 200 300 400 500 600 700 800 Stroke (mm) 900 1000 1100 1200 1300 1400 1500 Weight of body without motor (kg) 650 Stroke(mm) X axis 100 13.6 150 200 15.7 250 300 17.8 350 400 19.9 450 500 22.0 550 600 24.1 1500 43.0 Stroke(mm) X axis 700 26.2 750 800 28.3 850 900 30.4 950

MXS Series Air Slide Table

200 160 120 80 40 200 0 0 100 150 200 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 20 20 20 Lr=122mm 0.040 0.05 0.10 0.035 MXS20-125 MXS20-150 MXS20-100 MXS20-150 MXS20-75 MXS20-50 MXS20-40 MXS20-30 MXS20-20 MXS20-10 0.04 0.08 MXS20-125 MXS20-150 MXS20-100 MXS2075 MXS2050 MXS2040 MXS20-125 MXS20-100 0.030 Table deflection mm Table deflection mm Table deflection mm

1 Blow Gun Series VMG K
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MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Type Nozzle model Without nozzle KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 KNH-R02-100 KNH-R02-150 KNH-R02-200 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 KNL3-06-150 KNL3-06-200 KNL6-06-150 KNL6-06-200 Nozzle size Standard type Nil 01 02

Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer