90

Vacuum pressure [kPa] 80 Vacuum pressure 60 Suction flow (Silencer exhaust) 40 Air consumption 20 Port exhaust Silencer exhaust 0 0 10 20 30 40 Suction flow [L/min (ANR)] ZK210 Flow-rate Characteristics Exhaust Characteristics 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] 0 10 20 30 40 50 60 70 80 90 100 100 Vacuum pressure [kPa] Vacuum pressure [kPa] 80

Compact manifold regulator ARM5 Series

Stations L2 dimension IN IN IN 35 1 2 3 4 5 6 7 8 9 M VVQ1000-90-7 98 17 16 VVQ1000-90-8 110.5 VVQ1000-90-9 123 IN side OUT side VVQ1000-90-11 148 Fitting size VVQ1000-90-12 160.5 Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y VVQ1000-90-13 173 4, 5/32 VVQ1000-90-14 185.5 2.5 6 11 37.5 6 VVQ1000-90-15 198 3 12.5 19 37.5 3 6.5 11 38 1/4 VVQ1000-90-16 210.5 3 12.5 19

Rotary Gripper Series MRHQ

Models Note 1) Action Model Cylinder bore (mm) Opening/closing stroke (mm) Rotation angle () Weight g (lb) 306 (0.67) 90 MRHQ10D 4 10 305 (0.67) 180 598 (1.32) 90 MRHQ16D 6 16 596 (1.31) 180 Double acting 1055 (2.32) 90 MRHQ20D 10 20 1052 (2.32) 180 1561(3.44) 90 MRHQ25D 14 25 1555 (3.43) 180 307 (0.68) 90 MRHQ10S MRHQ10C 4 10 306 (0.67) 180 MRHQ16S MRHQ16C 600 (1.32) 90 6 16 598 (1.32) 180

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

10, 15, 25 10, 15, 20 125 to 160 125 to 160 125 to 200 12 to 100 80 to 100 63 to 100 40 to 100 32 to 100 40 to 100 32 to 100 32 to 100 20 to 63 20 to 50 20 to 80 16 to 32 10 to 32 12 to 25 20 to 40 20 to 40 20 to 40 20 to 40 32 to 63 25 to 50 25 to 40 25 to 40 6 to 32 32, 40 Bore size 6, 10 10 16 20 25 20 25 D-H7 D-H7C D-H7BAL D-H7NF D-H7W D-G5/K5 D-G5BAL D-G59F D-G5NTL D-G5W/K59W D-G39/

7

9 100 12 100 12 100 15 100 15 100 Note 1) Apparent power: The value at ambient temperature of 20C and when the rated voltage is applied.

Modular F.R.L. Units

50 100 150 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM30-A AFD30-A P1=0.5 MPa 0.04 P1=0.7 MPa P1=0.3 MPa 0.04 P1=0.5 MPa P1=0.3 MPa 0.03 Pressure drop [MPa] Pressure drop [MPa] P1=0.7 MPa 0.03 0.02 0.02 P1=0.5 MPa P1=0.3 MPa P1=0.5 MPa P1=0.3 MPa 0.01 0.01 P1=0.7 MPa P1=0.7 MPa 0 0 0 0 50 100 150 200 100 200 300 500 400 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40

CLA

With 1 switch 10 90 100 110 0 A4 DIfferent 35 75 80 90 Wilh2 suriace switches Same 100 D-A3 suriace 100 100 100 D-G3 Different 3S+301n2) 7S .. 3Q(n-2) 80+30(1\02) 90...30(n2) D-K3 Withn suriaca rr-2.3.4,5 .. 1'1=2.4.6.8 . n=2,4.6,B ... n=2,4,6 ,8 ... switches Same 1 00. l00(. ll 100+100(1'1 2), n=2,4,5 ,8 .. suriace ro= l ,2,,3. 4..

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

05 0.0049 0.0043 0.0037 0.0031 0.0025 0.0018 0.0015 0.31 180 0.0052 0.0046 0.0039 0.0033 0.0026 0.0020 0.0016 0.33 90 1 0.010 0.0091 0.0078 0.0065 0.0052 0.0039 0.0033 0.66 180 Features 7 Mini-Rotary Actuator Series CRJ How to Order Rotation angle 90 100 180 190 90 100 180 190 Basic type 90 E F9B CRJ B 05 S CRJ U 05 90 E F9B S With external stopper Number of auto switches Nil S 2 pcs. 1

XL

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

High Vacuum Angle Valve, XL Series

Item XL -25 XL -40 XL -50 XL -63 XL -80 Rated heater voltage 90 to 125VAC 200/10 200/20 400/40 400/60 600/100 Heater power W (nominal value) In-rush/Normal (Option symbol) H1 80C (176F) 200/40 200/60 400/100 600/150 H2 100C (212F) 200/30 400/70 400/80 600/130 800/180 H3 120C (248F) Note) In-rush current will flow to the heater for approximately 30 seconds and will then subside.

Rotary Actuator

Rotating angle 90 180 270 90 100 90o Single Connectors are available only for 180o 270o vane the R73, R80, T79. Lead wire with connector part nos. 90o Double D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m vane 100o Applicable Auto Switches/Refer to Best Pneumatics No.4 for further information on auto switches.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Tightening torque (Nm) 0.8 to 1.2 Hexagon socket head cap screw 11-6-4 5 Mini-rotary Actuator Rack & Pinion Style Series CRJ How to Order CRB2 Rotating angle CRBU2 90 100 180 190 90 100 180 190 CRB1 MSU CRJ B 05 90 E M9B S Basic type CRJ CRA1 CRJ U 05 90 E M9B S With external stopper CRQ2 Number of auto switches MSQ Nil S 2 pcs. 1 pc.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

, 180 90 , 100 180 , 190 90, 180 90 , 100 180 , 190 Note) Rotating angle 5 at each rotation end 5 at each rotation end Angle adjustment range Cylinder bore size 6 8 Port size M3 x 0.5 Note) If optimum accuracy of the (rotating) angle is required, select an actuator with external stopper.

LEC-OM071xx

2 1 to 65535 10 reference units/s2 100 Pn80C Acceleration Constant Switching Speed 2 0 to 65535 100 reference units/s 0 Pn80D 1st Linear Deceleration Constant 2 1 to 65535 10 reference units/s2 100 Pn80E 2nd Linear Deceleration Constant 2 1 to 65535 10 reference units/s2 100 Pn80F Deceleration Constant Switching Speed 2 0 to 65535 100 reference units/s 0 Pn827 Linear Deceleration Constant

Table of Contents

to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 1 MPa 0 1 MPa Low pressure 0 to 101 kPa 101 kPa 0 For general purpose fluids Compound pressure 100 to 100 kPa 100 kPa 100 kPa Positive pressure 0 to 500 kPa 0 500 kPa 16-3-24 3 Compact Pressure Sensor For General Air Series PSE540 How to Order ZSE ISE Pressure sensing range PSE 1 3 Vacuum (0 to 101 kPa) Compound pressure (100 to 100 kPa)

Large Size Vacuum Module: Series ZR

ZR1-F-100 to 100 kPa 500 kPa 5 to 50C 30 m PVF Refer to page 949 and 952 regarding pressure switch for vacuum.

Air Cylinder

NB NN S X Y Z 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st 61 to 75 st 76 to 100 st 101 to 125 st 126 to 150 st 6 9.5 M6 x 1.0 37 (42) 46 (51) 50 (55) 64 (69) 5 7 77 (82) 86 (91) 90 (95) 104 (109) 10 9.5 M8 x 1.0 45.5 53 65 77 5 7 85.5 93 105 117 16 9.5 M10 x 1.0 45.5 54 66 78 84 108 126

MB1

to 800 to 1000 to 1000 to 1000 to 1000 B FD FE FT FX FY FZ Fd Port Cushion valve 32 40 50 63 80 100 4-FD 50 55 70 80 100 120 3 3 2 2 4 4 10 10 12 12 16 16 64 72 90 100 126 150 32 36 45 50 63 75 79 90 110 120 153 178 25 31 38.5 39.5 45.5 54 7 9 9 9 12 14 Fd B FY FT FE FX FZ Without air cushion Rear flange type/(G) Bore size (mm) ZZ Cushion valve Port 4-FD 32 40 50, 63 80, 100 147 151 172

MNB

2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.

LVQ

LQ1 Construction LVN 90 Degree turn type t TL/TIL LQ3 q e A B r w t y Multi-turn type (with indicator) A B A B Description No.