Sensor Monitor

0 Units selection function 30 F 1 Setting of OUT1 34 F 2 Setting of OUT2 37 F 3 Digital filter setting 39 F 4 Auto-preset function 40 F 5 FUNC terminal setting 42 F 6 Fine adjustment of display value 46 F10 Sub display setting 47 F11 Display resolution setting 53 F80 Power saving mode 54 F81 Security code 55 F82 Input of line name 57 F90 Setting of all functions 58 F96 Input signal check

Industrial Filters

) 5, 10, 20, 40 74, 105 EM100 All types of gases/liquids, High-temperature fluids P.42 5, 10, 20, 40 74, 105 EM500 Stainless steel 316 21 Filter Selection by Main Application FGD/FGE/FGG type FGD type FGE type FGG type Applications and Applicable Element : Recommended : Can be used : Cannot be used Applicable filter model F G D C F G D E F G D T F G D F F G E S F G E L F G E T F G G S F G

Table of Contents

Possible to use in vacuum to 100 kPa Tubing material Tubing O.D.

Series VQ Metal Seal/Rubber Seal Body Ported

Specifications Positive COM AXT661-14A-F Single (2 wire) VQ4 Negative COM AXT661-14AN-F Positive COM AXT661-13A-F VQZ Double (latching) (3 wire) Negative COM AXT661-13AN-F VQD Note) Lead wire length: 300mm Note) The parts numbers above are applicable to VQ0/1000 (2 to 16 stations) and 13 14 VQ2000 (2 to 10 stations). VQ2000 (11 to 16 stations) uses AXT661 A (N)F425. VZS VFS 3.

A_HEC-OM-K001

A l a r m S e q u e n c e Function M O D E < O f f 5.5 How to operate 5-11 A_HEC-OM-K001-1.7 Chapter 5 Operation <12> Heating power upper limit value setting: Mode indication Heating Power Upper Limit Default value: 100 % Setting range 0 to 100% Heating power upper limit value Heating Power Upper Limit indicates that it is heating power upper limit value setting mode.

Digital Flow Switch (Integrated display type)

L/min [H_1] Hysteresis of OUT1 5.0 L/min [H_1] Hysteresis of OUT1 10 L/min [P_2] Set value of OUT2 50.0 L/min [P_2] Set value of OUT2 100 L/min [H_2] Hysteresis of OUT2 5.0 L/min [H_2] Hysteresis of OUT2 10 L/min : Only available for models with switch outputs for both OUT1 and OUT2 : For hysteresis, please refer to [F 1] Setting of OUT1 (page 35), [F 2] Setting of OUT2 (page 40). -28No.PF-OMW0007

Air Slide Table Series MXW

A F F A L = 200 mm F L = 200 mm L L L L = 200 mm A MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 0.03 0.03 0.10 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXW12 MXW8 MXW16 MXW12 MXW8 MXW16 0.08 MXW12 MXW8 MXW16 0.02 0.02 0.06 0.04 0.01 0.01 0.02 75 50 25 100 0 0 0 100 20 40 60 75 50 25 Load (N) Load (N) Load (N) MXW20, MXW25 MXW20

Electric Actuator/Slider Type

Graph of Allowable Lateral Load on the Rod End (Guide) 22.5 [100] Load: F lbf [N] [Stroke] = [Product stroke] + [Distance from the rod end to the center of gravity of the workpiece] LEY63 F 2.25 [10] LEY32 Workpiece LEY25 Center of gravity 1 Stroke [mm] 0 100 200 300 400 500 600 700 800 900 1000 71 Model Selection Series LEY 25, 32, 63 Size LEFS LEFB LEJS LEJB LEY LEYG LECYM/LECYU Model Selection

Cylinder with Lock Series CNS

0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 758 Cylinder with Lock Series CNS Selection Graph Graph (5) Graph (2) 0.3 MPa P < 0.4 MPa 0.3 MPa P < 0.4 MPa 500 1000 900 160 800 400 700 140 600 160 500 125 125 300 CLJ2 Load mass: m (kg) Load mass: m (kg) 400 140 CLM2 300 CLG1 125 200 CL1 200 MLGC CNG 100 500 400 300 200 100 100 500 400 300 200 100 MNB Maximum speed: V (mm/s) Maximum speed: V

MXW

Amount of displacement on A when the load is applied at F. Amount of displacement on A when the load is applied at F.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

For low pressure For positive pressure Rated pressure range 0 to 101 kPa 100 kPa to 100 kPa 0 to 100 kPa 0 to 1 MPa 0 to 500 kPa Analog output [mA] 5 20 Analog output [V] For low differential pressure Rated pressure range 0 to 2 kPa C 0 D 2 kPa F 0.2 kPa Range 1 0.6 4 2.4 A C E F B D A C E F B D Pressure Differential pressure Pressure Differential pressure 848 Pressure Sensor Controller

Digital Gap Checker ( compatible)

Level 6 Level 7 Level 8 Level 9 ISA3-F Below 20 Below 15 Below 10 Below 5 Display ISA3-G Below 100 Below 75 Below 50 Below 25 value ISA3-H Below 200 Below 150 Below 100 Below 50 ISA3-F Process ISA3-G Below 1000 Below 750 Below 500 Below 250 data ISA3-H -67No.PS-OMW0009-C 4 How to use Character string display Function to display the specified character string on the sub display.

MXW Series Long Stroke Slide Table

A F L=200mm F F L=200mm A L L L L=200mm A MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 0.03 0.03 0.10 MXW12 MXW8 MXW16 MXW12 MXW8 MXW16 0.08 Table deflection quantity mm Table deflection quantity mm Table deflection quantity mm MXW12 MXW8 MXW16 0.02 0.02 0.06 0.04 0.01 0.01 0.02 0 0 0 100 75 50 25 100 20 40 60 75 50 25 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N =

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

mounting: 1 mm for bore size 32 to 80, 5 mm for bore size 100, 10 mm for bore size 125 Bore size [mm] d e f l h 1 to 50 901 to 1000 32 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200

Floating Joint

How to Order JA 40 F 14-150 Option Mounting type None Nil High temperature specifications 5 to 100C Nil F L Basic type Flange type Foot type Applicable bore size (mm) X11 Symbol Applicable bore size (mm) Model 6 10 15 20 30 40 63 80 100 140 160 6 10 10, 15 20 25, 32 40 50, 63 80 100 125, 140 160 Thread nominal size (Standard) Nominal thread size Applicable cylinder nominal thread size Standard

Smooth Cylinder

Nil S n Mounting Bore size B A L F G D Through-hole (Standard) Both ends tapped Foot Front flange Rear flange Double clevis 32 40 50 63 80 100 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm Mounting brackets are not mounted and are supplied loose at the time of shipment.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

1 Smooth Cylinder CQSY/CQ2Y/CM2Y/CG1Y/CA2Y 12 to 25 32 to 100 20 to 40 20 to 100 40 to 100 RE A B Minimum 0.01 to 0.03 MPa operating pressure Minimum Minimum 0.01 to 0.03 MPa operating pressure REC CX 0.04 Minimum operating pressure MPa CY 12 16 0.03 MQQ M 20 25 32 40 0.02 RHC 50 63 80 100 0.01 MK(2) 0 0 10 20 30 40 60 50 70 80 90 100 RS Q G Bore size mm RS H A (Measurement based on JIS B8377

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

) Stroke range (mm) C D E F H I J K L M N O P Q S U Z A B A B 46 10 to 50 54 14 depth 10.5 63 64 56 15 20 77 10.5 M10 x 1.5 103 7 17 8 60 9 1/4 15 93 47.5 19 56 75, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23

Process Valve Series VNA

Water Hammer Characteristics VNC1 (N.C. 0.49 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.49 MPa VNC4 (N.C. 0.97 MPa) Conditions: Piping 30 m Steel tube, total pressure 0.97 MPa 2.5 15A Peak pressure at valve closed (MPa) Peak pressure at valve closed (MPa) 8A 25A 2 1 20A 32 A F 15A 20A 40 A F 32 A F 1.6 0.8 25A 40 A F 50 A F 65F 50 A F 1.2 0.6 80F 65F 80F 0.8 0.4 0.4 0.2 0 1

energy saving effect

No anchor bolt is included. 168 B Thermo-chiller Water-cooled 400 V Type Inverter Type HRSH Series HRS How to Order HRS 090 HRSH 250 W 40 HRS 100/150 Cooling capacity Option Cooling method HRSH 090 100 11.5 kW 150 15.7 kW 200 20.6 kW 250 24 kW Nil Note 1) None A With caster adjuster-foot K Note 2) With fluid fill port W Water-cooled refrigeration Pipe thread type HRSH HRSH Nil Rc F G (with