Power Valve Precision Regulator

VBA VBAT AP100 841 VEX13 Series 0 3 Specifications VEX1A33 VEX1B33 VEX113 0 3 VEX123 0 3 VEX133 0 3 VEX153 0 3 VEX173 0 3 VEX193 0 3 Model Port 1(P) 2(A) 3(R) M5 01 M5 01 01 02 01 02 03 02 04 04 06 10 12 14 10 20 1 8 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 2 1 1 1 1 1 Port size M5 M5 1 2 4 1 4 1 2 Operation Manual knob (Push locking slotted type) and Air operated type Manual knob (Push locking

Compressed Air Cleaning Filter Series

1) (A) (A) (A) (C) 20 20 20 34 M5 female threaded 1/4 female threaded 1/4 female threaded Note 2) For Rc, G: 10 For NPT: 3/8 Drain Drain Drain Drain Auto drain for medium air pressure Drain guide Drain cock Auto drain (mm) AFF series AM, AMD, AMG, AMH series Size Size 2C 4C A B C Note 1) Model no. labels are not affixed to the AM-CA150C to 550C.

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

Auto switch Bracket set screw (With hexagon socket head) M5 x 0.8 x 12 l Auto switch mounting bracket (A) Auto switch mounting bracket (B) Auto switch mounting screw (With hexagon socket head) M5 x 0.8 Auto switch Bracket set screw M5 x 0.8 x 12 l Auto switch mounting bracket (A) Auto switch mounting bracket (B) Auto Switch Mounting Bracket Part No.

Modular Type Lubricators Series AL

Modular Type Lubricators Series AL AC-A Lubricator Series AL Model AF-A Port size Option AF-A AL10 M5 x 0.8 AR-A AL20 1/8, 1/4 AL-A AL30 1/4, 3/8 AW-A AL40 1/4, 3/8, 1/2 Bracket AC AL40-06 3/4 AF AL50 3/4, 1 AF AL60 1 Pages 508 through to 513 AR AL AL AW AG E AV AF 507 Lubricator AL10 to AL60 Symbol Lubricator AL20 AL40 How to Order AL 30 03 B Option/Semi-standard: Select one each for a

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Molded-case circuit breaker (Note 1, 3) Fuse Frame, rated current Magnetic contactor Driver Voltage Voltage AC [V] Class Current Power factor Power factor (Note 2) [A] AC [V] Improving reactor is Improving reactor is not used used LECSS2-T5 30 A frame 5 A S-N10 10 LECSS2-T7 LECSS2-T8 30 A frame 10 A 30 A frame 5 A 15 Mitsubishi 240 T 300 Electric Corporation LECSS2-T9 30 A frame 15 A 30 A

I

D 00 Without subplate 1% 0.5% + -0.5% M5 M5 0.007 00 Without subplate B M5 M5 0.28 01 18 0.41 2.5% 1% + -1% Base Mounted Type 00 Without subplate 2 01 18 0.9 02 14 1.4 00 Without subplate 02 14 2.0 3% 1.5% + -1% 4 03 38 3.3 04 12 3.9 A M5 M5 0.28 1 01 18 0.9 02 14 1.4 2.5% 1% + -1% Wiring: The use of three-core screened cable is strongly recommended with the screen earthed at the end away

Table of Contents

C 0.2 C 0.2 B 0.2 B 0.2 A 0.2 A 0.2 D Bore size (mm) A (mm) B (mm) C (mm) Bore size (mm) A (mm) B (mm) C (mm) D (mm) (mm) Hexagon socket head cap screw Hexagon socket head cap screw MGPM MGPL 12 50 50 18 41 10 8 M4 x 0.7 140 50 116 32 M12 x 1.75 16 80 56 22 46 12 10 M5 x 0.8 214 66 170 47 M16 x 2 Connection thread size Proper tightening torque (Nm) a dimension 20 72 24 54 14 12 M5 x 0.8 25

VP300/500/700

Y: 4.5 to 7 D: 6 to 8 47.5 61.5 2(A) 2(A) 13.5 Rc 3/8 (A port) : With light/surge voltage suppressor ( ): Dimensions for external pilot 15 3 Port Pilot Operated Poppet Solenoid Valve Rubber Seal Series VP300/500/700 Dimensions: VV3P7 (For N.C.) Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

L1 (Non-locking) Manual override A A 20 15 B B 5 48.5 [55] 2 (Pitch) P=10.5 12 2n-One-touch fitting 36.1 29.5 (A, B port) A A 20 15 B B Applicable tube: T0425 5 2 (Pitch) P=10.5 12 2n-M5 X 0.8 (A, B port) Other dimensions are the same as the M5.

Modular Type Filter Regulator Series AW

piston and a gasket (KSYP-13) type assembly.

Series KC Self-seal Fittings

Tube size/ Connecting female thread size Body size Type KBV1-M5 KBV1-M6 KBV2-M5 M5 0.8 M6 1 M5 0.8 M6 1 KBV1-04 KBV1-06 KBV2-06 4 6 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 KBV2-08 KBV3-08 8 Branch elbow module: KBZ 1 8 Rc(PT) KBV3-10 10 Applicable tube O.D. KBV3-12 12 KBV4-12 KBV4-16 Part No.

LEC-OM07605CN

a1 B c d d1 e e LECSS2-T5LECSS2-T7 LECSS2-T8 6 6 1560.5 6 M5 b LECSS2-T9 c 12 12 1560.5 6 420.3 M5 d a 4.9 /LECS / 1./ YES [ ]NO [ ] 2.

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B AS Series Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow rate characteristics are representative values.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

L1 L2 A(2) L3 H(1) T2 T1 D1 D2 Model AS1200-M3 M3 x 0.5 M3 x 0.5 4.5 6.6 23.5 21.5 8 5 5 20.5 18.5 AS1200-M5 M5 x 0.8 M5 x 0.8 25.5 8 10 28.3 10.3 9 9 25 22.2 AS1200-U10/32 10-32 UNF 10-32 UNF AS220-01 27.4 32.4 14.6 14.3 14.1 31.4 36.4 18 12 (12.7) 1/8 1/8 AS220-02 29.8 34.8 19.5 18 18 35.8 40.8 27.2 17 (17.5) 1/4 1/4 AS320-03 35.6 40.6 24.3 22.5 20.8 41.9 46.9 30 19 3/8 3/8 AS420-04 42.4

CYPSeries

Since alignment variations increase as the stroke gets longer, use a connection method which can absorb these variations and consider measures to control particulate generation. 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 10-AS2001F-04-X214 10-AS1001F-04-X214 In-line type (throttle valve) 10-AS2001F-06-X214 10-AS1001F-06-X214 10-ASD330F-01-06 10-ASD230F-M5-04 Dual type (speed controller)

CYPSeries

Since alignment variations increase as the stroke gets longer, use a connection method which can absorb these variations and consider measures to control particulate generation. 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 10-AS2001F-04-X214 10-AS1001F-04-X214 In-line type (throttle valve) 10-AS2001F-06-X214 10-AS1001F-06-X214 10-ASD330F-01-06 10-ASD230F-M5-04 Dual type (speed controller)

CYP

-06-X214 Caution 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 1.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Model CYP15 CYP32 Series Throttle valve 10-AS2200-01-X214 Elbow type 10-AS1200-M5-X216 Metal body piping type 10-AS2000-01-X209 In-line type 10-AS1000-M5-X214 10-AS2201F-01-04-X214 10-AS1201F-M5-04-X214 Elbow type (throttle valve) 10-AS2201F-01-06-X214 10-AS1201F-M5-06-X214 10-AS2201F-01-06-X214 Operation 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Caution

Vacuum System Peripherals:

Connection 3.2, 4 6, 8, 10, 12, 16 KQ2 Nylon, Soft nylon, Polyurethane M5, M6, R 1/8 to 1/2 From 100 kPa One-touch fittings One-touch fittings/Manifold Series KM Applicable tubing: Nylon, Soft nylon, Polyurethane Tubing O.D.: 4, 6, 8, 10, 12 Port A piping port Port B port size No. of port A Piping specifications Port A Port B Model Model 4 6 8 8 10 12 Rc Rc 6 8 10 6, R 6, R 6, R 8, R 8, R