V

V A C U U M S W I T C H S E R I E S ZSE1 ZSE1--55 ZSE1 L Switch Type 55L E L E C T R I C A L E N T R Y Grommet (24) L Grommet (120) C w/Plug Connector (24) CL w/Plug Connector (120) CN Plug Type (w/o Lead) C O N N E C T I O N 00 NZM Ejector Mounting 01 1 8 PT T1 1/8 NPTF ACCESSORIES V A C U U M S W I T C H S E R I E S ZS S W I T C H T Y P E Interface plate for ZM Ejector P31806-01 (blank

JXCx-OMT0062

(unit mm): When the current position is within W-AREA1 and W-AREA2, the WAREA output turns ON. When W-Area 1 < W-Area2, the Parameter ALM of alarm occurs.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

) Piping port W With waterproof cover R1/8 ZS-46-A2 01 * For the lead wire with M12 connector, refer to p. 38.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Construction Meter-out type Meter-in type AS1200M AS2200M AS1210M AS2210M u w u w t e r !

VZ5000

Closed Center/Exhaust Center/Pressure Center VZ5320 Grommet (G), (H) VZ5 20-01 G H (Mounting hole for manifold) 3 4 5 Manual override (Non-locking) VZ5420 VK VZ VF (Lead wire length) VFR VZ5520 G: 300 mm H: 600 mm (Mounting hole) VP4 VZS VFS VS4 VQ7 (PE port) EVS VFN (Piping port) L plug connector (L) VZ5 20-L-01 M plug connector (M) VZ5 20-M-01 (Lead wire length) 3 4 5 3 4 5 300 (Lead wire

Valve Single Unit

(g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

reduces flow setting time

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS2200M-01-X214 Note) Throttle valve is only compatible with the part no. of the meter-out type. 721 AS-M Series Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

NCG/CG1

Auto Switch Specifications PLC: Programmable Logic Controller RoHS compatible D-M9 W/D-M9 WV (With indicator light) UL certified lead wire (style 2844) D-M9NWV V W B 9 M D W B 9 M D W N 9 M D D-M9PWV D-M9PW Auto switch part no.

Fieldbus System

SS5Y5 12S NA 05 N M U Refer to page 23 for Type 12/ Top ported dimensions. q w e r y t u Mixed Mounting Type It is possible to mount SY3000 size valves on all stations.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 (A port) 18 8.5 2-4.5 (For mounting) 4 34 Manual override A 24 P R 33.5 G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] (Light/surge voltage suppressor) M5 x 0.8 (X port) 49.6 [56.6] + 34.2 8.5 16.5 21 X 6 32 24 15 17 9 1/8 (P, R port) 42 L plug connector (L): SYJ54-L-01 M plug connector (M): SYJ54-M-01 DIN terminal (D): SYJ54-D-01 M8 connector (W0): SYJ54-W0-01 Approx.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS22l1FG-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS22l1FG-01-03(S)A 5/32" 8.2 AS22l1FG-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS22l1FG-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS22l1FG-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 17 (18)

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Construction Meter-out type Meter-in type AS1200M AS2200M AS1210M AS2210M u w u w t e r !

Filter Regulator

AW-OMX0057-A PRODUCT NAME Filter Regulator MODEL / Series / Product Number AW20(K)-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AW30(K)-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)06(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW60(K)-(F,N)06(F,N)10(B,C,

VZ3000

) L plug connector (L) VZ3240-L-01 M plug connector (M) VZ3240-M-01 (Lead wire length) 300 300 (Lead wire length) : With light/surge voltage suppressor DIN terminal (D) VZ3240-D-01 Built-in speed controllers VZ3250Applicable cable O.D. 3.5 to 7 3-3-35 Series VZ3000 3 Position Closed Center/Exhaust Center/Pressure Center VZ3340 Grommet (G), (H) VZ3 20-01 G H 3 4 5 VZ3440 (Mounting hole) Manual

Secondary Batteries

90 ISE40 01 22 For Positive Pressure 90 ZSE40 01 SDPC M 22 For Vacuum/Compound Pressure Series compatible with secondary batteries 90 Material restriction Option Set pressure range Nil F Nil None 10.0 to 101.3 kPa 100.0 to 100.0 kPa For vacuum pressure For compound pressure Panel mount (ZS-22-A) E Piping specifications 01: R 1/8 (with M5 female threads) Panel mount + Front protective cover

Micro Mechanical Valve Series VM1000

Red VM131-01-35RA VM151-01-35RA VM131U-01-35RA VM151U-01-35RA VM133-M5-35RA VM153-M5-35RA Black VM131-01-35BA VM151-01-35BA VM131U-01-35BA VM151U-01-35BA VM133-M5-35BA VM153-M5-35BA Green VM131-01-35GA VM151-01-35GA VM131U-01-35GA VM151U-01-35GA VM133-M5-35GA VM153-M5-35GA Yellow VM131-01-35YA VM151-01-35YA VM131U-01-35YA VM151U-01-35YA VM133-M5-35YA VM153-M5-35YA Note 1) It is possible

VDW

1 o w !0 !1 e r w e u r u t t y q y q Component Parts Description Material No.

42

1 Cable length 1.5 m 2 Cable length 3 m 01 1 station 12 12 stations Electrical entry SB Direct exhaust with silencer box: Exhaust from both U and D sides Cylinder port D D side entry U U side entry 03 3/8 04 1/2 B Bottom ported 1/2 CM Mixed SD Note 1) Direct exhaust with silencer box: D side exhaust SU Note 1) Direct exhaust with silencer box: U side exhaust W IP65 enclosure Thread type Note