Sensor Range: 3 [For Compound Pressure (-100~100.kPa)], Port Size: TSJ 1/4, Output Specification: 28 [Current Output (4~20mA) Type], Option: -
Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: TSJ 1/4, Output Specification: 28 [Current Output (4~20mA) Type], Option: -
Sensor Range: 4 [For Positive Pressure (0~500kPa)], Port Size: TSJ 1/4, Output Specification: 28 [Current Output (4~20mA) Type], Option: -
Sensor Range: 3 [For Compound Pressure (-100~100.kPa)], Port Size: TSJ 1/4, Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]
Sensor Range: 1 [For Vacuum (0~-101kPa)], Port Size: TSJ 1/4, Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]
Sensor Range: 4 [For Positive Pressure (0~500kPa)], Port Size: TSJ 1/4, Output Specification: 28 [Current Output (4~20mA) Type], Option: C2 [Connector for Pressure Sensor Controller (PSE300) 1 pc.]
Step Motor Controller With Step data Teaching Function (Servo / 24VDC) NPN Type PNP Type I/O signal power I/O signal power CN5 CN5 24VDC 24VDC A1 COM A1 COM A2 COM A2 COM A3 IN0 A3 IN0 A4 IN1 A4 IN1 A5 IN2 A5 IN2 A6 IN3 A6 IN3 A7 IN4 A7 IN4 A8 MODE A8 MODE A9 SETUP A9 SETUP A10 HOLD A10 HOLD A11 DRIVE A11 DRIVE A12 RESET A12 RESET A13 SVON A13 SVON B1 OUT0 Load B1 OUT0 Load B2 OUT1 B2 OUT1 Load Load B3 OUT2 B3 OUT2 Load Load B4 OUT3 B4 OUT3 Load Load B5 OUT4
200 to 230VAC B2 B1,B2 B1,B2 Without lock Nil Without lock Nil 400 400 40 40 S8 S8 Cable length With lock B With lock B Without cable Without cable Nil Nil Ball screw lead Stroke 2m 2 2m 2 Size Size 100mm 100 100mm 100 5m 5 5m 5 40 32 25 40 32 25 10m 10m A A 1000 1000mm 1000mm 1000 12mm 12mm 16mm 16mm 20mm 20mm A A The length of motor, encoder and lock cables are same.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
-P10-N01 Blanking plate kit 136114A 136214A (plate, screws, and o-ring) Manifold base, 13612-*-N 13622-*-N Common IN (A1, A2) Manifold base, 13613-*-N 13623-*-N Individual IN (B1, B2) * Denotes number of stations: 2~10 available. 10 10 station NARM2000-4B2 Note1) In case of A1 and B1, a pressure gauge or a plug is mounted at the body side, while in case of A2 and B2, at the manifold side.
A5 A5 A6 A6 A7 A7 Internal Internal A8 A8 resistance resistance 10[k ] 10[k ] 24 VDC 24 VDC A9 A9 Main circuit Main circuit power supply power supply for the input for the input A10 A10 signals signals B1 B1 B2 B2 B3 B3 B4 B4 B5 B5 Maximum output Maximum output B6 B6 current: 10 mA current: 10 mA B7 B7 Pulse input internal circuit Note2) B8 Pulse input internal circuit Note2) B8 Pulse input
L /IZN10-B1 P /IZN10-B2 DIN /IZN10-B3 P PNP -6- 4 4 4 4 4 4 4 4-1 1 1 1 !
(The lock cable is included when the motor with lock B2 option is selected.) *Standard cable entry direction is "(B) opposite axis side".
Graph (3) 20 x 9.8 x (0.07 + 0.05) x 10/1000 = 0.24 20 x 9.8 x (m1 + m2) x H/1000 0.24 Nm < Effective torque OK < Effective torque (Nm) Find the moment of inertia, "IR" for the load + attachments (2 pcs.) 7 IR = K x (a2 + b2 + 12h2) x (m1 + m2)/(12 x 106) IR = 2 x (202 + 302 + 12 x 102) x (0.07 + 0.05)/(12 x 106) = 0.05 kgm2 (K = 2: Safety factor) Kinetic energy 8 Confirm that the kinetic
1361213613PVQ Note 1) In the case of A1 and B1, a pressure gauge or a plug is mounted on the body side, while in case of A2 and B2, on the manifold side.
Nil None B1 L-bracket IZN10-B1 B2 Pivoting bracket IZN10-B2 B3 DIN rail mounting bracket IZN10-B3 Symbol Type 01 Energy saving static neutralization nozzle 02 High flow rate nozzle 11 Female threads for piping*1 *1 Refer to the cautions when using the female threads for piping shown below. * Refer to page 12. Brackets are the same as those for the current model (IZN10).
M: Individual wiring, With lead wire Length 300 mm With switch With linkage printed circuit board Elbow fitting (Downward entry) (Metric size) B2: 2 one-touch fitting B4: 4 one-touch fitting (Inch size) BN1: 1/8" one-touch fitting BN3: 5/32" one-touch fitting MN: Individual wiring, Without lead wire (With connector, socket) With linkage printed circuit board MO: Individual wiring, Without
Note 1) A C Auto switch mounting dimensions Note 2) A3 Note 3) B1 A2 B2 (mm) Bore size 6, 10 0.4 0.3 0.4 0.3 A1 Symbol Auto switch model A1 A2, A3 B1 B2 D-A93 D-A93 (Reed auto switch) D-M9 (Solid state auto switch) D-M9 Specific Product Precautions Be sure to read this before handling.
.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Ea Ea Ea Ea C2 C1 K2 (screw length) B2 F2 B1 F1 Detail drawing of Za1 (adjustable range) Detail drawing of Za2 (adjustable range) K1 (screw length) Q2 P Zb2 JJ Eb Eb Q1 Zb1 JJ H H Eb Eb P A2 A1 L (Counterbore depth) Detail drawing of Zb2 (adjustable range