PSE540/560

20 m/s2 acceleration, Vibration resistance in X, Y, Z directions, for 2 hours each (De-energized) 500 m/s2 in X, Y, Z directions, 3 times each (De-energized) Impact resistance Temperature characteristics 2% F.S. or less (0 to 50C, based on 25C), 3% F.S. or less (10 to 60C, based on 25C) Piping Specifications Model 01 02 N01 N02 C01 A2 B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Port size M5 x 0.8 Rc

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Q Diode LED Coil Timer circuit How to Order Q SYJ 3 T Z 1 2 Black (--) Q 1: Starting current 2: Holding currect Q Applied voltage Q Rated voltage 24V 5 6 24VDC 12VDC 0V Q Standard Specify the same as standard 0.55W Q Power saving type 0.22W 0W Q 62ms Q Q Q Q Q Q Q Q Q Q Q Q Q 20 Q Q Q Q Drawings Series

VQ20/30

SOL. 2 Without indicator light 1: + 3 + () 1 2: 2 (+) Series VDW DC circuit AC circuit Rectifying device ZNR 1 (+, ) 1 Terminal no. 1 + 2 SOL. SOL. DIN terminal For energy-saving circuit, there is the polarity.

CLA

1 ,l1I~1 f AI U, , L~ f-~, ~' 45' 'C'C' '111 i'-"-l :2< ~ "'" _Ie P. eE, MM R, U, eND"IO NX l P . ~z l . A A, L, no. (min) bontala A, eE, L, MM R, U, eNOHlO NX No. (mm) 1-04 40 69 22 24 55 M14X1.5 15.5 2Q 12-g D70 .. -8!.

LEC-OM02904

PC01 ERZ 1. No.PC06 2. B2B2 3 rev 1 (2) (1) 200 TM MR Configurator2 PC02 MBR (MBR)OFF(Tb) 0 ms 0 1000 PC03 *ENRS 0h 0 0 A B AB CCW CW A A 0 B B A A 1 B B 0 1 0 1 PC04 **COP1 C-1 0h 0 0 0 02 14 1()(16) 11.1.2 02 1: 4 116 11.1.2 5 21 5 No.

155

Z DO W Note 1) Refer to Table (1) on page 378 for combinations with electrical entry.

Brake mechanism added

2 3 4 3 2 1 699

PFA/PFW

Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,

VXZ

Normally open VXZ 2232 02 1 G N.O.

/

External pilot solenoid 1 Y A G 1 T Z B1 10 1 70 2 SGH SGHA Air operated 1 A G B1 10 1 2 70 q w e r t y u i o !0 !1 !2 q Series w Valve type e Seal material 70 r Pressure range t Thread type y Port size 1 2 3 4 1 2 A B 10 15 20 25 Nil G N T SGH100 SGH200 SGH300 SGH400 SGH100 SGH200 SGH300 SGH400 N.C. N.O.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

6 4 1 5 500 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 0.05 0.1 0.5 1 2 Load (kN) Load (kN) Bore size 32 Bore size 40 800 6 8 6 4 8 3 7 5 3 7 4 5 1 500 1 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 3 0.1 0.05 0.5 1 2 5 Load (kN) Load (kN) 20 Series CHN Technical Data 3-1 Cylinder Cushion Selection Procedure Caution Use a cylinder cushion within the maximum absorbed energy range.

CE2

+ Stroke RS Q G RS H A RZQ Double clevis style MI W S Z + Stroke CEP1 CE1 CE2 ML2B Center trunnion style Z + 1/2 stroke C J G5-S CV MVGQ CC RB Rod side flange, Head side flange Rod side flange Single clevis, Double clevis Double clevis Center trunnion Bore size (mm) 40 50 63 80 100 J CD H10 Z TZ TX CZ BB Z B FX U FD FV RR FZ FT CX L TDe8 FY 224.5 117 15 10 15 85 29.5 299.5 71 80 16 9 60

CE2

1 !2 !3 !4 !5 !6 !7 !8 !

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

connector (20 pins) PH: Flat cable connector (10 pins) Connector entry direction Note Symbol 02 Note Symbol 02 Stations Stations 1: Perpendicular connector 2: Lateral connector 2 stations 2 stations Double wiring specification ... ... ... ... ... ...

CJ2X/CUX/CQSX/CQ2X/CM2X

Type (Metal body) CE1 Air Flow/Effective Area AS220M-02 AS120M AS220M-01 CE2 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 Free flow Effective area (mm2) CV 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature

Microspeed Cylinder

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" 38 (1.33) 7 (0.25) Flow rate l/min (ANR) (CFM) 12 (0.42) Controlled flow 0.6 (0.03) 0.2 (0.01) 0.1 (0.006) Effective area

CJ2X/CUX/CQSX/CQ2X/CM2X

Type (Metal body) CE1 Air Flow/Effective Area AS220M-02 AS120M AS220M-01 CE2 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 Free flow Effective area (mm2) CV 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature

CJ2X/CUX/CQSX/CQ2X/CM2X

(mm2) 0.6 RZQ 100 Flow rate (l/min (ANR)) 460 230 290 130 Free flow MI W S 1.5 Effective area (mm2) 7 3.5 4.5 2 Note) Supply pressure: 0.5 MPa, Temperature: 20C CEP1 Elbow Type (Metal body) CE1 Air Flow/Effective Area AS220M-02 AS120M AS220M-01 CE2 Model R 1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

Free Mount Cylinder for Vacuum Series ZCUK

Applicable cylinder bore (mm) 10 16 20 25 32 NTP-010 NTJ-015A NT-015A NT-02 NT-03 WCS4 x 0.7 WCS5 x 0.8 WCS6 x 1 WCS8 x 1 WCS10 x 1 9.2 11. 5 15. 0 19. 6 8 10 13 17 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 4 5 5 6 7.8 9.8 12. 5 16. 5 1261