Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 10-20-78

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 6-16-72

Soft Start-up Valve

AC 95 DC 93 50 AC 98 H DC 96 U Dimensions [mm] Standard specifications Port size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats

Soft Start-up Valve

AC 95 DC 93 50 AC 98 H DC 96 U Dimensions [mm] Standard specifications Port size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

50 +25 +25 +51.4 +51.4 +40 +49.9 +40 + 9.9 13-11-110 15 Vacuum Pad: Ball Joint Type Lateral Vacuum Entry Without Buffer/Female Thread Series ZPR How to Order ZX ZPR 10 F GS 06 B5 ZR ZM Pad diameter (mm) Mounting thread diameter/ Female thread (Refer to Table (1) for applications.)

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

NCM

8 6 7 8 6 11.5 9 125 13 7 5 6 7 5.5 10.5 8 150 (40) (40) (40) (40) (12) (12) (40) (40) 25 Type 1 Type 2 Type 3 (40) (40) (40) (12) (12) (40) (40) 34 50 (40) (12) (12) (40) (40) 36 27.5 32.5 75 1, 2 (40) (12) (12) (40) 31 24 28 36 100 W W (40) (12) (12) W 27.5 21 25 38 32 125 (40) (12) (12) 25 19 22.5 34.5 29 150 (40) (12) (12) (40) 30 23 27 35 25 (12) (12) 35 20.5 15.5 18.5 29 24 50 (12)

Vacuum Pad: Ball Joint Type

1 +1 +4.9 +4.4 +20 50 50 +25 +40 +49.9 +49.4 +25 +40 +49.9 +49.4 717 Vacuum Pad: Ball Joint Type Lateral Vacuum Entry Without Buffer/Female Thread ZPR Series How to Order ZPR 10 F GS 06 B5 Pad diameter Mounting (Refer to Table (1) for applications.) 10 10 13 13 16 Vacuum entry port (Refer to Table (1) for applications.) 16 20 20 25 25 32 32 Table (1) Vacuum Entry/Mounting 40 40 Mounting

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

+40 +49.9 51.4 50 +25 +40 49.9 51.4 9 Lateral Vacuum Entry Series ZPR Without Buffer/Female Thread How to Order ZPR 10 F GS 06 B5 Pad diameter (mm) Mounting thread diameter/female thread (Refer to Table 1 for applications.) 10 10 13 13 16 Vacuum entry (Refer to Table 1 for applications.) 16 20 20 25 25 32 32 Table 1 Vacuum entry/Mounting thread diameter 40 40 Mounting thread diameter 50

Digital Flow Switches

Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

VCA

AXT632-69-1 AXT632-69-2 VVCA40-3A-06-2 VVCA40-3A-06-1 OR-3200-200-H VCA45--VVCA40-6-n VVCA40-4A-06-2 VVCA40-4A-06-1 Material Mounting screw (side ported) Mounting screw (side ported) 1 1 Steel Steel Mounting screw (front ported) Mounting screw (front ported) End plate assembly (D side, side ported) End plate assembly (D side, side ported) 2 2 Al Al End plate assembly (D side, front ported

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 7-9-48

PF2A/PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

3

/521 20A (Port size 06) 40A (Port size 14) p16 p10 PF3W711/511-;06 p9 p8 p7 p6 p5 p4 p3 p2 p1 p0 p14 (at 100 L /min) p12 Accuracy [% F.S.]

AS-FPQ/AS-FPG

A Note 1) AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Lubricator

228.6 209 222.5 229 242.5 AL60-D 234.1 242.6 223 236.5 243 256.5 -33- Revision history 40-06,50,60 size added.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12