Table of Contents Ordering example) Lead wire length 5A 10 ZS ZCU Lead wire length (For DC) Nil 6 10 15 20 25 30 0.3 m (Standard) 4A 20 VJ10 6 AMJ 0.6 m 1 m 1.5 m 2 m 2.5 m 3 m Note) If ordering a vacuum switch with 3 m lead wire, specify both the vacuum unit switch and the 3 m lead wire connector part numbers. Nil 30 50 0.6 m 3 m 5 m (For 100 VAC) 1A 36 VJ10 6 Misc. ZX1051-K15LOZ-EC 1 pc.
regulator Series AWD AWD20 1/8, 1/4 AWD30 1/4, 3/8 0.01 m (95% filtered particle size) AWD40 1/4, 3/8, 1/2 Pages 14-2-82 to 14-2-85 14-2-66 67 Filter Regulator Series AW10 to 40 Integrated filter and regulator units save space and require less piping.
1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN : Manufactured upon receipt of order.
A B Effective area (mm2) Weight (g) M-5ALHN-4 M-5ALHU-3, -4 12 14 11.5 12.3 14.3 8.5 10.5 8 8.8 10.8 5 7 4.5 5 7 1.8 2.5 1.6 1.8 2.5 1.4 2.4 1.1 1.4 2.4 3.2 3.7 3.2 3.3 3.9 M-5ALHN-4 M-5ALHN-6 M-5ALHU-3 M-5ALHU-4 M-5ALHU-6 SM5B, #11 to #15 Kl M-5ALHN-6 M-5ALHU-6 Ml Hl Dl MS Hose nipple: M-5H-4, -6 Tl C D Part No.
(R)-L-02 M type plug connector (M): SY5140(R)-M-02 DIN terminal (D): SY5140(R)-D-02 Applicable cable O.D. 3.5 to 7 81.7 74.2 Max. 10 62.9 Pg.7 104.9 105.8 18 18 28 4.3 9.5 22 Grommet .SS5Y51, #1 + #4 L type plug connector .SS5Y51, #1 + #4 + #11 M type plug connector .SS5Y51, #1 + #4 + #14 27 Base Mounted Type SY3000/5000/7000/9000 Single valve A NA Features Precautions Note) [ ]: Values for
PD20 0 S S S S () 0 r / m i n 0 r / m i n 1 S S S S 0 r / m i n 0 r / m i n 2 S S S S S S 0 r / m i n 0 r / m i n 3 S S S S S S S 0 r / m i n 0 r / m i n 6 40 7MR Configurator 7 MR Configurator .2 7.1 .2 7.2 .3 7.3 .5 7.4 .6 7.5 .8 7.6 .10 7.7 .14 7.7.1 JOG .14 7.7.2 .17 7.7.3 .19 7.7.4 (DO) .20 7.7.5 1 .22 7.8 .24 7.8.1 .24 7.8.2 .25 7.8.3
L dimension L dimension 1.5 m AXT100-DS25-015 AXT100-MC26-015 1.5 m 3 m AXT100-DS25-030 AXT100-MC26-030 3 m 5 m AXT100-DS25-050 AXT100-MC26-050 5 m When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C24308. L L (60) 44 8 16 14 25 1 13 47.04 50 Approx. 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no.
Connector C Actuator side (Terminal no.) 1 2 5 6 (14) (18) 8 A1 B1 (13.5) (17.7) (17.7) Cable length (L) 1 3 5 8 A B C 1 2 A6 B6 1.5 m 3 m 5 m 8 m (30.7) Connector A 5 6 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 m (14.2) Connector C (Terminal no.) 1 2 5 6 15 m 5.5 6.3 Actuator side (14) (18) (Terminal
VQ5 9 Terminal plate For EX126 SI unit mounting D-sub connector housing assembly 10 F kit, 25 pins VQC P kit, 26 pins Flat ribbon cable housing assembly 11 P kit, 20 pins VQZ Terminal block box housing assembly 12 T kit L kit with 0.6 m lead wire SQ Lead wire housing assembly 13 L kit with 1.5 m lead wire L kit with 3.0 m lead wire VFS 14 Multiple connector housing assembly M kit 26 pins
ZZ + Stroke Rod Side Flange Style M M Stroke range (mm) Bore size (mm) B E F FX FD FT H B 20 25 32 40 50 63 80 100 Up to 350 Up to 400 Up to 450 Up to 800 Up to 1200 Up to 1200 Up to 1400 Up to 1500 40 44 53 61 76 92 104 128 12 14 18 25 30 32 40 50 2 2 2 2 2 2 3 3 28 32 38 46 58 70 82 100 5.5 5.5 6.6 6.6 9 11 11 14 6 7 7 8 9 9 11 14 35 40 40 50 58 58 71 71 LT LH LT LX X Y Y X LZ LS + Stroke
Cable length VVFS2000-30A-1 VVFS2000-30A-2 VVFS2000-30A-3 VVFS2000-30A-4 VVFS2000-30A-5 VVFS2000-30A-6 VVFS2000-30A-7 1.5 m 3 m 5 m 7 m 10 m 15 m 20 m 1.5 m 3 m 5 m 8 m 10 m 15 m 30 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 VVZS3000-21A-5 VVZS3000-21A-6 VVZS3000-21A-7 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.
Example) Full length dimension = A + Stroke = ( + Stroke) + Stroke Bore size (mm) I Q S U Z J C K D L E M H N O 32 M8 x 1.25 60 9 depth 7 12.5 58.5 31.5 14 4.5 13 14 16 7 45 34 5.5 40 M8 x 1.25 69 14 9 depth 7 14 66 35 5 13 14 16 7 52 40 5.5 50 86 19 14 80 41 11 depth 8 7 15 17 20 8 64 50 6.6 M10 x 1.5 7-6-38 39 Series CQ2W/CDQ2W Compact Cylinder: Standard Type Double Acting, Double Rod Foot
(M): SY3140(R)-M-01-Q VQ5 VQZ VQD VFS VS VS7 VQ7 1.2-33 Base Mounted Type Series SY3000 Dimensions Note)< >: Values with surge voltage suppressor 2 position double Grommet (G), (H): SY3240(R)-01-Q Scale: 35% G H With interface regulator 141 15 68.5 65.6 68 32.5 24.5 With plug (12.5) (37) 41 L type plug connector (L): SY3240(R)-L-01-Q M type plug connector (M): SY3240(R)-M-01-Q 1.2-34 Base
(mm) H (Width across flat) 8 10 14 8 10 14 8 10 14 17 12 14 17 12 14 17 22 14 17 22 19 22 Connection thread R, M Note 1) D M Weight (g) A L1 L2 Model 2 x Applicable tube L1 L1 M KQG2T23-M5 KQG2T23-01S KQG2T23-02S KQG2T04-M5 KQG2T04-01S KQG2T04-02S KQG2T06-M5 KQG2T06-01S KQG2T06-02S KQG2T06-03S KQG2T08-01S KQG2T08-02S KQG2T08-03S KQG2T10-01S KQG2T10-02S KQG2T10-03S KQG2T10-04S KQG2T12-02S
tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter
0.05MPa / 8PSI M5 M5 01 18 02 14 03 38 04 12 06 34 2000 18 14 3000 14 38 4000 38 12 34 Bowl Material Polycarbonate Accessory (Standard) Bowl Guard P O R T T H R E A D 0.7MPa supply, 0.01MPa pressure drop (new) Rc(PT)* Remove (N) when ordering N NPT F G(PF)* Remove (N) when ordering D I M E N S I O N S M I S T S E PA R AT O R NAFD30004000 ACCESSORIES M I S T S E P A R AT O R S Y M B
2 1.5 m 3 3 m SI unit output polarity, End plate type (S6m) Refer to page 63.
73.6 l C B K CY h + l ZZ + l + Stroke MQQ M Stroke range Bore size (mm) S A AL B B1 C D E F H1 MM K KA M N HX J (mm) 40 50 63 80 100 RHC 30 35 35 40 40 130.6 133.6 140.6 152.6 159.6 27 32 32 37 37 6 7 7 11 11 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 60 70 86 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 8 11 11 13 16 14 18 18 22 26 19.4 16.4 18.4
ZZ Z U S RR QY Q NN Bore size (mm) 20 25 32 40 142 133 14 62 9 14 19.8 M20 x 1.5 146 137 14 62 9 14 22 M26 x 1.5 148 139 14 64 9 16 25.8 M26 x 1.5 188 177 18 88 11 16 29.8 M32 x 2 Rod Side Trunnion Style (U) Bore size Stroke CVM5U Manual override Width across flats B2 Width across flats NA Width across flats B1 S + Stroke ZZ + Stroke Eh8 H1 NN H MM B1 F K AL I Q A B2 D HX Bore size (mm) 20